Air Cylinder

63 20 to 63 20 to 100 20 to 100 20 to 100 Symbol JCM V V V V V V V Standard Note 10) v v v V V V V Long st CM2 V V V V V V V D CM3 v v v v v v v CG1lF v v v V V v v CG1l-lJ K v CG1lH CG1 CG1 V v v v 10-, 11CG3 v v v v v v v 25ANote 9) JMB V V v v v 20Note 9) v v v v CG1lR V v v CG1lM MB MB1 v v XB6 Note 2) Note 2) Note 15) v XB7 CA2 v v v XB9 Note 15) v XB13 Note 15) CS1 v

Digital Flow Switch (Integrated display type)

1 V 1.04 V 1.05 V 5 V Current output (4 to 20 mA) 4 mA 4.16 mA 4.19 mA 20 mA F E G PF2M701/702/705/710/750/711/721 PF2M725 Voltage output (0 to 10 V) 1 0 V 0.10 V 0.12 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

NCQ8

Contact protection circuit None D-A93 2.4 V or less (to 20 mA)/ 3 V or less (to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Indicator light Red LED lights up when ON Lead wires Oilproof vinyl heavyduty cord, 0.11" (2.7mm), 20" (0.5m) D-A90(V), D-A93(V) 2.8 x 10-4 in2 (0.18mm2) x 2 cores (Brown, Blue) D-A96(V) 2.3 x 10-4 in2 (0.15mm2) x 3 cores (Brown, Black, Blue) Note

Digital Flow Switch ( compatible)

1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 2 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range Maximum value of rated flow range PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min 1: Analogue output accuracy is within 3%F.S. 2: Set the current to the analogue output from the connected equipment to 20 A or less

EX510

Internal Circuit (Brown) +5 V +24 V TD+ TD0 V q w e r VP R x D/T x D-N DGND R x D/T x D-P SHIELD q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT GND FG DC-DC converter (insulated) GND +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D Power supply for the input and for the control unit of the Gateway +24 V 0 V q w +24 V RD+ RD0 V q w e r INPUT

ZX

(Normally open) An adapter should be attached to the assembly to be used as a unit. PV port and V port can be connected.

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

SYJ300/500/700

plate assembly SYJ700-10-2A P, R port thread -+ -+ -+ -+ -+ -+ -+ -+ Manifold type Stations Nil Rc G NPT NPTF R P 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T R P P Port 1/4 R port 1/4 P Port 1/8 R port 1/8 Note) For more than 6 stations for type 20 and more than 9 stations for type 21, supply air to both sides of P port and exhaust air from both sides of R port.

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

NCQ8

Load current range and max. load current 20 mA 5 to 40 mA 5 to 20 mA Contact protection circuit None D-A93 2.4 V or less (to 20 mA)/ 3 V or less (to 40 mA) D-A93V 2.7 V or less Red LED lights up when ON Conforming to CE Standards 0.8 V or less Internal voltage drop Indicator light Standard Auto Switch Internal Circuit Lead wires Oilproof vinyl heavy -duty cord, 0.11" (2.7mm), 20" (0.5

7

oil Full-wave rectifier R VXK T B VXD VXD N A SMC IN OUT VXZ VXS 8 x 18 VXB F S D Q VXE VXP U V E G1/2 Cable 6 to 12 DIN terminal C VXR (44) 31.5 VXH VXF R VX3 T VXA A SMC IN OUT N B 8 x 18 S Q D F (mm) Model Grommet DIN terminal Electrical entry Applicable flange A B C E F N Q R S D U T 90 (98) V U T 168 (176) 67.5 82 (90) 90.5 (98.5) 96 (104) 7 E VXD2 32A 29.5 67 35 160 55 22 51.5 135

Fieldbus System

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

JIS Standard Hydraulic Cylinder

How to Mount and Move the Auto Switch Auto switch mounting screw M2.5 x 0.45 x 4 L Watchmakers (precision) screwdriver Solid state D-M9N(V), D-M9P(V), D-M9B(V) D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Hexagon socket head set screw M4 r 1.

Vacuum Unit

K V V J V1 R V2 V V V B V None (SI unit only) C V V D V None (SI unit only) E Pressure switch for vacuum 0 to 101 1 Install the release valve or vacuum breaker in the middle of the vacuum piping. 2 Supply valve maintains vacuum by energization (20 ms or more). Stopping the vacuum turns on the release valve. Refer to the precaution on page 44.

Environment

EV J LEL M PA LEM M U D LEY K Note 2) 4 x O1 thread depth R L S M Y 4 x O1 thread depth R M EH PC A + Stroke B + Stroke LES LEPY LEPS XA H9 depth XA 6 x MO thread depth MR LER Section XX details MH LEH LEY -X5 LEY -X5 MA ML + Stroke MC MD Section XX XB 11LEFS XA XA H9 (MB) 11LEJS 25A[mm] LEC Size Stroke range [mm] A B C D EH EV H J K L M O1 R PA PB V LEC S 25 15 to 100 130.5 116 13 20 44

MY1

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 16 20 20 16 20 Mounting position Mounting position 16 A 70 90 93 73 94 A A 74 B 90 110 107 87 106 B B 86 Operating range Note) 11 7.5 6.5 8.5 6.5 Operating range

24

to 100 20 to 100 50, 80 Symbol V V V V Standard v 12-, 13v v v v v v v 25AV V *3 V *3 v v v v 20v v v R/V v v v MGPlM v MGPMlG v v v v v v v MGPlF -XAl MGJ v v v -XB6 JMGP v v v v v v v -XB10 v v v v v v v -XB13 MGP MGP v v v v -XB22 MGPW v v v v v v v -XC4 MGQ v v v v v -XC6 MGG v -XC8 MGC v -XC9 -XC19 MGF v v v -XC22 MGZ v v v v v v v -XC35 MGT v -XC69 v -XC79 v v v

Modular F.R.L. Units

Note 3) Bowl O-ring and other O-rings are slightly lubricated. 20 Series AC20D-A to AC40D-A Dimensions AC20D-A AC30D-A to AC40D-06-A 2 x P1 (Port size) 2 x P1 (Port size) A F J J M A F J J M S S R C B R C B V Q1 Q1 V Q2 Q1 Q1 OUT IN IN OUT H H Pressure gauge (Option) Pressure gauge (Option) U U Clearance for maintenance G Drain Drain P2 (Pressure gauge port size) E Clearance for maintenance