Modular Type Filter Regulator Series AW

(K) to 40(K) AW30(K), 40(K) AW20(K) AW30(K), 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) Symbol 1 Note 4) 2 6 8 C J Note 5) N R W Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40), and the exhaust port for auto drain comes with 3/8" One-touch fitting (applicable to AW30 to 40).

Table of Contents

A 30 20 ZSE ISE 20 PSE 45 Z I SE3 55 4.5 11.5 40 15 PS 4.5 Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6.5 1.6 ZSP 20 41.5 ZS-24-A Bracket A View A ISA2 IS Bracket D ZSM A PF2 30 20 IF Data 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket

Table of Contents

VF A PA B PA VFR B A A VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B PA L1 L2 VZS B A A A VFS B SMC VS4 4n-3/8, 1/2 A B VQ7 EVS A PA R side L side 40(53) VFN D side (2n-1/8) 2 82.5 62 59 17 154 (Single) 175.5 (Double) 180.5 175.5 (3 position) 94 139 14 12

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

OUT) port B A B 2 x Port size 1(IN), 2(OUT) port WN: M12 connector D F K C J E IN A B 2 x Port size 1(IN), 2(OUT) port [mm] Size Port size A B C D E F Glossary of Terms 20 1/4 28.1 40 69 36 12.5 18 3/8 48 G3/8 72 14 30 1/4 28.1 40 78 42 12.5 21 3/8 48 G3/8 81 14 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K 20 1/4 47.9 55.3 67 47.9 31.3 46.7 41.1

Modular/F.R.L. Units Series AC

26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21 AC31 AC41 * Without relief valve option ** With relief valve option mm AC-A A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21A AC31A AC41A * Without relief valve

MHZ

(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

MHZ

(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr=40 mm MXQ6-30 0.03 0.015 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 0.04 MXQ6-20 0.02 0.010 MXQ6-20 MXQ6-40 0.03 MXQ6-40 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 10 20 30 40 80 120 0 10 20 30 Load (N) Load (N) Load

MXS

0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

CL

(mm) 40 50/63 80 100 E1 L1 MM U1 NDH10 NX A1 MM E1 L1 U1 NZ L NX Part No. A R1 Part No.

Combination Cylinder

(mm) 40 50/63 80 100 Part No. A A1 E1 L1 MM R1 U1 ND H10 NX Part No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 40 ZZ Z G H (NN 1) x H 10.5 24 10.5 24 A B 10.5 10.5 5.1 9.5 26 1 6 NN x M6 x 1 thread depth 12 B A 5H9 depth 4 +0.030 0 Section AA Section BB 5H9 depth 4 +0.030 0 GA HA (mm) Model F 35 35 35 40 30 55 65 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 GA 16 16 16 16 51 61 109 159 HA 40 40 40 50 30 70 70

Vacuum Unit

2 p. 31 ZK2 VA A A A K 5 L ZK2 FC A Port for the pressure switch or sensor q w e r t Symbol Port for the pressure switch or sensor Filter case color P With port (type with pressure switch or sensor) Smoke T Without port (type without pressure switch or sensor) Clear q Applicable system w Valve type e Rated voltage A Ejector system K Supply valve: N.C., Release valve: N.C. 5 24 VDC 6 12 VDC

Magnetically Coupled Rodless Cylinder

HB HT HC N X A W K 2-plug H 2-P (Piping port) HA CB T 4-counter bore dia.

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

KJ

K Employs a unique connection method A slim body design and large effective area are achieved with a construction that does not use steel balls and therefore does not restrict the flow path. M Check valve end configuration facilitates rectifying effect Allows smooth flow of fluids.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W K HT HB HC N X A 2-Plug 4-Counterbore dia.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

M5 x 0.8 20 K B 40 31.5 145 115 45 60 M24 x 1.5 40 M6 x 1.0 30 C series rod A 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 50 40 185 145 57 79 M39 x 1.5 63 M8 x 1.25 40 Double knuckle joint Material: Cast iron Rod series Bore size (mm) 2-P keeper plate mounting threads Part no. l J P A B C D d H K L E + 0.07 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1