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r w e e VXF26C<w w r r e q e q VXF26D<w r w e q e q Component Parts Component Parts No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

In the case of w/ One-touch fitting, the 5 mm stroke with 32 bore is the same external dimensions as 10 mm stroke.

High Purity Fluoropolymer

Model Panel thickness (Max. t) J L K J M N T W H E W 4 6 LQ2P22 LQ2P21 14.5 (M) 6 18 73 19.9 19 7 16 10 LQ2P52 LQ2P51 LQ2P42 LQ2P41 LQ2P33 LQ2P32 LQ2P31 (E) (E) 83 H 20.5 6 8 6 24 26.2 22 7 24 (L) Class 2, 3 95 82 Panel aperture K 12 19 10 12 24.5 9 30 33.1 21 28 7 30 110 93 (M) 30.5 N 9 36 40 26 32 10 36 108 H Inch sizes Class 4, 5 Applicable tubing O.D.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

QB A (mm) Circumscribed circle I O QA 14 depth 5 Model Stroke A B CD CT CZ D E FT FX FZ GA GB H L N 212.5 QB 7 RS2H50 RS2H63 RS2H80 30 84.5 20 8 36 32 64 20 73 93 16 16 128 85 44 9 10 30 234.5 90 20 10 45 40 77 25 90 114 24 24 144.5 103 53 11 18 depth 6 12.5 8.5 40 292.5 121 25 10 45 50 98 25 110 138 24 35 171.5 132 54.5 13 20 depth 6 12.5 10 P (Piping port) Model Stroke R S T V W WB XA XB

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Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

CNA

GL GR D E MLGC Q T H1 AL A H S + Stroke ZZ + Stroke CNG N K F M M BN W V MNB C B CNA CNS With rod boot CLS CLQ e MLGP 8 f l RLQ ZZ + l + Stroke h + l MLU ML1C DBore size (mm) Stroke range (mm) A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA -X 40 50 63 80 100 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95

CNA

E F GA GB GC GD GL GL1 GR H1 J K KA -X 40 50 63 80 100 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 2035 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L2 K J M N t W H E Panel thickness (Max. t) J L1 W 12 19 10 12 6 8 10 4 6 19 LQ2P22 LQ2P21 14.5 N (M) 6 18 19.9 7 16 31 73 LQ2P52 LQ2P51 LQ2P42 LQ2P41 LQ2P33 LQ2P32 LQ2P31 (E) (E) 36 83 H 20.5 6 22 24 26.2 7 24 L1 Class 2, 3 42 34.5 95 82 L2 24.5 Panel aperture K 9 28 30 33.1 7 30 21 49 40 110 93 (M) 30.5 9 32 36 40 10 36 26 47 108 H Inch sizes Courtesy of Steven Engineering, Inc.

CNA

N K F M M BN W V lC lB With rod boot e 8 f l ZZ + l + Stroke h + l (mm) Bore (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 X 1.25 6 14 to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 X 1.25 7 18 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

1.1

Facility water required flow rate (l/min) Circulating fluid flow (l/min) 30 HRG010-A, HRG010-W HRG005-W 0.5 50 Outlet port [60 Hz] 0.4 40 Outlet port [50 Hz] 0.3 20 30 0.2 20 HRG002-W Return port HRG001-W 0.1 10 10 0 0.0 0 20 40 80 60 10 30 50 70 Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) HRG015-A, HRG015-W 0 0.5 50 0 10 20 30 40 Outlet port [60 Hz] 0.4 40 Facility water

modular-press-e

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6

Modular F.R.L. Pressure Control Equipment

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6

Modular Type Regulators Series AR

) Note 10) Note 10) Note 10) Note 10) Note 10) Note 6) The only difference from the standard specifications is the adjusting spring for the regulator.

Air Slide Table Series MXP

10 J 28 27 3 0 +0.030 , depth 1.5 4 6 10 9.5 Section AA 3 0 +0.030 , depth 1.5 Q QL Mounting datum level D B MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 DL 6 x M3 x 0.5, depth 4 2 x M3 x 0.5, depth 3.5 15 15 -X (mm) Individual -X G H J K L M N Q QL S V W Z Model MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20

Free Mount Cylinder Series CU

CQS Single Acting, Spring Return (mm) D-M9, D-M9W D-M9V, D-M9WV D-A9, D-A9V Bore size (mm) CQ2 Stroke A B W A B W A B W 6 2.5 (5) 6.5 4.5 4 4 0 All stroke 17.5 17.5 13.5 RQ 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 1.5 (1) 2.5 0.5 7.5 7.5 3.5 CQM 16 2 (0.5) 2

Metal Seal/Rubber Seal Series VQ Body Ported

P kit w VQ0 AXT100-1-J 20 (2) Flat cable housing assembly J kit AXT100-1-F (2) D-sub connector housing assembly = Number of pins: 25, 15 F kit e VQ4 Note 1) S kit is composed of a flat ribbon cable housing assembly (AXT100-1-PU20) of q SI unit and w P kit (20 pins).

ZP

M14 x 1 Male thread Connection Buffer type Rotating (J)/Non-rotating (K) For 2 to 8 6, 10, 15, 25 mm For 10 to 32 10, 20, 30, 40, 50 mm For 40, 50 10, 20, 30, 50 mm Buffer stroke Spring Reactive Force Pad Type (N) 0 stroke Stroke end Pad form Flat 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 Flat with ribs Deep Bellows Pad dia.