High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

1

e, r, t, y q, w, t, y t Hexagon socket head plug r Plate mounting bolt MB Specifications and external dimensions other than above are the same as standard type.

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

VM

JIS Symbol 2 port Roller plunger VM122-M5-06 VM132-M5-06 VM122-M5-06S VM132-M5-06S Panel mounting hole Polyacetal or hard steel roller Hexagon nut thick 5, across flats 17 3 port 0.5 MPa supply R port (3 port only) 2-M5 x 0.8 depth 4 T.T. O.T. P.T.

0.55

, 3(R) port 1/8 1/2 5(R), 3(R) port 5/3(R) port 1/4 1/8 1(P) port 3/8 5(EA), 3(EB) port M5 x 0.8 1(P) port 5(R), 3(R) port 3/8 1/8 EXH Common EXH Individual EXH Common EXH Common EXH Common EXH port type VF3;30 VF3;33 VF5;20 VF5;23 VF1;30 VF1;33 Applicable valve model Applicable 2 to 20 stations 2 to 20 stations 2 to 15 stations 2 to 10 stations stations Manifold base W = 29n + 21 W = 51n

Stability of suction position,

2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.

Rotary Actuator

3 o r !3 w !4 r w !5 !4 !1 !1 y u i Component Parts Description Material Description Material No. No.

•

Ml0 X l ' It ~jath across fl ats 14 I W\dt~ acro ss fl ats 12 \lj ~ I W ,r~ --~ o ,..---. NM iniature tube fitling (Serie s M5) Width across flats 7 ~ ~~~S~ _ M5 ) 0 , >.2:1 'B ~ ~ ,...!

Rotary Actuator/Vane Style Series CRB2

Single vane type/Double vane type With angle adjuster CRB2BWU40-S/D (mm) h 6 x M5 x 0.8 depth 10 Keyway dimensions b l l b (h9) h (h9) Model CRB2BWU404 0 0.030 4 20 0 0.030 56 63 A port B port 25h9 0 0.052 10g6 0.005 0.014 11.5 4 0 0.030 2 20 2 x M5 x 0.8 45 30 6.5 Rotary actuator 35 A port B port 36.3 5.1 Angle adjuster Cap B W R 4 0 C SMC R R O O T A T A R U Y T C A 66 Series CRB2BWU Rotary

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Hydraulic

Example: M5 x 50l 4pcs.

Compact Rotary Actuator Series CRQ2

2 q w r y !5 i q w r y !5 !6 i Component Parts Component Parts Description Note Material No.

0.55

Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) for Common Precautions. 30 Series VPA300/500/700 Construction Standard u y t r e w q JIS symbol N.C. N.O. (A) 2 (A) 2 12 12 Standard 1 (P) 3 (R) 1 (P) 3 (R) i (A) 2 (A) 2 2(A) 3(R) o For vacuum 12 12 3 (R) 1 (P) 1 (P) 3 (R) X 1(P) For vacuum u y t r e w q i 2(A) 3(R) o X Component Parts No.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

smcmaintenancepartslist

7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Dual Rod Cylinder Series CXSJ/CXS

6 CXSWL (Ball bushing bearing) r u iy w !3 @2 @0 @3 @1 !7 !4 !5 !2 CXSWL6 r !5 !6 q !8 !0 !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 MRQ CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10, 15-D Double vane type CDRBU2WU20, 30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator 2 x R 2 x R 2 x R Cover Angle adjuster Angle adjuster Angle