VM

D.

HRX-OM-S004

capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC. . 8-18 8.9 Daily Check Sheet

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

3 Port Solenoid Valve/

Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 How to Order Residual pressure release valve VP X536 2 5 4 5 Z R D 1 03 M X538 VP 4 1 5 4 R 5 D Z 03 M A Dual residual pressure release valve Dual residual pressure release X555 VP 4 1 5 4 5 D Z 03 M valve with soft start-up function Throttle Thread Series Nil Variable throttle 10 1 fixed orifice 15 1.5 fixed orifice 20

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

H T E (Note)L d W D T Max.

Vacuum System Peripherals:

Area: (800) 258-9200-www.stevenengineering.com 04 Both sides D side 05 5 Can accommodate up to 8 solenoids.

PF2A/PF2W

Digital Flow Switch For Water Series PF2W How to Order ZSE ISE Integrated display type PF2W7 20 03 27 PSE Unit specifications Flow rate range Z I SE3 Thread type Nil M With unit switching function Fixed SI unit Note) 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min 04 20 40 11 Nil N F Rc NPT G PS Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l Port size Z I SE1

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

Air Cylinder Series MB

Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 125 160 164 190 238 279 170.5 175 205 261 307 Double Clevis Style U L Z + Stroke RR CX Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 L RR U CZ Z ZZ DCZ ZZ + Stroke 32 40 50 63 80 100 125 Up to 500 23 23 30 30 42 42 50 10.5 11 15 15 23 23 28 13 13 17 17 26 26 30 28 28 40 40 60 60 64 154 158 182 182

Free Mount Cylinder

(D)UKC32 Rc 1 8 Rc 1 8 14 18 26 32 40 50 3 4 8 10 9 10 8 10 16 20 20 22 33 43.5 33.5 34 12 5 to 50 19 21.5 15.5 5 to 50 Model H J L P Q QA R S SA T Y Z MM ZC(D)UKC16 ZC(D)UKC20 ZC(D)UKC25 ZC(D)UKC32 ( ): In the case of a mounted auto switch.

VQ7-6/7-8

1.4 0.11 6.0 1.1 0.13 5.0 Rubber seal 15 or less VK VQ7-6-FHG-D1.1 0.10 5.2 0.9 0.10 4.1 Metal seal 40 or less Closed center 0.48 VQ7-6-FHG-D-R 1.3 0.20 5.6 1.1 0.13 5.0 VZ Rubber seal 45 or less VQ7-6 1/4 VQ7-6-FJG-D1.1 0.10 5.2 0.9 0.10 4.1 Metal seal 40 or less Exhaust center 0.48 VF VQ7-6-FJG-D-R 1.4 0.17 6.0 1.1 0.16 4.8 Rubber seal 45 or less VQ7-6-FPG-D3.1 1.4 Metal seal 50 or less

VQ7-6/7-8

1.4 0.11 6.0 1.1 0.13 5.0 Rubber seal 15 or less VK VQ7-6-FHG-D1.1 0.10 5.2 0.9 0.10 4.1 Metal seal 40 or less Closed center 0.48 VQ7-6-FHG-D-R 1.3 0.20 5.6 1.1 0.13 5.0 VZ Rubber seal 45 or less VQ7-6 1/4 VQ7-6-FJG-D1.1 0.10 5.2 0.9 0.10 4.1 Metal seal 40 or less Exhaust center 0.48 VF VQ7-6-FJG-D-R 1.4 0.17 6.0 1.1 0.16 4.8 Rubber seal 45 or less VQ7-6-FPG-D3.1 1.4 Metal seal 50 or less

90

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 04 06 08 10 For 2 stations manifold For 4 stations manifold For 6 stations manifold For 8 stations manifold For 10 stations manifold d Model and dimensions D Applicable size d 6 8 1/4" 5/16" Weight (g) Note A L D Symbol 06 08 07 09 White White Orange Orange 18 20.5 18 20.5 35 39 35 39 8 10 8.5 10 1 2 1 2 Connector type 1 2 D sub-connector (

Compact Manifold Regulator Series ARM5

Z A q w e r u t y N Common Supply Type 1.

AC

Applicable Body Size All 31, 41 31, 41 Port Size 1/4 3/8 1/2 Applicable Body Size 21 31 41 Symbol 02 03 04 Filter How To Order Series AF 20 to 40 AF 30 N 03 X480 Z 8 D Filter With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Applicable Body

Series AC Epoxy Coated F.R.L.

Applicable Body Size All 31, 41 31, 41 Port Size 1/4 3/8 1/2 Applicable Body Size 21 31 41 Symbol 02 03 04 Filter How To Order Series AF 20 to 40 AF 30 N 03 X480 Z 8 D Filter With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Applicable Body

Air Cylinder

Bore size Auto switch model 40 50 63 80 100 40 50 63 80 100 D-Y59D-Y7P/Y7D-Y7D-Y7BA D-A9D-M9D-M9D-M9D-F5D-J59W/F5BA D-F5NT/F59F D-Z7D-A3D-A3D-G5D-K59W/G5BA D-G5NT/G59F 5 6 6.5 6.5 7 9 10 11 11 11 D-A5D-G5NBL

Cylinder with Lock

Bore size (mm) Auto switch model 40 50 63 80 100 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 BT-08 BT-08 BT-06 BT-04 BT-04 D-A5/A6/A59W D-F5/J5/F5W/J59W D-F5NT/F5BAL/F59F BA3-100 BA3-080 BA3-063 BA3-050 BA3-040 D-A3C/A44C/G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL BA4-080 BA4-080 BA4-063 BA4-040 BA4-040 The above figure

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Modular Type Regulator Series AR

50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option Note 1) 1 Symbol Nil B G Note 2) Applicable model AR25 to 60