2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

ZP3

Type/ZP3-T ZP3-T-B ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Compact Rotary Actuator Series CRQ2

The rotation angle can be adjusted between 90 and 190. n io r at a n t o 10 g Rotation starting point 10 R e End of rotation 160 L L e R B B L g o n B t at a r 160 io 160 n 10 10 n io r at Da n t o g Rotation starting point End of rotation A A R e Operating size 20 30 40 Operating size 20 30 40 A Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Rotation starting point 10 10 End of rotation Lmax

LVQ

LQ1 Construction LVN 90 Degree turn type t TL/TIL LQ3 q e A B r w t y Multi-turn type (with indicator) A B A B Description No.

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r l i | v l l . s o w d ; l w | v w f f Y L : f <.t __ I i i Y f Fw -t wl5uwl sor-;sS sownsot Y r.L. rr 5 r r a r s o s o w l s o w f s o v l , * ; * 1 i ' l , l -1 l a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a MX9IEtr-@EHN+NE_I T l I r I I I I l I o , o o @ o a @ @ @ esrio" ruup @Auto switch See catalogs lor switch sereqon

Rotary Actuator

Single vane Double vane 90, 100D 270S 180S 90S 0 5o g e n a 2 0o r 7 +4o 0 n +4o o o g n e o 0 a ti r 1 0 0 8 0 n a 9 0 o 1 +4o o t ti +4o e o a 0 g e t R n 0 o g a R o r n 0 n 9 ra o ti e a n g t io o n R at a r ot n R o (90o) (90o) ti a t o R Chamfer Chamfer (45o) Chamfer (45o) B port Chamfer A port B port A port B port (40o) B port A port A port For size 40 actuators, a parallel key will

Modular F.R.L. Unit

T-interface (T) Factory mounting of a piping adapter on the AC models is available as a special order. M5 x 0.8, 1/8, 1/4, 3/8, 1/2 Using a T-interface facilitates the redirection of air flow.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Station 1) For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R 18 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 39.3 40.1 63.3 79.8 1 P 1 P 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 2-One-touch fitting [1 (P), 3/5 (R) port] [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 + + + + 2n1-One-touch fitting One-touch fitting One-touch fitting

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Can be used when a double solenoid,3 way valve is requiled Prrq e*'tg4 9 PPorf A Port ' N o i (X) plus B A I dfNll= r / r / r \ r l R P R (x) ptus B A ff-7TrTl utrt / | \ ltrl l l / r l r \ t l R P R Leakage Voltage _q cll 6 Note that when using resistor in parallel with a contact, the leakage voltage may increase due to the leakage current flo\{ing through the resistor (!

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Can be used when a double solenoid,3 way valve is requiled Prrq e*'tg4 9 PPorf A Port ' N o i (X) plus B A I dfNll= r / r / r \ r l R P R (x) ptus B A ff-7TrTl utrt / | \ ltrl l l / r l r \ t l R P R Leakage Voltage _q cll 6 Note that when using resistor in parallel with a contact, the leakage voltage may increase due to the leakage current flo\{ing through the resistor (!

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Can be used when a double solenoid,3 way valve is requiled Prrq e*'tg4 9 PPorf A Port ' N o i (X) plus B A I dfNll= r / r / r \ r l R P R (x) ptus B A ff-7TrTl utrt / | \ ltrl l l / r l r \ t l R P R Leakage Voltage _q cll 6 Note that when using resistor in parallel with a contact, the leakage voltage may increase due to the leakage current flo\{ing through the resistor (!

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

7

B VXK G1/2 R VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5

SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Modular F.R.L. Units

to AL40-A Construction AL20-A AC AFARAL AWAL AFAR AFAFMAR AWAFM AF AFM / AFD AR AL AW Attachment w e q t OUT IN y r u AL30-A, AL40-A w q t e OUT IN y r u Component Parts No.

High Vacuum Angle Valve

How to Order [Option] q e u r t XLFV M9N 16 A 1 G G w y i o !

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.