Style: Pressure Switch, Body Size: AC50, AC60, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Body Type: Standard

High Vacuum Angle Valve

Nil: Size 50, 63, 80 only. r Auto switch type Without auto switch (without built-in magnet) Remarks Symbol Nil Auto switch model D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) t Number of auto switches/Mounting position M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Symbol Nil A B C Mounting position Valve open/closed Valve open Valve closed Quantity

1

Auto Switch Mounting Position Auto Switch Mounting Height D-A7H/J79W D-A80H/F7BAL D-F7/F7F D-F79/F7NTL D-F7W D-A72/A7H/A80H D-A73C/A80C D-F7/F7V/F7W D-F7WV/F7BAL D-J7 D-A73C D-A80C D-F7WV D-F7V D-J79C D-A7/A8 D-A79W D-A73 D-A80 D-A79W D-F7F D-F7NTL Bore size (mm) Bore size (mm) A B A B A B A B A B Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 40.5 39.5 40 39 37.5 36.5

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

Electric Actuator/Slider Type

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYMA: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYBA: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYEA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Products no. LE-CYE-S A LE-CYE-R A D 6.5 6.8 LE-CYM-S Ais JZSP-CSM0 -E manufactured by YASKAWA CONTROLS CO., LTD.

ZP

C A C A B D B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 ZPX100HB 25-A22 ZPX100HB 50-A22 ZPX100HB 75-A22 ZPX100HB 100-A22 ZPX125HB 25-A22 ZPX125HB 50-A22 ZPX125HB 75

Table of Contents

Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

plug connector (M) (Standard) 2 position double With surge voltage suppressor (G)(L) (M)(D) With light/ surge voltage suppressor (L)(M) (D)(F) 100 VAC 50/60 Hz VZ5000 200 VAC 50/60 Hz 24 VDC 2.4 4/2 5/3 M plug connector (M) (Option) Page 3-3-53 24 VAC 50/60 Hz Locking B type (Slotted) (A/B EA/EB) 48 VAC 50/60 Hz 110 VAC 50/60 Hz 3 position closed center 220 VAC 50/60 Hz 6 VDC 12 VDC

Battery-less

Absolute (Step Motor 24 VDC) LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 Model Lead Pushing speed [mm/s] Pushing force (Setting input value) LEYG16M L mE A/B/C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80

LX

(A contact) F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL Lead screw lead N.C. (B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

MY1

guide type) (mm) 40 32 25 Mounting position A 131.5 180 216 B 88.5 100 124 Operating range l Note) 8.5 11.5 11.5 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 335.5 290.5 B 138.5 123.5 Operating range l Note) 11 11 A B 8-11-103 99 Series MY1 Proper Auto Switch Mounting Position (Detection at stroke end) D-M9, D-M9V, D-F9W, D-F9WV Note) The operating range

SY

plug (16.5) 56 L type plug connector (L): SY5 40(R)-L-02 M type plug connector (M): SY5 40(R)-M-02 DIN terminal (D): 3 4 5 3 4 5 3 4 5 SY5 40(R)-D-02 Applicable cable O.D. 3.5 to 7 81.7 74.2 157.8 Max. 10 62.9 Pg.7 18 18 159.6 28 58.1 9.5 22 Grommet .

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

V

Base Mounted Without Subplate M3 With Subplate V O LTA G E 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC 1 100 VAC 50/60 Hz 3 110 VAC 50/60 Hz 115 VAC 50/60 Hz 2 200 VAC 50/60 Hz 4 220 VAC 50/60 Hz 230 VAC 50/60 Hz E L E C T R I C A L E N T R Y M A N U A L O V E R R I D E G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LN L Type Plug without

MGP

20 30 40 50 51 100 200 10 10 20 30 40 50 51 100 200 Stroke (mm) Stroke (mm) 7 l = 50mm V = 400mm/s 8 l = 100mm V = 400mm/s 50 50 80 80 80 80 40 40 30 30 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 47 Series MGP Compact Guide Cylinder: Heavy Duty Guide Rod Type Operating Range when Used as Stopper 2000 l: Approx. 50mm l: Approx. 50mm MGPS80 1000 m m Weight

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYM-llA-l: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYB-llA-l: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYE-llA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Product no.

LJ1H

L R Left Right Non-standard motor Mitsubishi Electric Corporation Yaskawa Electric Corporation Standard motor cable length Motor output: 200W Cable entry direction 2 3 4 5 2m 3m 4m 5m Power supply voltage F R L T B Axial Right Left Top Bottom Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Non-standard motor 1 2 0 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Non-standard motor switch

Air Slide Table

overhang L [mm] Allowable overhang L [mm] MXQ8 -Z MXQ20A-Z A C OUT side IN side OUT side IN side ST 10 to 40 ST 50 ST 10 to 30 70 0.7/ 440 0.7/ Supply pressure [MPa] Supply pressure [MPa] Pressing force [N] Pressing force [N] ST 50, 75 ST 40 ST 100,125,150 ST 75 50 0.5/0.67 310 0.5/0.67 190 0.3/0.4 30 0.3/0.4 0 50 100 150 200 0 100 50 200 150 250 300 Allowable overhang L [mm] Allowable

CQS

X 45 l X 50 l X 55 l M5 X 30l X 35 l X 40 l X 45 l Model C Model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Special long bolt for through hole mounting is available as an option.

Aluminum High Vacuum Angle Valve

Nil: Size 50, 63, 80 only. r Auto switch type Without auto switch (without built-in magnet) Remarks Symbol Nil Auto switch model D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) t Number of auto switches/Mounting position M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Symbol Nil A B C Mounting position Valve open/closed Valve open Valve closed Quantity