Compact Rotary Actuator Series CRQ2

double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MSZ K J XA39 XA40 XA41 XA45 K K K XA46 CRQ2X MSQX Y Y Y Y Y 20, 30, 40 Y MRQ K, T J K K, T K 10, 15, 20, 30, 40 K K K K, T K X Z X, Z J Z J J, Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 J T Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft

Air Cylinder Series MB

thread 10.2 10.2 MB 10.2 A K f N N f K A l + Stroke 10.2 l h + Stroke ZZ + 2 Stroke S + Stroke h MB1 CA2 Without Air Cushion CS1 Stroke range Width across flats Bore (mm) Eff. thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W S ZZ CS2 32 40 50 63 80 100 to 1000 125 6 8 11 11 13 16 16 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72

Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: K (mm) L3 max X W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size W1= J K T J K T J K T J K T Size L3= L1= 10 10 6.5 to 14 4.5 to 14 0.5 to 2 0.5 to 2 Y-1 L2-1 X-3 L1-1 L4= Y= 15 15 8 to 18 5.5 to 18 0.5 to 2.5 0.5 to 2.5 Y-1.5 L2-1 X-4 L1-1 L2= 20 20 9 to 20 6 to 20 0.5 to 3 0.5 to 3 Y-1.5 L2-1 X-4.5 L1-1 X= 30 30 11.5 to 22 8.5 to 22 0.5 to 4 W2= 0.5 to 4 Y-2 L2-2

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Series CRBU2 Size: 10, 15, 20, 30, 40 How to Order Size 10 15 20 30 40 CRBU2 10 180 S E W Without auto switch Connection port location Nil E Side ported Axial ported Size 10 15 With auto switch Size: 10, 15 T99 L 180 S CDRBU2 10 W CDRBU2 20 W 180 S T79 L With auto switch Size: 20, 30, 40 Size 20 30 40 Made to Order Refer to the table below for details.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

Table of Contents

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

CA2

K A A h + l 20TX TZ H H + Stroke ZZ + l + 2 strokes S + Stroke ZZ + 2 strokes Data Stroke range (mm) A Bore size (mm) B B1 C P AL D E F G J K MM N S Without rod boot With rod boot 40 50 63 80 100 60 84 up to 500 20 to 500 30 27 22 44 16 32 10 15 M8 x 1.25 6 M14 x 1.5 27 1/4 up to 600 20 to 600 35 32 70 27 52 20 40 10 17 M8 x 1.25 7 M18 x 1.5 30 3/8 90 up to 600 20 to 600 35 32 85 27 64 20

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

Modular F.R.L. Unit

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

st 53.5 32 40 50 20.5 20.5 26 M14 x 1.5 M14 x 1.5 M18 x 1.5 33.5 33.5 23.5 23.5 28.5 Basic Style O L 20 st A 20 st B Bore size (mm) C D E F H I J K M N P Q W Z 5 st 50 56.5 58.5 10 st 78.5 5 st 33 39.5 40.5 10 st 50.5 5 st 17 17 18 10 st 20 st 32 40 50 9 depth 7 9 depth 7 13 13 15 40 46.5 28 34.5 16 16 20 45 52 64 8.5 8.5 11 M8 x 1.25 M8 x 1.25 M10 x 1.5 60 69 86 10.5 10 13 14 14

Air Cylinder

port WA WB W WH GA GB P 20 12 10 (12) M5 x 0.8 16 15 (16) 25 1.5 25 12.5 10 (12.5) M5 x 0.8 16 14.5 (16) 25 1.5 32 12 10 (12) 1/8 16 14 (16) 25 1.5 40 13 10 (13) 1/8 17 15 (17) 20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 (Reference) JW Bore size e f h IJ JH Bore size NA S W X Y Z ZZ (Reference

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

NCA1

14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion 18 8 14 MT4 w/Center Trunnion 18 8 14 MX1/MX2/MX3 w/Extended Tie-Rods 19 1.5 6 NCA1-W Double Rod 19 8 14 NCA1-W Double Rod 19 Engineering Specifications Push Stroke 20 Pull Stroke 20 Oversize Piston Rods 20 Stroke Factors 21 Stop

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

Air Cylinder NCA1 Series

14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion 18 8 14 MT4 w/Center Trunnion 18 8 14 MX1/MX2/MX3 w/Extended Tie-Rods 19 1.5 6 NCA1-W Double Rod 19 8 14 NCA1-W Double Rod 19 Engineering Specifications Push Stroke 20 Pull Stroke 20 Oversize Piston Rods 20 Stroke Factors 21 Stop Tube

High Vacuum Angle Valve

0 q w y e i u r t o Air operated/with solenoid valve XLDV q Flange size e Solenoid valve direction w Flange type Rear flange surface Applicable flange 25, 40, 50, 63, 80 100, 160 63, 80, 100, 160 Type Symbol Size 25 40 50 63 80 100 160 Symbol K L M Solenoid valve direction Right flange surface Left flange surface Left flange surface Rear flange surface Right flange surface Nil KF (NW) D K

EX120/121/122

19.2 k/ 45.45 k/93.75 k/ 187.5 k/500 k/ 1.5 M/3 M/6 M/ 12 Mbps 10 k/20 k/50 k/ 125 k/250 k/ 500 k/800 k/ 1 Mbps 156 k/625 k/ 2.5 M/5 M/ 10 Mbps Communication speed 5 Mbps 10 M/100 Mbps 125 k/250 k/500 kbps 167 kbps Specified file Note 3) EDS file EDS file GSD file EDS file EDS file EDS file 48/32 SAS7: 8/8 (2 slave units) SAS9: 4/4 64/64 SAS3: 8/8 (2 slave units) SAS5: 4/4 Occupied area

CQ2

W/o auto switch W/ auto switch Bore size (mm) 5st 10 20 5st 10 20 A B L L1 43 48 53 58 7 28.5 32 40 50 49.5 54.5 59.5 64.5 7 28.5 57.5 67.5 67.5 77.5 8 33.5 Double clevis (mm) 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 A B CL Without auto switch A B CL With auto switch Bore (mm) 65 70 28 33 55 60 75 80 38 43 65 70 32 40 50 73.5 78.5 39.5 39.5 63.5 68.5 83.5 88.5 44.5 49.5

Refrigerated Air Dryers Series IDF/IDU

L K Reset switch Filter check lamp 935 M 4 x 20 Dimensions (mm) Q A B C O D E F G K L M P R S T Model Port size IDF125F IDF125F-W IDF150F IDF150F-W JIS flange 65A 10K 700 1120 1276 267 655 1375 350 376 712 78 752 885 479 127 36 129 JIS flange 80A 10K 950 1290 1332 268 720 1432 990 217 1030 475 515 1056 479 127 50 165 6 Series IDF100F/125F/150F Options Refer to How to Order page 2 for

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

OUT) port B A B 2 x Port size 1(IN), 2(OUT) port WN: M12 connector D F K C J E IN A B 2 x Port size 1(IN), 2(OUT) port [mm] Size Port size A B C D E F Glossary of Terms 20 1/4 28.1 40 69 36 12.5 18 3/8 48 G3/8 72 14 30 1/4 28.1 40 78 42 12.5 21 3/8 48 G3/8 81 14 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K 20 1/4 47.9 55.3 67 47.9 31.3 46.7 41.1