3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Basic type / Direct mount type Series CY3B/CY3R

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1236

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T



(Full span) 0.05 to 0.7 MPa Rc AF Mounting Linearity (3) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Signal pressure (3) IR 1 8 Signal port PA (3) 02 03 02 04 04 06 10 10 12 14 20 01 Port P A R M5 01 M5 01 01 02 VEX Port size Rc (4) (4) 1 2 1 1 1 4 1 1 8 1

Compact Manifold Regulator Series ARM5

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

A Rectified value Rectified value P-1 P-1 (Differential) Pressure (P-3) H-1 H-1 (H-2) P-2 Min. B Nonadsorption ON Switch output 1(2) OFF Work 1 Work 2 Work n Atmosphere ZSE ISE Switch output response time when autoshift is input.

VK3000

port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Thread type Type S42 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 V100 S Nil Rc Q CE-compliant Nil CE-compliant Port size R port: Rc 1/8 P port: Rc 1/8 F N T G S070 1 8 NPT 01 Rc C6 6 cassette B port: Rc 1/8 A port: Rc 1/8 NPTF Note) Applicable only for DIN terminal type VQD VQD-V Common SUP/Common EXH Type 21: Body

KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Applicable tubing O.D. mm Weight g 2-Applicable tubing M P D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 45.4 49.4 49.6 52.4 56.7 61.3 64.5 67.5 69.7 72.7 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5

0.4

Semistandard Exploded View of Manifold P. 1 P. 3 P. 5 P. 7 P. 11 P. 15 Features Variations Cylinder Speed Chart VQ1000 How to Order, Manifold Options VQ2000 How to Order, Manifold Options VQ1000/2000 Model, Standard/Manifold Specifications VQ1000/2000 F kit (D-sub connector) P. 17 VQ1000/2000 P kit (Flat ribbon cable) P. 21 VQ1000/2000 J kit (Flat ribbon cable) P. 25 VQ1000/2000 G kit (Flat

Nozzle Type Ionizer

p. 11 Accessories p. 12 Repair Parts p. 12 Options p. 13 Functions p. 14 Wiring p. 15 Power Supply Cable Connection Circuit p. 16 High flow rate nozzle Timing Chart p. 16 Dimensions p. 17 Related Product Intermittent Control Timer p. 20 Made to Order With Right Angles -X367 p. 21 Nozzle Variations p. 23 Female threads for piping Specific Product Precautions p. 24 Safety Instructions

CLA

p>. .-~ --_1 124 (5000) ,/ /. / --/./-.P: 2 ;;; 900 (4000) !

VS 8-2/VS 8-4

5 (R1) 3 (R2) Circuit diagram 14 Size 26 mm 112 Individual SUP spacer 49 12.5 (F) (T) (F) (T) VV802-P-01 (Size 18 mm) 18 9 1/8" VV801-P-03 (Size 26 mm) By mounting individual SUP spacers on a manifold block, it is possible to provide individual SUP ports for each valve. 22.5 11 Size 18 mm 1(P) 4(A) 129.5 61 2(B) 1(P') 19 26 13 3/8" 3(R2) 5(R1) Circuit diagram 28.6 14.3 Size 26 mm 112 Individual

A

A G E A P P L I C A T I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

Magnetically Coupled Rodless Cylinder

wire (NPN) 3-wire (PNP) P P A96V A96 s s s s 5V p P P F9NV F9N IC circuit 5V 12V p P P F9PV F9P s p P P 12V F9BV F9B 2-wire s Relay PLC Grommet Yes 24V s 3-wire (NPN) 3-wire (PNP) p P P F9NWV F9NW Diagnostic indication IC circuit 5V 12V p P P F9PWV F9PW 2-color display p P P F9BWV F9BW 2-wire 12V s Lead wire length symbols 0.5m/ Nil (Example) F9NW 3m/ L F9NWL 5m/ Z F9NWZ Solid state switches

5 Port Solenoid Valve SY Series

Combination of different fittings is possible. + + + + P EB EA Type 20P SY3 20 SY5 20 SY7 20 Bar stock type Flat ribbon cable P. 47 Body ported Base mounted A 26 pins MIL connector permits One-touch wiring of external cables in a bundle. P EB EA In common Type 23 Stacking type Individual wiring SY9 20 + + + + P. 43 EA P EB Manifold stations can be increased.

Table of Contents

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

0.4

F 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None Nil IN side port size OUT side port size DIN rail mounting (For manifold) D 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F

AC Servo Motor Driver (Pulse input type/Positioning type ）

SIGNALS AND WIRING (Note 2) I/O signals in control modes Related parameter P P/S S S/T T T/P Pin No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.