MXQ

-10 MXQ8-20 MXQ8-30 0.03 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 MXQ8-50 MXQ8-40 MXQ8-50 MXQ8-50 MXQ8-40 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-20 0.010 MXQ8-30 MXQ8-30 MXQ8-40 MXQ8-40 MXQ8-30 MXQ8-40 MXQ8-75 MXQ8-75 MXQ8-75 0.02 MXQ8-75 MXQ8-75 MXQ8-75 0.04 MXQ8-20 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-40 MXQ8-40 MXQ8-10 MXQ8-10 MXQ8-10 MXQ8-30 0.005

Air Slide Table Series MXS

MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 10 20 30 40 0 0 0 Load (N) Load (N) Load (N) 8 8 8 Lr=50 mm 0.020 0.04 0.05 MXS8-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 MXS8-10 0.02 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40

ZP

Form w 1 Material e Width across flats K Connection thread A 10 A5 42 21 2.5 M5 x 0.8 M3 x 0.5 3.5 21 8 4 8 13 44.5 23.5 16 46 25 10 47 21 13 49.5 23.5 16 51 25 20 54.5 28.5 25 55 29 32 60 34 40 66 40 12 50 70 44 20 N S U F GN GS 2.5 M6 x 1 M3 x 0.5 3.5 26 8 4 8 A6 ZP T B C2 Construction p. 117 49.5 33.5 4 M8 x 1 M5 x 0.8 5 16 12 4 12 25 50 34 32 55 39 40 56 40 4.2 50 60 44 Adapter Assembly

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

CXS

1 5.6 3.2 28 0.2 28 0.2 22.7 35 37 16 6.3 5 12 2-R3.5 4-M3 x 0.5 (Through) 2-M2.5 x 0.45 x 6 (Hexagon socket head cap screw) 2-M3 x 0.5 x 12.5 (Hexagon head bolt) 2-M3 x 0.5 (Hexagon nut) 6 7 4-M3 x 0.5 (Through) 4-M3 x 0.5 with depth 4.5 (Opposite side: Same) W (10) 10 3 2-5.1 8 6 22.5 22.5 (mm) 4-M5 x 0.8 with depth 4.5 (Piping port) (Opposite side: Same) Model W Z ZZ SS S 10 66 103 40

4/5 Port Air Operated Valve Series SYJA3000

x 0.5 M5 x 0.8 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

Actuated Air Gripper 3-Finger Type With auto switch (Built-in magnet): MDHR3-10R A 3 x M3 x 0.5 thread depth 6 P .C.D.24 (Mounting thread) 17.5 20 MDHR3-10E Port Location B 40 8.5 M3 x 0.5 Finger opening port M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port M3 x 0.5 Finger closing port 9.5 C 3 x 3 depth 6 +0.02 0 (A, B, C common view) 44 29 6 x M3 x 0.5 thread depth 6 (A, B, C common

Air Slide Table Series MXQ

It requires to order separately. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

e-Rodless Actuator

(A clearance of 40 or more is required.) (60) (74.7) 101.7 60 (40) 80 40 74.7 27 27 4H7 depth 5 Motor 72 43.5 50 42 60 102 102 50.4 40 5 5.1 40 3.5 40 Long hole depth 5 Controller 4 15.5 6 7.2 5.6 (Max. 8.6) 14.4 6.5 4H7 2-6.5 counterbore depth 3.3 28 (60.3) 87.3 2 x 2-3.3 through hole 4 152 + Stroke 4-M4 x 0.7 depth 7 FG terminal M3 T-slot section for mounting I/O cable (9 wires) 5.8 3.5

Compressed Air Cleaning Filter Series

Air flow rate (m3/min (ANR)) AFF8C AFF75B AFF150A Max. flow line Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l/min (ANR)) Air flow rate (m3/min (ANR)) Air flow rate (m3/min (ANR)) AFF11C AFF220A Max. flow line Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (l/min (ANR)) Air flow rate (m3/min (ANR)) 13 Main

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHZ 120 MHF 120 MHL B 40 MHR 8.5 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M3 x 0.5 Finger closing port M3 x 0.5 Finger opening port 9.5 MHS 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port MHC MHT C MHY 3-3 depth 6 +0.02 0 (A, B, C common

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Open: 11 Closed: 8 8 0 -0.05 12 4 3-M3 X 0.5 thread depth 6 (Thread for mounting attachment) MHR3-10R.SMHR3, #1 2.3-21 3 Finger Air Gripper Series MHR3/MDHR3 With Auto Switch (Built-in magnet): MDHR3-10R A 3-M3 X 0.5 thread depth 6 P.C.D24 (Mounting thread) 17.5 20 MDHR3-10E port position 120 120 B 40 8.5 M3 X 0.5 Finger closing port M3 X 0.5 Finger opening port 9.5 25 25 Finger opening

7.5

override: 40.5 40 OFF ON OFF ON 7.5 Note) For manifold dimensions including elbow fitting, refer to page 24.

MXS

SMXS16A, #3 SMXS16A, #4(#4+#9) SMXS16B, #1 SMXS16B, #2 SMXS16B, #3(#3+#7) (mm) Model F 35 35 35 40 30 55 65 70 ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

Air Slide Table Series MXP

J 3 0 +0.030, depth 1.5 5 4 12 9.5 Section AA 3 0 +0.030 , depth 1.5 Mounting datum level D B Q QL MXP12-25 Without magnet and switch rail 2 x M2 x 0.4, depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7, depth 4.5 2 x M3 x 0.5, depth 3.5 D-X (mm) G H J K L M Q QL S V W Z Model Individual -X MXP12-15 10 40 68 22 24 29 40 18 15 59 55 76 MXP12-25 30 60 98 40 42 49 60 23 25 89 75 106 205 Series MXP Dimensions

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

M2 m2 M3 m3 25 32 40 23 26 23 27.5 27.5 27.5 MY1H 39 50 39 39.2 39.2 39.2 50 50 39 50 50 50 The above values are the maximum allowable values for moment and load mass.

CY1

CY1H25 (Nm) 64 56 50 40 30 20 50 40 30 20 Model CY1H10 CY1H15 CY1H20 M2 2.5 16 16 M3 1.5 10 13 Model CY1H25 CY1HT25 CY1HT32 M2 26 85 96 M3 28 56 64 M1 1.5 10 13 M1 28 56 64 28 16 26 CY1H20 CY1H15 13 10 10 Moment Nm Moment Nm 2 3 4 5 22.5 3 4 5 CY1H10 M3 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s Static moment

SYJ300/500/700

VZ VS VFN 4-4-11 12 Series SYJ300 Manifold for Internal Pilot Type Type 20 Applicable solenoid valve SYJ312--M3 SYJ312M--M3 SYJ322--M3 SYJ322M--M3 How to Order A port M3 x 0.5 SS3YJ3 20 05 Stations Bracket Applicable blanking plate assembly SYJ300-10-1A 02 2 stations Nil Without bracket P R R port : : F With bracket M5 x 0.8 20 20 stations P port Note) For more than 10 stations, supply air

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.