Rotary Table Series MSU

x 0.5 Port size Top ports M3 x 0.5 M5 x 0.8 (10-32 nominal) Deflection accuracy 0.03mm or less (0.0012") 2.

CE

Bore size (mm) Applicable switch Note 175 200 250 300 400 500 150 125 100 75 25 50 12 Switch mounting screw (M3 x 0.5 x 8l) Square nut D-A7, A8 D-A7H, A80H D-A73C, A80C D-A79W D-F7V D-F7, J7 D-J79C D-F7WV D-F79W, J79W 12 20 BQ-1 20 32 32 40 50 63 40 Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut 50 BQ-2 63 Contact SMC regarding non-standard strokes.

VP300/500/700

3 8 1 2 VV3P3 VV3P5 VV3P7 Base type 42 41 Individual exhaust Common exhaust VV3P3-41-051-02 Symbol Supply port is common.

MGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

Magnetically Coupled Rodless Cylinder

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

SMC Pneumatic Clean Series

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

Compact Cylinder

With Magnet for Auto Switch With Magnet for Auto Switch Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more Male connector (with hexagon socket head) Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more AS121F-M3-04

VK3000

x 26 Round head combination screw DXT199-23-4 M3 x 26 Round head combination screw M3 x 8 Round head combination screw VK300-33-3 Blanking plate VK3000-7-1 Manifold gasket VK3000-6-1 Manifold gasket VK3000-6-2 Manifold gasket for blanking plate VK3000-6-3 Applicable base Type VV5K3-20 Type VV5K3-21 Manifold base Applicable base VK3000-9-1 Sub-plate Type VV5K3-40 Type VV5K3-(S)41 Type VV5K3

VK3000

x 26 Round head combination screw M3 x 26 Round head combination screw M3 x 8 Round head combination screw Blanking plate Manifold gasket Manifold gasket Applicable base VK3000-9-1 Sub-plate VV5K3-40(-Q) VV5K3-(S)41(-Q) Manifold base VV5K3-(S)42(-Q) Applicable base VV5K3-20(-Q) VV5K3-21(-Q) Manifold base Manifold gasket for blanking plate Applicable base: In common for all types of VV5K3

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

For double solenoid For 3 position type: For 4 position type SX100-40-4DNegative common specifications Electric circuit diagram (With positive common and light/surge voltage suppressor) For single solenoid: SX100-41-4SFor double solenoid For 3 position type: For 4 position type SX100-41-4D[SOL.b] () Coil How to Order Lead wire length 2000 mm 10-SZ3160-5MO-M5 SX100-40-4S-20 COM (

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

37.5 34.5 25.5 38.5 40 33 35.5 26.5 36 32 28.5 29.5 31 24 27 80 46 42.5 39.5 29.5 43.5 45 38 40.5 30.5 41 36 32.5 33.5 35 28 31 100 50 46.5 43.5 31.5 47.5 49 42 44.5 32.5 45 38 34.5 35.5 37 30 33 41 Compact Hydraulic Cylinder Double Acting/Double Rod: 3.5MPa Series CHQWB B 32 to 100 D-A9 D-F9 D-F9W A B Approx.

1

Clip Approx. 80 to 90 or b Auto switch mounting band Fig. 1-5 Fig. 1-4 a Switch holder Enlarged view of clip M2.5 set screw (Accessory) e i Auto switch r Reinforcing plates w q y u c M3 set screw 5.1 or more 0 to 5 t Reinforcing plates M3 set screw Nut M3 set screw Nut The end of the set screw is protruding.

PSxx-OMR0001CN

m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

Slider Type Ball Screw Drive/11-LEFS Series

0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5 upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction

IDG

Specifications 0.01 m (95% filtered particle diameter) Filtration of outlet air Max. 0.1 mg/m3 (ANR) (0.08 ppm) Note) Outlet air oil mist concentration (Prior to oil saturated 0.01 mg/m3 (ANR) or less, (0.008 ppm or less)) Note) With inlet air oil mist concentration of 30 mg/m3 (ANR) (24 ppm) Applicable Model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

ZQ-OM01401

) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds