Secondary Batteries

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R A, B port size (inch) A, B port size (metric) P, E port Applicable series P, E port Applicable series A, B port A, B port Symbol C4 C6 C8 C8 C10 C12 M Symbol N3 N7 N9 N9 N11 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting

V

Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube 08 8mm Tube 01 Rc1/8 07 1/4 Tube 09 5/16 Tube T01 1/8NPT V A C U U M P R E S S U R E S 660mm Hg L 360mm Hg D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) Nozzle Diameter mm Specifications

HRX-OM-X084

flow rate 2 / / Ma no (M ma TNN ALXX Allarm number (Allarm number maximum FLOW / / / PU P Pump output setting 3 (%) 900 Displays only when the alam is generated.

HRX-OM-W002

flow rate 2 / / Ma no (M ma TNN ALXX Allarm number (Allarm number maximum FLOW / / / PU P Pump output setting 3 (%) 900 Displays only when the alam is generated.

Series VQ Metal Seal/Rubber Seal Body Ported

L Series VQ1000 Plug lead Cassette Plug-in P.1.10-12 P.1.10-14 Series VQ0 P.1.10-44 P.1.10-36 P.1.10-40 Series VQ1000 P.1.10-36 P.1.10-40 P.1.10-44 C Series VQ2000 P.1.10-40 P.1.10-44 P.1.10-36 Series VQ1000 P.1.10-74 P.1.10-76 P.1.10-78 1.10-4 Manifold Variations C S L Port size SUP EXH port Cylinder port kit kit SY Lead wire Direct electrical entry style Serial transmission unit P, R A,

125

B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket

Intrinsically Safe Valve

wire length) (11.7) 32.5 10.5 3 x 1/8" {P(1), EA(5), EB(3) port} 32.3 0.8 15 1.6 (20) EB P EA 2 x 2.2 (For manifold gasket positioning) 27.2 (45) L-type plug connector with cover (LL) 53-SY5120-LL-01 (-F2) Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 12 14.7 L (Lead wire length) 104 Terminal type (TT) 53-SY5120-TT-01 (-F2) Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 L (Lead wire

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

SV

A, B port size (metric) A, B port size (inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch

0.4

L kit (Lead wire) P.578 VQC1000/2000 M kit (Circular connector) P.580 VQC1000/2000 Construction VQC1000/2000 Exploded View of Manifold VQC1000/2000 Manifold Optional Parts VQC1000/2000 Specific Product Precautions P.582 P.584 P.588 P.595 543 Base Mounted Plug-in Unit How to Order Manifold VQC1000 Series VV5QC 1 1 08 FD1 C6 kit F P M L T VV5QC 1 1 08 SDQ C6 S kit Base mounted plug-in

JXCx-OMT0061CN

-206) CC-Link WDT E <> *1 (RWr)code"01-***""*** 10.1.2 (RWr RWw)(P.38) 76 - 17.

42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations

REC

Lead wire length* (m) Load voltage Auto switch model Electrical entry Indicator Wiring (Output) 3 (L) 5 (Z) Applicable load Special function Style 0.5 () (N) AC DC P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P C76 IC circuit P P P P P p p p P p p p p p p p P P P P P P P P 3 wire (Equiv. to NPN) 5V Yes C73 100V 12V Relay PLC C80 IC circuit No 100V

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

ARM10/11

P C C U U O O S S L L H H 8 11.5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

ARM10/11

P C C U U O O S S L L H H 8 11.5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

VM

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. . p. 19 Made to Order. p. 26 Function Details. . p. 27 Safety Instructions.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ1000 Series P.1.10-124 P.1.10-128 P.1.10-132 Plug-in Plug lead VQ2000 Series P.1.10-124 P.1.10-128 P.1.10-132 VQ0 Series P.1.10-170 P.1.10-174 VQ1000 Series P.1.10-170 P.1.10-174 P.742 1.10-114 Manifold Variations T L C S Port size SUP EXH port Cylinder port kit kit kit Lead wire Direct electrical entry style Serial transmission unit Terminal box (Terminal block) SY P, R A, B Enables single-wire

Output Specification: NPN Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Option 1: -, Option 2: -, Option 3: -