MGP

40 stroke 20 30 100 P=0.5MPa P=0.5MPa 200 80 100 25 10 20 50 50 40 Load weight m (kg) 3 4 5 16 40 20 30 32 12 2 Load weight m (kg) 1 25 20 10 0.3 0.4 0.5 5 4 16 12 3 0.2 2 0.1 10 100 50 200 40 30 20 1 Eccentric distance l (mm) 0.5 0.3 0.4 40 to 124 stroke 0.2 30 20 0.1 P=0.5MPa 10 100 50 20 30 40 200 25 20 10 Eccentric distance l (mm) Load weight m (kg) 2 3 4 5 16 12 Over 75 stroke 1 100

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Minimum Stroke for Auto Switch Mounting (mm) D-A7H D-A80H D-F7 D-J79 D-M9 D-F9W D-F7W D-J79W D-F7BAL D-F79F D-F9BAL D-A7 D-A80 D-A73C D-A80C D-A9V D-F7V D-J79C D-M9V Number of auto switches mounted D-F7WV D-F9WV D-F7BAVL D-A9 D-A79W D-P5DWL CUJ 1 pc. 2 pcs. 5 5 5 10 10 15 15 15 15 20 20 20 10 10 30 30 CU CQS Bore size (mm) Additional Weight Weight (g) (g) 12 16 20 25 32 40 50 63 Bore size

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0 E D E '" Width across flats 8 ZPR02U 12 70.5 2 2.6 20 65.5 25 O .B 4 4.B 16 65.5 70.5 O.B ZPR04U 20 25 Width across flats 10 ZPfI06U 7 2.5 65.5 70.5 0.8 6 20 25 ,ZPROIlU 2.5 65.5 8 9 20 25 70.5 1 Applicable tube (mm) '. ~ Applicable tube 0.0 ' H I ,p 'J" ;. 4 20.6 15.6 10.4 16.6 1 2.8 6 .21.6 . . ~ Weight List/ Male Thread (gf) (mm) Flat type Flat with rib MlXlel 'A .B C D E F 1:/0f5xOB

Modular F.R.L. Unit

E G P 2 1 6 8 C J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

Table of Contents

2-4-28 P. 2-4-23 P. 2-4-68 P. 2-4-59 P. 2-4-68 P. 2-4-60 P. 2-4-68 P. 2-4-63 Standard P. 2-4-92 P. 2-4-87 2-4-3 4 Series VQ/Body Ported: Variations Series VQ/Body Ported: Variations Manifold Variations F P T kit kit J kit kit Terminal block Flat ribbon cable connector (26, 20, 16, 10 pins) Conforming to MIL flat ribbon cable connector Flat ribbon cable connector (20 pins) D-sub connector

VQZ1000/2000/3000

15 7.7 10 10 VQZ Rc 1/8 53 38 84.5 (Single) 109 (Double) 122 (3 position) 300 VQD (Lead wire length) Cover diameter 1.6 Cross section 0.34 mm2 65.5 36.5 31.2 17 X 62 5 1 P 3 R1 R2 R1 R2 5 1 P 3 26 (33) 15.2 13.8 8 PE port 4-Rc 1/4 3(R2), 5(R1) port 2-M5 x 0.8 External pilot port 37.4 66.5 11 20 16 20 2-Rc 1/4 1(P) port 20 20 The broken lines indicate the DIN rail mounting style [-D]. (38

Modular F.R.L. Unit

Note 2) AW20K to 40K 20 30 40 D Float type auto drain (N.O.)

NCA1

A R D S T R O K E O P T I O N O V E R S I Z E D R O D XB5 O P T I O N Inches Example: 04 = 4 Stroke When ordering an oversized rod, please order the following way to represent the rod size required.

5 Port Solenoid Valve, Series VQC

Communication connector (PROFIBUS-DP): M12, 5 pins (plug) 3 2 5 R 1 4 0 0 0 0 BUS 3 Description Function No. 1 1 12 1 1 Terminal +5V VP X 1 2 2 P PWR Signal N R x D/T x D(N) 2 3 3 1 GND terminal DGND 3 Signal P R x D/T x D(P) 4 Shield ground SHIELD 5 Power connector: M12, 5 pins (Boss configuration differs from plug and communication connector.)

Electric Actuator with Integrated Guide

10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 10 P.42 Non-standard

Stopper Cylinder

Q D B 20 15 D L M9BW 20 to 50 y !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Ht Ht B 20 D-P4DW Hs Auto switch Ht Ht A 32 B 18 Fine Lock Cylinder: Double Acting Series CLA2 Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height Auto Switch Proper Mounting Position [mm] Auto switch model D-A5l D-A6l D-A3l D-A3lC D-A44 D-A44C D-G39 D-G39C D-K39 D-K39C D-B59W D-Z7l D-Z80 D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7lW D-Y7lWV D-Y7BA D-G5l D-K59

JIS Standard Hydraulic Cylinder

joint CHA Material: Cast iron Bore size (mm) Rod series 2 x P keeper plate mounting screw J P H A B C D d K L L1 E Part no.

SMC Pneumatic Clean Series

Width across flats B1 2-NN MM MM NA 20, 25 2-Eh8 D D Standard port 45 45 Relief port 1.5 AL 1.5 AL A F K K N N F A H + Stroke H S + Stroke ZZ + 2 x Stroke 32, 40 (mm) AL F K MM NA NN ZZ Bore size S P N I G E A 41 32 32 26 B2 H2 22 17 17 13 B1 21 19.5 19.5 15.5 D H H1 8 13 0 14 12 10 8 20-0.033 24 22 22 18 40 32 25 20 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 42.5 34.5 30 24 21.5 15 15 15

KR

K KGW P. 14 M Universal male elbow P. 12 KGV H Universal male elbow allows thread connection by using a socket wrench for confined spaces. D Bulkhead connector KGE P. 18 Use to connect male thead and tube through a panel.

VZ100/300/500

20 stations V100 R port SY P port Bracket is not mounted.

High Vacuum Angle Valve

XLS-16XLS-16-P XLS-25XLS-25-P Description w y r e-1 e-2 XLS16-20G, C, T, D XLS16-20-P G XLS25-20G, C, T, D XLS25-20-P G Coil assembly Core assembly Armature assembly O-ring O-ring XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V Note 1) In case of coil assembly, please enter voltage symbol in .

Fluoropolymer Piping Equipment

Tubing size (D) LQ1E21-T-R8 6 8 x 6 TH TIH 8 30.5 20 3.6 LQ1E21-T-R9 10 x 8 10 LQ1E21-T-R10 12 x 10 12 34.5 24 LQ1E22-T-R8 B side D 4 6 15 14 28 16.5 6 x 4 6 25.5 15 2.6 LQ1E22-T-R9 8 x 6 8 30.5 20 LQ1E22-T-R10 10 x 8 10 LQ1E22-T-R11 12 x 10 12 34.5 24 LQ1E31-T-R1 4 B L3 8 x 6 5 9 8 36.6 33.6 20 6 LQ1E31-T-R2 6 x 4 6 28.6 15 3.9 LQ1E31-T-R8 12 x 10 12 37.6 24 7.4 LQ1E31-T-R9 19 x 16 19

LX

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

MXQ

40.5 27 Solid State Switch: D-M9BV, D-M9NV, D-M9PV, D-F9BWV, D-F9NWV, D-F9PWV Stroke B Stroke E Model A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 10 9.5 9.5 9.5 17.5 17.5 1.5 1.5 1.5 9.5 9.5 11.5 12 12 16 20 35 36 4 4 8 12 27 28 15.5 28.5 18.5 18.5 25.5 25.5 44.5 44.5 20.5 10.5 10.5 17.5 17.5 36.5 36.5 20.5 34.5 24.5 24.5 24.5 30.5