SMC Basic Pneumatics

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

MGC

70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 50 75 150 115 82.5 45 194 42 M10 200 95 12 11 135 115 210 190 19 23 142 Bore size (mm) W WH W V U T S Z R Y Q X O P 20 25 32 40 50 30 23 36 40 86 12 26 140 12 80 21 30 M6 x 1 M5 x 0.8 30 25 44 47 98 13 31 153 12 80 21 37 M6 x 1 M5 x 0.8 25 28.5 50 53 112 16 38 161 12 82 21 37 M6 x 1 Rc 1/8 20 33 60 63 132 20 47 188 12 92 25 44 M8 x 1.25

NVZseies

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

Vacuum Regulator

P601010-11 q w Included Parts No. 1 2 Plug nut O-ring Description w q Gauge Nut Assembly Used to connect the pressure gauge and pressure switch. e P601010-18 q w Included Parts No.

3 Way,3 Port Solenoid Valve NVZ Series

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

HRX-OM-X027

temperature [] 50Hz 60Hz Fig 9.4-1 Cooling capacity(HRS050-A-20-R) 9.5 Heating capacity 2000 2000 Ambient 45oC 1500 1500 Ambient 40oC Ambient 45oC Heating Capacity [W] Heating Capacity [W] Ambient 40oC 1000 1000 Ambient 32oC Ambient 25oC Ambient 32oC Ambient 25oC 500 500 Ambient 5oC Ambient 5oC 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature

HRX-OM-W058

Applicable model HRS0 -A -20-T-R Rated flow (50/60 Hz) Note 1),2) L/min 10 (0.35 MPa) /14 (0.35 MPa) Maximum flow rate (50/60 Hz) L/min 17 / 20 Pump Maximum pump head (50/60 Hz) m 70 Output W 610 Recommended earth leakage breaker capacity A 15 Cooling capacity Note 3) W The cooling capacity reduces approximately 300 W from the value in the catalog Note 1) The capacity at Thermo-chiller outlet

MGC

WH W V U T S R Q O P MGC 20 25 32 40 50 140 80 30 30 23 36 40 86 12 26 12 21 M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98 13 31 12 21 M6 X 1 M5 X 0.8 161 82 37 25 28.5 50 53 112 16 38 12 21 M6 X 1 Rc(PT)1/8 CY1 188 92 44 20 33 60 63 132 20 47 12 25 M8 X 1.25 Rc(PT)1/8 241 104 55 20 40.5 70 73 162 25 58 14 26 M8 X 1.25 Rc(PT)1/4 MY1 Without rear plate Bracket mounting stroke Long stroke Bracket

MLGC

70 4 104 Rc 1/8 Rc 1/8 62 7 7 40 125 60 32 M8 x 1.25 13 38 M12 x 1.75 depth 21 115 11 82.5 4 115 67 8 8 45 150 75 38 M8 x 1.25 14 47 WH W X Y T U V W Z Bore size (mm) 20 25 32 40 30 23 30 112 146 182 16 53 50 30 25 37 132 167 199 20 63 60 25 28.5 37 132 167 202 60 20 63 20 33 44 162 210 227 25 73 70 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

MLGC

70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore size (mm) 20 25 32 40 30 23 30 50 112 146 182 16 53 30 25 37 60 132 167 199 20 63 25 28.5 37 60 132 167 202 20 63 20 33 44 70 25 162 73 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

AF800/900

Large Flow Air Filter Series AF800/900 Standard Specifications AF900 AF800 Model AC 1 4 1 2 Port size AV 1 2 1 1.5MPa Proof pressure AU 1.0MPa Max. operating pressure Ambient and fluid temperature AF 5 to 60C (No freezing) Filtration Standard: 5 m Optional: 2, 10, 20, 40, 70, 100 m AR Polycarbonate (standard) Bowl material IR Bowl capacity (cm3) 180cm3 Weight (kg) 5.45kg 3.15kg VEX Bowl guard

AF800/900

AF800 AF900 Model AV 1 4 1 2 Port size 1 2 1 AU 1.5 MPa Proof pressure 1.0 MPa Maximum operating pressure AF Ambient and fluid temperature 5 to 60C (No freezing) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Standard specifications: 5 m Option: 2, 10, 20, 40,

AR425 to 935

Bleed port AU AF Handle locking screw AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Caution No.

3

Hysteresis Note 4) Variable from 0 Protection Short circuit protection Switch output Output type Voltage output: 1 to 5 V, Current output: 4 to 20 mA Voltage output Output impedance: Approx. 1 kW Maximum load impedance at power supply voltage 24 V: 600 W, at power supply voltage 12 V: 300 W Minimum load impedance: 50 W Response time Note 6) Linked with the response time of the switch output

HRX-OM-W032

20 15 15 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40

Air cylinder

(Same side) 20+55(n2)/2 n=2, 4, 6, 8 D-F5NT 10 1 switch 20 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7H D-Y7W 1 switch, 2 switches (Different side, Same side) 15 10 10+40(n2)/2 n=2, 4, 6, 8 Other qty. 15+40(n2)/2 n=2, 4, 6, 8 1 switch, 2 switches (Different side, Same side) D-Y69 10 D-Y7PV D-Y7WV 10+30(n2)/2 n=2, 4, 6, 8 Other qty. 1 switch, 2 switches (Different side, Same side) 20 D-Y7BA 20+45(n2)/2 n=

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Length per roll (m) Tubing material Symbol T Material Symbol TI Material Nylon Soft nylon Polyurethane Nylon Soft nylon Polyurethane Metric size Metric size Symbol 20 20 m (Standard) Length Inch size TS TU TIS TIU Color Nylon Symbol B Symbol B Color Black White Red Blue Yellow Green Clear Color Black Blue White Soft nylon Tubing size Inch size W BU W Size Size Metric size Symbol Symbol R

MLGC

16 53 30* 112 30 146 182 MGC 25 60 20 63 132 167 199 30* 37 60 20 132 63 167 202 37 28.5 25* MGF 70 25 73 162 44 210 227 33 20* CY1 Without rear plate Long stroke Bore size (mm) Bore size (mm) Stroke range (mm) Z R Y MY1 20 25 32 40 20 25 32 40 250 to 400 190 14 129 350 to 500 207 14 146 350 to 600 210 14 146 350 to 800 236 15 191 Note) Dimensions marked with "*" are not required for back