0.4

a junction box.

Clamp Cylinder with Lock

Symbol 40 50 63 Hs A B Hs A B Hs 8 4.5 4.5 D-P4DWll 20.5 27.5 27.5 45.5 51 58.5 5.5 0 0 D-P79WSE D-P74l 27.5 26 26 46 51 58 Note 1) The mounting position should be referred for reference only for the auto switch mounting position at the stroke end detection.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Hygienic Design Cylinder Series HY

flats B1 H1 K X C1 L1 A1 + Stroke CJ5 CG5 Rod End Male Thread (mm) Bore size A1 94 101.5 122.5 123 B1 17 19 24 24 C1 20 22 29.5 29.5 MM M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 H1 6 7 10 10 K 6 6.5 8 8 KA 10 13 16 16 L1 33 36 46 46 X 22 24 32 32 HY 32 40 50 63 C M (mm) Bore size A 72 77.5 90.5 91 B 61 65.5 76.5 77 C 12 13 15 18 D 12 16 20 20 E 49.5 57.5 69 84 F 8.5 8.5 10.5 10.5 H M6 x

Plate Cylinder

K A K N N H + Stroke S + Stroke H ZZ + 2 x Stroke BY BY Rod end nut 2 x BT BX BS + Stroke BX Rod end female thread D1 C1 H1 B1 MM MM (mm) d H1 B1 C1 D1 Part no.

IDX-OM-W035

, IDFB Series 6-5 6-4 IDX-OM-W035 7 K 7 K 7-1 ( ) 7-2 240psi (1.6MPa) AD48N-8Z-A-X2112 (N) AD48-8-A-X2112 () KQ2H11-35AS (N) KQ2H10-02AS () 3/8 (N) 10 () IDFB22E/37E--K N.

LVQ

/8 (NPT 1/8) Pilot port LQ1 integral fitting 1/8 (3), (4) Pilot port Rc 1/8 (NPT 1/8) A B A B SMC SMC LVQ -S Dimensions (N.O. valve, double acting valve) 2 1 (mm) A B C D E F G H J K L M N P Q R W Model LVQ2 -S LVQ3 -S LVQ4 -S LVQ5 -S LVQ6 -S 2 1 25.5 46 31.5 58 33.6 81 12 77 21.8 37 5 7 15 31.3 21 25.3 64 2 1 23.5 47 29.5 59 45.4 99 16.5 95 32 50 6 7 20 37.2 25 31.2 82 2 1 23.5 47 29.5 59

KR

K KGW P. 14 M Universal male elbow P. 12 KGV H Universal male elbow allows thread connection by using a socket wrench for confined spaces. D Bulkhead connector KGE P. 18 Use to connect male thead and tube through a panel.

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

LEC-OM07605CN

(2) ()40 10(555) (10.1) P A = (10.1) K T 2] A: [m P: [W] T: [] K: [56] (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10. 10.3 101 1000 EM1(1) EM1(1) LECSS2-T 400W [Pr. PF06][Pr.

Table of Contents

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Cylinder with Lock

: A12 Symbol: A13 Symbol: A14 Symbol: A15 R sphere C0.5 DA DA AL MM DA C C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 46 CP96N/C96N Series Symbol Change of Rod End Shape 1 -XA0 to XA30 Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol

%silltr

A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

SMC Basic Pneumatics

A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

LEC-OM02704CN

P A 11 PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

Vacuum

Pad Type , ]>:]TYpr I '101 t6, 25 40 50 a a o o a a o a a a o a ) a o a o a o a a O a a a 86llaws o a a o a a a a o a Uentical True Uacuum InFy tllit[ Bufle Specif ications Butfer type 360" Rotating type (J), Non-rotation type (K) Pad size o2-s8: Std. 6mm Pad size s10-s50: Std. 10mm 20,25,32,40,50 NBB (50"), Silicone rubber (40"), Urethane rubber .