Table of Contents

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

CA2

K A A h + l 20TX TZ H H + Stroke ZZ + l + 2 strokes S + Stroke ZZ + 2 strokes Data Stroke range (mm) A Bore size (mm) B B1 C P AL D E F G J K MM N S Without rod boot With rod boot 40 50 63 80 100 60 84 up to 500 20 to 500 30 27 22 44 16 32 10 15 M8 x 1.25 6 M14 x 1.5 27 1/4 up to 600 20 to 600 35 32 70 27 52 20 40 10 17 M8 x 1.25 7 M18 x 1.5 30 3/8 90 up to 600 20 to 600 35 32 85 27 64 20

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

Modular F.R.L. Unit

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

st 53.5 32 40 50 20.5 20.5 26 M14 x 1.5 M14 x 1.5 M18 x 1.5 33.5 33.5 23.5 23.5 28.5 Basic Style O L 20 st A 20 st B Bore size (mm) C D E F H I J K M N P Q W Z 5 st 50 56.5 58.5 10 st 78.5 5 st 33 39.5 40.5 10 st 50.5 5 st 17 17 18 10 st 20 st 32 40 50 9 depth 7 9 depth 7 13 13 15 40 46.5 28 34.5 16 16 20 45 52 64 8.5 8.5 11 M8 x 1.25 M8 x 1.25 M10 x 1.5 60 69 86 10.5 10 13 14 14

Air Cylinder

port WA WB W WH GA GB P 20 12 10 (12) M5 x 0.8 16 15 (16) 25 1.5 25 12.5 10 (12.5) M5 x 0.8 16 14.5 (16) 25 1.5 32 12 10 (12) 1/8 16 14 (16) 25 1.5 40 13 10 (13) 1/8 17 15 (17) 20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 (Reference) JW Bore size e f h IJ JH Bore size NA S W X Y Z ZZ (Reference

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

NCA1

14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion 18 8 14 MT4 w/Center Trunnion 18 8 14 MX1/MX2/MX3 w/Extended Tie-Rods 19 1.5 6 NCA1-W Double Rod 19 8 14 NCA1-W Double Rod 19 Engineering Specifications Push Stroke 20 Pull Stroke 20 Oversize Piston Rods 20 Stroke Factors 21 Stop

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

Air Cylinder NCA1 Series

14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion 18 8 14 MT4 w/Center Trunnion 18 8 14 MX1/MX2/MX3 w/Extended Tie-Rods 19 1.5 6 NCA1-W Double Rod 19 8 14 NCA1-W Double Rod 19 Engineering Specifications Push Stroke 20 Pull Stroke 20 Oversize Piston Rods 20 Stroke Factors 21 Stop Tube

High Vacuum Angle Valve

0 q w y e i u r t o Air operated/with solenoid valve XLDV q Flange size e Solenoid valve direction w Flange type Rear flange surface Applicable flange 25, 40, 50, 63, 80 100, 160 63, 80, 100, 160 Type Symbol Size 25 40 50 63 80 100 160 Symbol K L M Solenoid valve direction Right flange surface Left flange surface Left flange surface Rear flange surface Right flange surface Nil KF (NW) D K

EX120/121/122

19.2 k/ 45.45 k/93.75 k/ 187.5 k/500 k/ 1.5 M/3 M/6 M/ 12 Mbps 10 k/20 k/50 k/ 125 k/250 k/ 500 k/800 k/ 1 Mbps 156 k/625 k/ 2.5 M/5 M/ 10 Mbps Communication speed 5 Mbps 10 M/100 Mbps 125 k/250 k/500 kbps 167 kbps Specified file Note 3) EDS file EDS file GSD file EDS file EDS file EDS file 48/32 SAS7: 8/8 (2 slave units) SAS9: 4/4 64/64 SAS3: 8/8 (2 slave units) SAS5: 4/4 Occupied area

CQ2

W/o auto switch W/ auto switch Bore size (mm) 5st 10 20 5st 10 20 A B L L1 43 48 53 58 7 28.5 32 40 50 49.5 54.5 59.5 64.5 7 28.5 57.5 67.5 67.5 77.5 8 33.5 Double clevis (mm) 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 A B CL Without auto switch A B CL With auto switch Bore (mm) 65 70 28 33 55 60 75 80 38 43 65 70 32 40 50 73.5 78.5 39.5 39.5 63.5 68.5 83.5 88.5 44.5 49.5

Refrigerated Air Dryers Series IDF/IDU

L K Reset switch Filter check lamp 935 M 4 x 20 Dimensions (mm) Q A B C O D E F G K L M P R S T Model Port size IDF125F IDF125F-W IDF150F IDF150F-W JIS flange 65A 10K 700 1120 1276 267 655 1375 350 376 712 78 752 885 479 127 36 129 JIS flange 80A 10K 950 1290 1332 268 720 1432 990 217 1030 475 515 1056 479 127 50 165 6 Series IDF100F/125F/150F Options Refer to How to Order page 2 for

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

OUT) port B A B 2 x Port size 1(IN), 2(OUT) port WN: M12 connector D F K C J E IN A B 2 x Port size 1(IN), 2(OUT) port [mm] Size Port size A B C D E F Glossary of Terms 20 1/4 28.1 40 69 36 12.5 18 3/8 48 G3/8 72 14 30 1/4 28.1 40 78 42 12.5 21 3/8 48 G3/8 81 14 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K 20 1/4 47.9 55.3 67 47.9 31.3 46.7 41.1

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

ZP

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Electric Slide Tables

operating range Note 1) [1] 1 K 5.5 Origin Note 2) [Stroke end] Stroke end [Origin] Note 3) (M) N 20 10 Stroke (2) 3H9 ( ) depth 3 (G 1) x F 11.5 F 27.5 (22.5) +0.025 0 J 4 +0.025 0 3H9 ( ) depth 3 With lock Connector Servo motor Step motor 20 24 65 340 to 380 Motor cable 20 24 Lock cable 20 20 15 15 [mm] C F G J K M N Model LESH8R-50LESH8R-7546 29 3 58 111 125.5 95.5 Lock cable (3.5) 50

CL

17 19 10 10 10 14 14 85 95 102 113 124 27 32 32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244 273 296 347 381 Z 252 281 304 356 390 ZZ 43 52 52 65 65 e 11.2 11.2 11.2 12.5 14.0 f 59