Table of Contents

1 Drain q r e w t i u y o !0 !

ZP3

Vertical T Type/ZP3-T ZP3-T-B ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Fluoropolymer Piping Equipment

-T-R10 LQ1E22-T-R11 LQ1E31-T-R1 LQ1E31-T-R2 LQ1E31-T-R8 LQ1E31-T-R9 LQ1E32-T-R1 LQ1E32-T-R8 LQ1E32-T-R9 LQ1E32-T-R10 LQ1E41-T-R1 LQ1E41-T-R2 LQ1E41-T-R3 LQ1E41-T-R8 LQ1E41-T-R9 LQ1E51-T-R8 LQ1E61-T-R1 8 x 6 10 x 8 12 x 10 6 x 4 8 x 6 10 x 8 12 x 10 8 x 6 6 x 4 12 x 10 19 x 16 6 x 4 10 x 8 12 x 10 19 x 16 10 x 8 8 x 6 6 x 4 19 x 16 25 x 22 25 x 22 19 x 16 Body size (according to the combination

CRBU

, 15, 20, 30, 40 How to Order Without auto switch CRBU2 W U 10 180 S Size 10 15 20 30 40 Size 10 15 With auto switch Size: 10, 15 90 CDRBU2 W U 10 180 S With auto switch Size: 20, 30, 40 CDRBU2 W U 20 180 S R73 Number of auto switches With auto switch Size S Nil 1 pc.

ZP

-T 30 W-B5 7 19 30 M5 x 0.8 4 6 (14) 8 Y Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model A a ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 C 0.5 30 31 2 x 2.5 0.8 18 Series ZP2 How to Order ZP2 T K 3507 W N 10 B5 With buffer Vacuum inlet () Vacuum inlet direction Symbol Applicable tube O.D.

JXCx-OMT0023

1200 470(423 to 517) [Unit: mm] Model D H T E (Note)L d W D T Max.

High Vacuum Angle Valve

Nil A B C None w, e, r, t w, r, t e 1.3 x 10-11 (FKM) 1.3 x 10-9 DSeal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Table of Contents

Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

Modular F.R.L. Units

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

Compact 5-Port Solenoid Valve

Specification External pilot (SUP/EXH block assembly) q e r t w y u i q Series w Type 10 Side ported e Wiring 1 JSY1000 3 JSY3000 5 JSY5000 TC Spring type terminal block box T Terminal block box r Valve stations t P, E port entry U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 24 stations) TC: Spring type terminal block box T: Terminal block box Symbol Stations

VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !

AC Servo Motor Driver (CC-Link Type ）

1200 470(423 to 517) [Unit: mm] Model D H T E (Note)L d W D T Max.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 kit 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 T 13 14 13 14 13 14 kit 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 L 3 4 3 4 3 4 kit COM. 1 2 1 2 1 2 COM. COM.

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly 10 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

NCQ2/CQ2

(Axial piping) (mm) D-M9 D-M9 W D-M9 AL D-A7 H D-A80H D-F7 D-J79 D-A9 V D-A7 D-A80 D-A73C D-A80C D-F7 W D-J79W D-F7BAL D-F79F D-F7NTL D-M9 WV D-M9 AVL D-F7 WV D-F7BAVL D-M9 V D-F7 V D-J79C Number of auto switches D-A9 D-A79W D-P4DWL 15 20 15 15 10 With 1 pc. 10 5 5 15 20 20 15 15 With 2 pcs. 10 10 5 3 Operating Range 3 Applicable Cylinder Series: CDQP2, CDQP2 S/T (Axial piping) (mm) Bore

LEC-OM07605CN

(2) ()40 10(555) (10.1) P A = (10.1) K T 2] A: [m P: [W] T: [] K: [56] (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10. 10.3 101 1000 EM1(1) EM1(1) LECSS2-T 400W [Pr. PF06][Pr.

Best Pneumatics Vol. 14

1 Drain q r e w t i u y o !0 !

Metal Seal/Rubber Seal Series VQ Body Ported

P kit w VQ0 AXT100-2-F (2) D-sub connector housing assembly = Number of pins: 25, 15 F kit e (3) AXT100-2-TB1 Terminal block assembly (8 terminals) T kit r VQ4 (3) AXT100-2-TB2 Terminal block assembly (8 terminals) T kit t S kit is composed of a flat ribbon cable housing assembly (AXT100-2-PS20) of q SI unit and w P kit (20 pins).