Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

end) I 5.5 6 12 Operating port 2 x M5 x 0.8 11 3 5H9 ( ) depth 4 +0.030 0 2 x M5 x 0.8 thread depth 5.5 GA HA B A 5H9 ( ) depth 4 +0.030 0 NN x M6 x 1 thread depth 12 6 10.5 10.5 1 9.5 26 5.1 B A 10.5 24 10.5 24 H G (NN 1) x H Section AA Section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39

Profile Design ISO/VDMA Air Cylinder Series CP95

Piston speed [mm/s] Maximum air consumption Q [Nl/min.] 100 125 2 300 400 500 300 400 500 80 150 200 150 200 63 50 100 100 32 40 30 40 50 30 40 50 25 20 20 20 15 15 16 10 10 8 2000 10 5 4 1500 3 1000 2 6 500 400 300 1 1 200 0.5 100 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Working pressure [MPa] 1.8-26 Series CP95 Average air consumption of compressed air cylinders and piping Thermal loss is not represented

ZP

(17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) ZPT25 ZPT32 28 (26) 30 (25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections Model Applicable pad form Connection/Thread dia.

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

SYJ3000/5000/7000

Type 21P Model Clean appearance In the case of a flat ribbon cable type, each valve is wired on the print board of manifold base to allow the external wiring to be piped all together with 26 pins MIL connector.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Relative: 150 Numerical data defining operation The operation starts by changing the Movement MOD and Position in step data No.1 temporarily by defining numerical data from the PLC. 160 Operation t [Define numerical data in the Movement MOD and Position in Step No.1.] Movement MOD: 2 (Relative) and Position: 150 are defined from the PLC.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Manifold Specifications Porting specifications Maximum number of stations Series Port location Port size 1(P), 3(R) 4(A), 2(B) C8 C3, C4, C6, M5 12 stations (24 as an option) SQ1000 Side, Top Flat Ribbon Cable (26 pins, 20 pins) U side Cable assembly 1 2 3 stations AXT100-FC 1 2 3 20 26 D side Type 26P flat ribbon cable connector assemblies can be ordered with manifolds.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Triangle mark 48.5 5.8 26 Connector polarity indication 28.5 Applicable connector: 26-pole MIL type (Conforms to MIL-C-83503) SS5YJ3-32P-ll-M5, C4 C4(Built-in One-touch fitting) (Pitch) P=12.5 19.5 2n-M5 X 0.8 (A, B port) 1 2n-One-touch fitting (A, B port) Applicable tube: T0425 (Pitch) P=12.5 19.5 5 B B 15 29.8 1 A A 5 B B Manual override 15 29.5 A A L1 (Non-locking) L2 4 Manual override

MY1

Mass mn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5mm 0mm 65mm 0.88kg 210 65 111 Z Wb 42.5mm 0mm 150mm 4.35kg 150 Wc 42.5mm 111mm 150mm 0.795kg Wd 42.5mm 210mm 150mm 0.5kg Y 42.5 5 n = a, b, c, d 3 Composite center of gravity calculation m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x Xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x

MLGP

50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

MLGP

50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

Table of Contents

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

A

Model Port size A B C D E F G H J K L M N P B B NAC1010 M5X0.8 58 109.5 50.5 25 26 25 29 20 4.5 7.5 5 17.5 16 38.5 86.5 NAC2010 18 14 90 164.5 78 40 56.8 30 45 24 5.5 8.5 5 22 23 50 120.5 NAC3010 14 38 117 211 92.5 53 60.8 41 58.5 35 7 11 7 34.2 26 70.5 236.5 NAC4010 14 38 12 154 262.5 112 70 70.5 50 77 40 9 13 7 42.2 33 88 288 Courtesy of Steven Engineering, Inc. !

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Clean appearance For flat ribbon cables, each valve is wired on the print board of the manifold base to allow the external wiring to be piped all together with the 26 pin MIL connector.

CLK1

Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx. Ht 26 26 26 16 Series CLK1 Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Clamp Cylinder with Lock Series CLK1

Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx. Ht 26 26 26 16 Series CLK1 Clamp Cylinder with Lock Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Guide Cylinder Series MGG

, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9 118 102 129 75 50 134 95 93 50 170 45 M8 175 105 186 170 19 19 M8 x 1.25 depth 16 12 9 150 134 152 90 56 152 115 103 55 194 50

Ionizer

mm x 150 mm, capacitance: 20 pF) as defined in the U.S.