SZ3000

When entry of part numbers becomes complicated, indicate on the manifold specification sheet. 1-3-25 26 Series SZ3000 How to Order SZ3 5 1 C6 M 60 Type of actuation A, B port size 2 position single solenoid C4: One-touch fitting for 4 C6: One-touch fitting for 6 (A) 4 (B) 2 1 Pilot type 5 (EA) 1 (P) 3 (EB) A 4 Nil R Internal pilot Manual override 2 position double solenoid External pilot

SZ3000

When entry of part numbers becomes complicated, indicate on the manifold specification sheet. 1-3-25 Series SZ3000 How to Order SZ3 5 1 C6 M 60 Type of actuation A, B port size 2 position single solenoid C4: One-touch fitting for 4 C6: One-touch fitting for 6 (A) 4 (B) 2 1 Pilot type 5 (EA) 1 (P) 3 (EB) A 4 Nil R Internal pilot Manual override 2 position double solenoid External pilot Nil

3 Port Air Operated Valve Series SYJA300

C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

5 Port Solenoid Valve

D-sub connector kit (25P) with 1.5 m cable MD1 Circular connector kit (26P) with 1.5 m cable FD2 D-sub connector kit (25P) with 3.0 m cable MD2 Circular connector kit (26P) with 3.0 m cable FD3 D-sub connector kit (25P) with 5.0 m cable MD3 Circular connector kit (26P) with 5.0 m cable 1 to 12 stations (12 stations, 20 points) LD1 Lead wire kit, 1.5 m lead wire LD2 Lead wire kit, 3.0 m lead

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 Component parts 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

PA/B 3.6 (0.2) A/BR 3.24 (0.18) Rc(PT)1/8: Rc(PT) 1/4: M5: PA/B 3.42 (0.19) A/BR 3.24 (0.18) PA/B 3.6 (0.2) A/BR 3.6 (0.2) C4: C8 : C4: Valve effective area mm2 (Cv factor) Note 2) C6: C10: C6: C8: Manifold base weight W (g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated

VZ100/300/500

) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP (Lead wire length) VG G: 300 mm H: 600 mm 3-Rc 1/8 (Piping port) VP S070 X port (For external pilot port) VQ M5 x 0.8 (PE port) VKF VQZ VZ VS M plug connector (M) VZ34-M-01 DIN terminal (D) VZ34-D-01 L plug

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

2-Color Display Digital Flow Switch Series PFM

(2 m) Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) T Panel mount adapter (For without flow adjustment valve) Nil None ZS-33-J ZS-33-M

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Default settings) Base mounted Solenoid Specifications Grommet (G), (H), L plug connector (L), M plug connector (M), DIN terminal (D), (Y), M8 connector (W) Symbol Electrical entry Internal pilot G, H, L, M, W D, Y 10-SYJ51 M 2 4 10-SYJ52 M 2 4 DC AC 50/60 Hz Coil rated voltage (V) 24, 12, 6, 5, 3 24, 12 2(A) 2(A) 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation Standard

VQC

m cable 1 to 12 stations (24 stations) Lead wire kit (25 core) 1.5 m lead wire Multiple connector kit (26P) with 1.5 m cable 1 to 12 stations (24 stations) Flat ribbon cable kit (26P) with 5.0 m cable Lead wire kit (25 core) 3.0 m lead wire Multiple connector kit (26P) with 3.0 m cable 1 to 9 stations (18 stations) PDC Flat ribbon cable kit (20P) without cable Multiple connector kit (26P

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(25P) kit, with 3.0 m cable D-sub connector (25P) kit, with 5.0 m cable Flat ribbon cable (26P) kit, without cable Flat ribbon cable (26P) kit, with 1.5 m cable Flat ribbon cable (26P) kit, with 3.0 m cable Flat ribbon cable (26P) kit, with 5.0 m cable Flat ribbon cable (20P) kit, without cable F kit U side D side 16 stations 1 to 12 stations 24 D side D-sub connector kit P kit Note 1)

VZ3000

-M5 G H Manual override (Non-locking) (Lead wire length) Mounting hole for manifold G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ3220-L-M5 M plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX.

VZ5000

-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01 M plug connector (M) VZ5220-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5220-D-01 Built-in One-touch fittings VZ5220--C6 C8 C6: MAX. 6 C8: MAX. 6.5