Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A parallel key is used instead of single flat for size 40. Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except for basic type. Note 2) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A parallel key is used instead of single flat for size 40. Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except for basic type. Note 2) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

KJ

(mm) (2) Connection thread R (1) A Weight (g) Model D P M L Nylon Urethane 2-applicable tubing D KQ2U23-M5 38 34.5 2.2 2.2 9 M5 x 0.8 10 1 8 KQ2U23-01S KQ2U23-02S 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 11 14 1 4 KQ2U04-M5 39.5 M5 x 0.8 M6 x 1.0 4 2.2 2.2 KQ2U04-M6 40 36 10 11 4 10.4 16 10.4 1 8 KQ2U04-01S 42 38 11 4.2 4.2 D 1 4 KQ2U04-02S 46 40 20 14 KQ2U06-M5 42.5 M5 x

VFR

size A, B P , EA, EB Connector mounting direction Symbol 03 04 3 8 1 2 1 2 Symbol Applicable base With connector M Mixed D Nil 01T, 10, 40 D side mounting None For bottom ported: Rc 3/8 only.

Proposals for Energy Saving

Non-rotating accuracy Non-rotating accuracy Bore size (mm) 40 63 100 0.08 0.06 0.05 Series variations Standard stroke (mm) Auto switches Bore size (mm) Model Reed switches: D-Z7/Z8 Solid state switches: D-Y5/Y6/Y7 2 color indication solid state switch: D-Y7 Water resistant 2 color indication solid state switch: D-Y7BA 30 50 75 100 MGF 40 40 63 MGF 63 MGF100 100 13 &RXUWHV\RI6WHYHQ(QJLQHHULQJ

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type 40/41 How to Order 10--SS3YJ7-40 -05 --01 Applicable solenoid valve 10-SYJ714M10-SYJ724MR port 1/4 R port 1/8 Clean series Applicable blanking plate assembly SYJ700-10-2A Manifold P, R port thread 40 41 Type 40 Type 41 Stations Nil Rc G NPT NPTF A A A A 2 stations : 20 stations 02 : 20 F N T P Port 1/8 P Port 1/4 01 1/8 A port size A port 1/8 A port 1/8 Note) For more than 6 stations

SX

A: Orange B: Green U D Note) The dimensions L1 to L4 are identical to SS5X3-45F Station (P . 1-6-92).

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

pilot port) (Lead wire length) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 75.4 [82.4] 34.5 17.5 15.5 96.5 44.5 29.5 29.5 3/8, 1/2 [1(P), 5(EA), 3(EB) port] L plug connector (L): 10-SY9 40(R)-LM plug connector (M): DIN terminal (D, Y): 10-SY9 40(R)-WO3 4 5 M8 connector (WO): 3 4 5 3 4 5 3 4 5 D Y 10-SY9 40(R)10-SY9 40(R)

SYJ300/500/700

Type 40/Type 41 How to Order SS3YJ7 40 05 01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 A A F N T A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 A port 1/8 Note) If there are more than

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Air Fittings & Tubing

D P M Part No.

KQ2

(mm) Effective area (2) (mm2) Nylon Urethane Connection thread R (1) Mass (g) A D L P M Model 2 x applicable tubing KQ2U23-M5 38 34.5 2.2 2.2 9 M5 x 0.8 D 10 9.6 40.1 43.5 9.6 15.5 37 38 14 3.4 2.9 3.2 1 8 KQ2U23-01S KQ2U23-02S 11 14 1 4 KQ2U04-M5 39.5 M5 x 0.8 M6 x 1.0 4 2.2 2.2 KQ2U04-M6 40 36 10 11 4 10.4 16 10.4 1 8 KQ2U04-01S 38 41.1 4.2 4.2 11 D 1 4 KQ2U04-02S 45.5 40 20 14

CM2

20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-H7l D-H7C

ZP

G E D G E D G E D G ZPT20B ZPT25B 32 34 ZF 23.5 24 29 ZPT32B 20 25 22 27 5 8 12.4 10.5 25 28 37 15.6 10.5 18.9 14 ZP ZCU 10, 13, 16 Size 40, 50 Size AMJ Bellows Bellows Misc.

REA/REB

MK(2) 25 to 40 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model RS Q G D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) RS H A 25 18 99 43 74 74 99 43 18 32 RZQ 21.5 46.5 46.5 83.5 83.5 108.5 108.5 21.5 40 23.5 48.5 48.5 99.5 99.5 124.5 124.5 23.5 MI W S Operating Range CEP1 Bore size (mm) Auto switch model

REA/REB

MK(2) 25 to 40 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model RS Q G D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) RS H A 25 18 99 43 74 74 99 43 18 32 RZQ 21.5 46.5 46.5 83.5 83.5 108.5 108.5 21.5 40 23.5 48.5 48.5 99.5 99.5 124.5 124.5 23.5 MI W S Operating Range CEP1 Bore size (mm) Auto switch model

Metal Seal/Rubber Seal Series VQ Body Ported

2-4-28 P. 2-4-23 P. 2-4-68 P. 2-4-59 P. 2-4-68 P. 2-4-60 P. 2-4-68 P. 2-4-63 Standard P. 2-4-92 P. 2-4-87 2-4-3 Series VQ/Body Ported: Variations Series VQ/Body Ported: Variations Manifold Variations F P T kit kit J kit kit Terminal block Flat ribbon cable connector (26, 20, 16, 10 pins) Conforming to MIL flat ribbon cable connector Flat ribbon cable connector (20 pins) D-sub connector Conforming

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Modular F.R.L. Unit

Min. clearance for maintenance 25 A AFD30, 40, 40-06 L Bracket (accessory) D A G F K M J C 40 B E IN OUT H OUT Port size P Drain Min. clearance for maintenance With compact auto drain (N.C.)