Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: Y (DI Control Kit)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: Y (DI Control Kit)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: Y (DI Control Kit)

Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: None, Option: DI Control Kit

Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: DI Control Kit

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: DI Control Kit

LFE-OMY0008

[F 1] OUT1 33 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 49 34 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 35 No.LFE*-OMY0008 [F 2] OUT2

XL

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

High Vacuum Angle Valve, XL Series

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

KF

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

H2 (Hex.) Weight (g) L1 L2 L3 M d Part No. O.D.

H/DL/L/LL

P. 64 15-2-61 Series H/DL/L/LL Male Connector: H H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Series H, DL, L, LL Self-align Fittings

H2 (Hex.)

KN Series Nozzles for Blowing

L1 Applicable fitting size d Pivoting nozzle with self-align fitting/KNK (mm) Model Nozzle size D L1 M Width across flats H1 H2 Applicable tubing O.D.

PFxx-OMO0004CN

) H1(H2) H1(H2) H1(H2) 0 OFF 0 ON 0 OFF 0 ON -31No.PF-OMO0004CN-E ( )OUT2 3 3 3 3 3 3 ON OFF ON OFF OU2 -32No.PF-OMO0004CN-E <>OUT1 [F 1] [F 1][oU1] [oU1][] [1ot][] 34 35 36 38 -33No.PF-OMO0004CN-E a.

LV50-OMQ0002

) Hysteresis H1(H2) n1L (n2L) n1H (n2H) Instantaneous flow Accumulated increment output mode Count up from "0".

LFE-OMZ0011

. -33No.LFE*-OMZ0011 # List of output mode Hysteresis H_1 (H_2) Hysteresis mode Instantaneous flow Window comparator mode Hysteresis H1(H2) Hysteresis H1(H2) Instantaneous flow Accumulated increment output mode Accumulated flow Count up from "0". Turns ON when the set value is reached Return to the set value by reset.

SI Unit for Vacuum Manifold

Hysteresis H2 10988 10P2-P1 10P2-P1 100 Setpoint P1 11989 H1+1P2-H2 H1+1P2-H2 600 Hysteresis H1 10988 10P1-1 10P1-1 50 Setpoint P3 312000 H3+12000 H3+11000 40 Hysteresis H3 101999 10P3-1 10P3-1 10 Caution The Pressure parameters should be set so that each value meets the above conditions. The condition of P3 differs depending on the Pressure range parameter. -20No.EX-OMY0014-A 4.1.6.