ZP 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A
5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A
MT-S8 8 40 MT-S12 12 Caution Do not apply a load that is 50% or more of the theoretical output.
A Auto switch 50 to 100 50 to 100 HS HS 12 12 SMC SMC 24.5 24.5 A 33 B A 33 Auto switch B D-C73C/C80C 20 to 40 D-H7C 20 to 40 HS HS Auto switch Auto switch B A B A 50 to 100 50 to 100 HS HS 8.5 8.5 SMC SMC 16 16 A 36.7 Auto switch A 38.2 B Auto switch D-A3/G39/K39 D-A44 Auto switch HS HS 36 36 Auto switch A 49 B A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) G 1/2 (Applicable
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: BJM (B + J + M)
Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: BM (B + M)
Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: J (Automatic Water Supply Function)
Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: JMT (J + M + T)
Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]
Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: B (Earth Leakage Breaker)
Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: T (High-pressure Pump)
Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: JM (J + M)
Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + J + M
Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + M
Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: Automatic Water Supply Function
Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: J + M + T
Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]
Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: Earth Leakage Breaker
Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: High-pressure Pump