Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

MY1

Refer to pages 68 and 69 for details regarding dimensions, etc. 9 G 2-P (Hexagon socket head plug) For MY1H16 2-P PP QQ PP QQ RR SS RR SS NC G G Cushion needle UU TT UU TT 2-P (Hexagon socket head plug) 2-P (Hexagon socket head plug) VV VV 2-ZZ (Hexagon socket head plug) 2-ZZ (Hexagon socket head plug) WW XX WW XX P M5 x 0.8 M5 x 0.8 ZZ M5 x 0.8 M5 x 0.8 WW 7.5 10.5 NC 14 17.5 G 14 12.5

Electric Actuator

P For Male Thread/JA P For Female Thread/JB P For Male Thread/JS (Stainless steel) Stainless steel 304 (Appearance) Dust cover Fluororubber/Silicone rubber Basic Applicable size Applicable size Thread size Thread size 16 16 M8 x 1.25 M5 x 0.8 Foot Flange 25, 32 25, 32 M14 x 1.5 M8 x 1.25 16 Solid State Auto Switch/Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) Refer to SMC website for

SY

DIN rail] 21 P = 24 (Pitch) Manual override 13.5 DIN rail holding screw + Tightening torque: (0.55 to 0.65)Nm + 13.8 69.5 83.8 PE X EB P EA PE X EB P EA 4 A B 2 4 A B 2 4 A B 2 4 A B 2 4 A B 2 56.3 5.5 53 53 38.1 35 5 EA 3 EB 1 P 25.5 25.5 184.1 16.3 33.6 167.6 25 96.6 8 130.4 38.1 48.3 n 2 6-Rc 3/8 (P, EA, EB port) + + + + + Triangle mark 2-M5 x 0.8 (pilot, EXH

Best Pneumatics Vol. 14

01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V] Accessory

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

ZX

Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common

SYJ3000/5000/7000

-www.stevenengineering.com 20 20 stations R port 1/8 Applicable individual EXH spacer assembly A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size Applicable individual SUP spacer assembly ARBYJ5000-00-P How to Order Type 41 (5 Port/Base mounted) SS5YJ5 41 05 M5 Stations 02 2 stations P, R port thread type -+ -+ R port 1/8 : : R P Nil F N T Rc G NPT NPTF 20 20 stations A, B port M5 x 0.8 M5 M5

7.4

S0700 S0700 M5 V V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate

CQ2

Standard Bore (mm) Stroke range (mm) (mm) A B C D E F G H I J K1 K2 L M N p Q S U V Z Th9 0 0.052 44.4 6 6 10.5 M3 X 0.5 3.5 M5 X 0.8 15.5 37.4 35.5 1.5 5.2 32 5 22 3.5 25 19.5 5 to 30 12 15 0 0.052 48 41 10 15 8 8 M4 X 0.7 3.5 M5 X 0.8 41.5 1.5 6 38 6 28 3.5 29 22.5 5 to 30 16 20 0 0.052 10.5 18.5 48 55 46 7 10 M5 X 0.8 4.5 M5 X 0.8 2 8 47 8 36 5.5 36 24.5 5 to 50 20 13 0 0.052

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 1287 Solid State Auto Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) Refer to SMC website for the details of the products conforming to the international standards.

Mechanically Jointed Rodless Cylinder Series MY1

needle M5 x 0.8 (Port) 2 x M5 x 0.8 G G 2 x M5 x 0.8 (Hexagon socket head plug) MY3A MY3B (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A MY3M Z + Stroke M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) 2 x 2 x J depth K XX (WW) XX (WW) M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) MY1BG MY1BG VV VV 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) (Hexagon

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) Th9 Z U V S Q N A F M E J G H I K1 B C D K2 L P 0 0.043 12 5 to 30 19.5 25 35.5 15.5 3.5 22 32 1.5 44.4 37.4 10.5 M3 x 0.5 5.2 M5 x 0.8 6 6 5 3.5 15 0 0.052 16 5 to 30 22.5 29 41.5 15 3.5 28 38 1.5 48 41 10 M4 x 0.7 6 M5 x 0.8 8 8 6 3.5 20 0 0.043 20 5 to 50 24.5 36 48 18.5 5.5 36 47 2 55 46 10.5 M5 x 0.8 8 M5 x 0.8 7 10 8 4.5 13 0 0.043

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

AC

"VER2000" is V type. (Refer to "Best Pneumatics 1" on p.1.17-21 for further information.)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Nil : : P R 20 20 stations A A S + + + + P, R port thread type R port A port size R P A port M5 x 0.8, C4 P port 1/8 Nil Rc M5 M5 x 0.8 P port F G A 1/8 1/8 C4 One-touch fitting for 4 N NPT R port N3 One-touch fitting for 5/32" A port M5 x 0.8, C4 1/8 T NPTF Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port. 667 Manifold specifications

smcmaintenancepartslist

12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161 Sine Rodless Cylinder/Direct Mount Type Series REAR 10, 15 Replacement Procedure is P.316 Construction @2 @3 @6 @7 !

Compact Vacuum Ejector Series ZA

KJS04-M5 KJS06-M5 KJL04-M5 KJL06-M5 M-5P 1 station 2 stations ZX Without fitting (M5 x 0.8) 4 (Straight) 6 (Straight) 4 (Elbow) 6 (Elbow) With plug ... ... ZR 08 8 stations ZM ZMA Left common air pressure supply (P) port (viewed from the vacuum (V) port side) ZQ Maximum Simultaneous Opreating Stations Symbol 0 2 3 5 6 P Applicable tubing O.D. Part no.