NVZseies

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

Series MLGP

The kinetic energy of the load is calculated by the formula below. + = 4 . 1 = a V V 2 V m M E k 2 Ek: Kinetic energy (J) M : Mass of object being transported (kg) m : Mass of moving parts of cylinder (kg) V: Maximum speed (m/s) Va: Average speed (m/s) Mass of moving parts of cylinder (kg) Bore size Standard stroke (mm) (mm) model 20 25 30 40 50 75 100 125 150 175 200 250 300 350 MLGPM20

Cylinder with lock

Grease pack number: GR-S-010 (10g), GR-S-020 (20g) 1) Rod seal Apply a thin layer of grease to all surfaces of the new seal to make it easy to install the rod seal and improve sealing.

Cylinder with lock

Grease pack number: GR-S-010 (10g), GR-S-020 (20g) 1) Rod seal Apply a thin layer of grease to all surfaces of the new seal to make it easy to install the rod seal and improve sealing.

Clamp Cylinder

Consumable parts 3-3-1 Replacement parts 40 50 63 Seal kit number CK1A40-PS CK1A50-PS CK1A63-PS Rod seal Piston seal Contents of the seal kit Tube gasket 1pc. of each Grease pack part number: GR-S-010(10g) GR-S-020 (20g) C a u t i o n ~ The seal is not delivered in sealed packaging for independent storage, so it must be used within 1 year. 20 3-3-2.

CG1-OM0227

GR-S-010(10g )GR-S-020(20g ) (XC85,X446)P25 1 2 3 4 8 1 100 83(g) L100mm 1 2 1mm 8. 8. g 20 25 32 40 100st 2 3 3 34 50st 0.5 0.5 0.5 1 20 3-2-4. 1) 8, 9 2 ( 8,) 10 3( 8,) 1mm 9. 10. 3-3. CG1/CG1*A 3-3-1. 20 25 32 40 CG1N20Z-PS CG1N25Z-PS CG1N32Z-PS CG1N40Z-PS GR-S-010(10g) (10g) 1 GR-S-010 (10g) GR-S-020 (20g) 1 21 3-3-2. 22 3-4. 1.

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

When using an intermediate fixing spacer for the MY3B series, the maximum operation speed is 800 mm/s (500 mm/s for the MY3B16). -10 -20 -30 -40 -50 -60 -70 -80 0 0 to 10 10 to 20 20 to 30 MY3*16/20 Without spacer Short spacer Long spacer 0 to 12 12 to 24 24 to 36 MY3*25/32 Without spacer Short spacer Long spacer 0 to 16 16 to 32 32 to 48 MY3*40/50 Without spacer Short spacer Long spacer

AIR FILTER

HOW TO ORDER AF 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket a Mounting Option 4 Nil Without auto drain C With float type auto drain (N.C.)

Ｖ cylinder

Grease pack part number: GR-S-010 (10g), GR-S-020 (20g) 1) Rod seal Apply a thin layer of grease to all surfaces of the new seal to make it easy to mount the rod seal and improve sealing.

Lock unit

Calculate the maximum speed of the load, V (mm) from travel time of the load, t (s) and stroke, st (mm).

IZx-OMX0087

/s 200 200 300 300 5m/s 2m/s 2m/s 400 400 2) Flow rate : 60L/min 5) Flow rate : 60L/min 75 50 25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm mm ionizer to workpiece [mm] ionizer to workpiece [mm] Installation distance from Installation distance from 200 200 10m/s 400 400 10m/s 5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 40 (3-phase 380 to 415 VAC, 50/60 Hz; 3-phase 460 to 480 VAC (60 Hz)), Option: J (w/Automatic Fluid Fill Function)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 40 (3-phase 380 to 415 VAC, 50/60 Hz; 3-phase 460 to 480 VAC (60 Hz)), Option: M (Applicable to Deionized Water Piping)

Cooling Method: Air-cooled Refrigeration, Pipe Thread: G, w/Rc-G Conversion Fitting, Power Supply: 3-phase 380 to 415 VAC, 50/60 Hz; 3-phase 460 to 480 VAC (60 Hz), Option: Applicable to Deionized Water Piping

AWM20 to AWM40

O S O S Min. clearance for maintenance Drain G A AWM30, AWM40 AWD30, AWD40 J N T M Panel fitting dimension D F Y W U Bracket (Option) S G B C R IN OUT Z Q V IN OUT AWM30/AWD30: Max. 3.5 AWM40/AWD40: Max. 5 K OUT P2 2-P1 (Port size) (Pressure gauge port size) Min. clearance for maintenance E Drain A Applicable model AWM20, AWM40/AWD20 to AWD40 Digital pressure switch Square embedded type pressure

AWM20 to AWM40

O S O S Min. clearance for maintenance Drain G A AWM30, AWM40 AWD30, AWD40 J N T M Panel fitting dimension D F Y W U Bracket (Option) S G B C R IN OUT Z Q V IN OUT AWM30/AWD30: Max. 3.5 AWM40/AWD40: Max. 5 K OUT P2 2-P1 (Port size) (Pressure gauge port size) Min. clearance for maintenance E Drain A Applicable model AWM20, AWM40/AWD20 to AWD40 Digital pressure switch Square embedded type pressure

STAINLESS STEEL CYLINDER

Port side side Minimum stroke 10 20 75 15 3.

ZL3-OM00801

No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s

Cylinder with lock

Grease pack number: GR-S-010 (10g), GR-S-020 (20g) 1) Rod seal Apply a thin layer of grease to all surfaces of the new seal to make it easy to install the rod seal and improve sealing.