AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

CJ2

Z + 2 x Stroke Rod End Nut Material: Iron Applicable bore (mm) 10 16 H d C B Part no.

Air Cylinder

Stroke CM2 CM3 With air cushion 2 x P (Rc, NPT, G) Cushion valve, Width across flats WH GA WA GB WB W 10 CG1 CG1 CG3 JMB MB MB1 With rod boot 8 8 h + l 8 h + l CA2 CS1 IJ IJ e e CS2 JH f f l l JW ZZ + l + Stroke Z + l ZZ + l + Stroke Z + l 80, 100 (mm) Bore size Stroke range Rc, NPT port G port A AL B B1 C D H H1 I J K KA LC LD LH LS LT LX LZ M MM Standard Long stroke GA GB P GA GB P 20 Up

Table of Contents

MDHR3-15 MDHR3-10 H L H When auto switch D-M9V is used When auto switch D-M9 is used When auto switch D-M9V is used Max. Protrusion of Auto Switch from Edge of Body: L, H Max. Protrusion of Auto Switch from Edge of Body: H (mm) (mm) D-M9V D-M9V D-M9N Auto switch model Auto switch model L H 1.3 The auto switch will not protrude in the case of D-F9.

Air Slide Table

2 G (NN 1) x H H +0.025 0 3H9 ( ) depth 2 5.8 8.3 A 6.5 3.2 7 NN x M4 x 0.7 tapped through hole A 4 GB HB Cross-sectional view A-A Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ8A-10Z 25 15 9 25 37 10 26.5 68.5 4 2 51 61 MXQ8A-20Z 25 22 16 28 40 14 32.5 78.5 4 2 61 71 MXQ8A-30Z 26 26 40 14.5 42 88.5 6 3 71 81 MXQ8A-40Z 32 14 27 31 55 20 52.5 104.5 6 3 87 97 MXQ8A-50Z 46 16 54 29

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) Z: Positive common specifications only.

Table of Contents

15 9 13 8.5 2-M5 x 0.8 (30) (Z) 6 2-M8 x 1.25 thread depth 12 thread depth 7.5 60 0.2 12 (mm) S SS ZZ Z Part no.

Air Cylinder Series CA2

90 15 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 7 M18 x 1.5 31 3/8 98 M10 x 1.25 18 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 11 M22 x 1.5 37 1/2 116 M12 x 1.75 25 Up to 750 20 to 750 40 37 116 41 92 30 52 14 21 11 M26 x 1.5 40 1/2 126 M12 x 1.75 25 (Both sides) Without rod boot With rod boot (Single side) TX Bore size (mm) TY TZ TT l H Z ZZ d e f h Z ZZ Z ZZ 40 50 63 80 100 22

Mechanically Jointed Rodless Cylinders

Combination description Holder mounting bracket X416 X417 1 2 1 1 1 1 1 X416 on one side Note 2) L, H, LS, SL, HS, SH Nil W Z L H LZ HZ Nil W L H X416 on both sides L, H X416 on left side, X417 on the other side Note 2) 1 X416 X416 on L unit side X416 on H unit side LH, HL 1 1 1 2 1 1 X416 on L unit side, X417 on the other side X416 on H unit side, X417 on the other side X417 on one side

Modular Design with Uniform Body Style

S J J H Center of piping Center of piping T N M D U H J Bracket (Option) Optional specifications Model Standard specifications Round type pressure gauge Round type pressure gauge Round type pressure gauge (Semi-standard: Z) (with color zone) P1 P2 A B*1 C D F J K H J H J H J AR20K-D 1/8, 1/4 1/8 40 66.8 26.5 26 M28 x 1 26 2 37.5 62.5 37.5 63.5 37.5 63.5 AR30K-D 1/4, 3/8 1/8 53 86.5 30.5

High Vacuum Angle Valve

V I G L H A V V M A C U U Flange side r Temperature specifications/Heater t Auto switch type Symbol Nil Auto switch model Without auto switch (without built-in magnet) Remarks Symbol Nil Temperature 5 to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4

Table of Contents

M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Applicable tube O.D.

ISO Cylinder

C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol: A29 Symbol: A28 DA 30 30 MM 30 MM L

Table of Contents

J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H -1 -2 -6 -8 -C -J -N -R -W -Z With bracket (With set nut) Float type auto-drain (N.C.)

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

-Q G H G H Scale: 40% SY3220-M5-Q C4 C6 C4 C6 M type plug connector (M): SY3220-M-Q L type plug connector (L): SY3220-L-Q C4 C6 1.2-16 Body Ported Type SY3000/5000/7000/9000 Note)< >: Values with surge voltage suppressor 3 4 5 3 position closed centre/exhaust centre/pressure centre Grommet (G), (H): SY3 20-Q G H SY3 20-M5-Q G H 3 4 5 Scale: 40% C4 C6 SV SY SY SYJ SX VK VZ VF VFR VP7 VQC SQ

NCG/CG1

EN WT H Z + Stroke ZZ + Stroke NCG Single Acting Front Nose Mount Dimensions Inch 0" to 2.00" st 2.01" to 4.00" st 4.01" to 5.00" st 5.01" to 8.00" st Bore Size (mm) Stroke Range WT Y BN EN NN V H Z ZZ Z ZZ Z ZZ Z ZZ 3.60 5.11 4.60 6.11 5.60 7.11 3.60 5.11 4.60 6.11 5.60 7.11 6.60 8.11 4.15 5.94 5.15 6.94 6.15 7.94 7.15 8.94 4.62 6.70 5.62 7.70 6.62 8.70 7.62 9.70 20 Up to 8 0.749 +0.0002

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) Z: Positive common specifications only.

Air Cylinder Series MB

30 20 206 15 40 17 194 14 U to 600 209 221 30 20 206 15 40 17 194 14 CX to 800 269 287 42 30 264 23 60 26 246 22 L RR Z + Stroke CZ to 800 269 287 42 30 264 23 60 26 246 22 ZZ + Stroke Center trunnion(T)/Locking at head end (-H) -R/ -W -H Z + 1/2 + Stroke (mm) Port Cushion valve DStroke range Bore size (mm) TDe8 TT TX TY TZ Z Z -X 32 40 50 63 80 100 to 500 12 17 50 49 74 89 97 TDe8 TY to

Modular F.R.L. Unit

H M M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.

Electric Actuator/Slider Type

W F1 Rod operating range Note 1) (Stroke + G mm) T Z V EV H thread depth C U M M J D 4 x O1 thread depth R Y L B + Stroke K Note 2) M M S 4 x O1 thread depth R A + Stroke EH Note 1) Range within which the rod can move.