Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

42

for D-sub connector cables is 20 mm.

Fieldbus System

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

HRX-OM-W002

9.6 Pump capacity 9-15 HRX-OM-W002 Chapter 9 Documents 9.6.5 HRR012/018/024/030-A/W-20-T1 Fig 9-18 Pump capacity(HRR012/018/024/030-A/W-20-T1) 9.6 Pump capacity HRR Series 9-16 HRX-OM-W002 Chapter 9 Documents 9.7 Required facility water flow (for water-cooled type) 30 HRR030-W-20 HRR024-W-20 Facility water flow rate [L/min] 25 HRR018-W-10/20 20 HRR012-W-10/20 15 10 5 0 0 10 20 30 40 50 Facility

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

Valve Single Unit

20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer to page 1-6-8.

VDW

VCL Standard Option t 1 Body Brass (C37) Stainless steel VCS 2 Tube assembly Stainless steel 3 Coil assembly VCW y 4 Armature assembly FKM, EPDM Stainless steel, PPS, NBR 5 O-ring (Body) FKM, EPDM NBR 6 Return spring Stainless steel q 7 Cover SPCE 8 Clip Stainless steel 245 Series VDW10/20/30 Dimensions VDW11-l G W VDW21-l G W 22 20 Lead wire l Approx. 300 Lead wire l Approx. 300 20

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

I

01) and oilfree air supplied to the pilot port. 8. M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

-00 KPQL10-00 18.5 16 25 35 23 6.8 28.4 M L 8 12 KPGL12-00 KPQL12-00 20.9 20 40 50 24 7.5 30.4 Note 1) D indicates the maximum diameter.

Manifold Specifications

DIN Rail Manifold Common SUP/Common EXH How to Order Type 45 (Non plug-in type) Applicable solenoid valve C D 45 05 C8 VV5Z5 G L M D VZ54Stations 4 (A), 2 (B) port size SUP/EXH block mounting position 02 2 stations Applicable blanking plate assembly VZ5000-65-2A One-touch fitting for 6 Symbol Position Applicable stations 2 to 10 stations D U C6 20 20 stations B 2 to 20 stations 2 to 10

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SS3YJ7-21 SS3YJ7-21R Manifold base Manifold base 2.2-39 Series SYJ700 Manifolds for Internal Pilot 20/21 Type How to Order Applicable solenoid valve SYJ712-l-01 SYJ712M-l-01 SYJ722-l-01 SYJ722M-l-01 Applicable blank plate ass'y SYJ700-10-2A A Port Rc (PT)1/8 SS3YJ7-20 -05 A Port Rc (PT) 1/8 Valve model Stations 20 Type 20 2 stations 02 P Port Rc (PT)1/4 P Port Rc (PT)1/8 21 Type 21 .. ..

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m (b) (d) Shield Signal name Terminal No.

High performance type Step Motor Controller (Servo/24 VDC)

Target position (01-149) Posn failed D SVON Input The connection with the higher-level devices is disconnected. A Communication error occurred (01-150) RESET Communi D SVON cation Do not interrupt the connection between the PC and teaching box when the electric actuator is being operated by upper-level devices.

Table of Contents

Negative common specifications L dimension How to order negative COM manifold 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

VZ5000

Closed Center/Exhaust Center/Pressure Center VZ5320 Grommet (G), (H) VZ5 20-01 G H (Mounting hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire

E-P HYREG

size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Symbol Base mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1

JXCx-OMY0006

Turn Alarm _Commen t_159 (01-159) ON RESET 9F D SVON and SETUP The connection with the higher-level devices (such as the PC and teaching box) is disconnected. Communic ation error. (01-150) The connection with the higher-level devices (such as the PC and teaching box) is disconnected.

Smooth Cylinder/Low Speed Cylinder

D-A9V D-M9V D-M9WV D-M9AV 20 (22) 7.5(5) ( ): Denotes the values of D-A9V.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AS TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS-FE KE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FG Flow rate L/min (ANR) Flow rate L/min (ANR) AS-FP AS-FM AS-D AS-T AS-D AS-T ASP Number of needle