IDG

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

Series IDG

40 P1= 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

Table of Contents

A L D Model Applicable fittings size d KQ2P-23 KQ2P-04 KQ2P-06 16 16 18 3.2 4 6 31.5 32 35 5 6 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com When ordering assemblies incorporated with a manifold, add suffix -D to the manifold no.

VCA

Series VCA30/40 Series VCA30 Series VCA40 Material Description Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.

Modular Type Air Filter Series AF

Applicable model AFD20 to 40 Nylon bowl Symbol Nil B Body size Body size Port size Metal bowl with level gauge Symbol 20 30 40 20 30 40 Note 3) Thread type With bowl guard 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Note 5) Note 4) C AFD20 to 40 Nil N Note 1) Drain guide 1/4 Rc Flow direction: Right to left NPT Note 4) D AFD30, 40 Drain cock with barb fitting: 6 x 4 nylon tube Name plate and caution

5 Port Solenoid Valve SY Series

In common EB P EA SY7 40 Type 43 Stacking type Individual wiring SY9 40 + + + + P. 89 Manifold stations can be increased. Type 43P Stacking type Flat ribbon cable SY9 40 P. 103 Manifold stations can be increased. In common Type 45 Stacking type/DIN rail mounted Individual wiring SY3 40 SY5 40 + + + + + P. 115 Stations can be increased on the DIN rail.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

VCA

Series VCA30/40 y t r e q w Series VCA30 Series VCA40 Description No. Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Note 6) At rated voltage Series SYJ7000 Cylinder Maximum Operating Speed 1000 E 900 D 800 B C SY 700 Piping length 1m Max.operating speed (mm/s) SYJ 600 Piping length 5m SX A B 500 VK 400 VZ 300 VF 200 VFR 100 VP7 20 25 32 40 40 50 63 80 100 VP4 CM2 cylinder CA1 cylinder Cylinder bore size (mm) System Figure a VQ Solenoid valve VQ4 Fitting Air cylinder VQZ VQD Silencer VZS Speed controller

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36 D.8 AR4001 1/4 3/8 1/2 70 149.5 37.5 70 38 50 54 54 8.5 10.5 70 2.3 4 ~ Dimensionwameans from port center to eccentric direction of gauge center. Modular Type Filter I Regulator with Built-in Pressure Gaug.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

AS-FPQ/AS-FPG

Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)

Compact Hydraulic Cylinder

64.5 74.5 U 28 35 38.5 44.5 51 61 71 U 31 38 41.5 47.5 54 64 74 U 27 34 37.5 43.5 50 60 70 20 32 40 50 63 80 100 257 CHQB/CHQWB Series Minimum Auto Switch Mounting Stroke (mm) D-A9 D-A9V D-A7 D-A80 D-A7H D-A80H D-A73C D-A80C D-M9WV D-M9AV D-F7W D-F7WV D-J79W D-F7BAV D-M9W D-M9A D-F7BAL D-F7NT D-F79F D-M9 D-M9V D-F7V D-J79C Auto switch mounting number D-F7 D-J79 D-A79W 1 pc. 5 5 10(5) 10

VP300/500/700

) (D, Y) VS N.C.

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Vacuum System Peripherals:

Area: (800) 258-9200-www.stevenengineering.com 04 Both sides D side 05 5 Can accommodate up to 8 solenoids.

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260