Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 16 x 14 x L60 I-34S-A 10 x 6 x L33 10 pcs. 10 pcs. I-35S-A 10 pcs. 10 pcs. 12 x 8 x L42 O-ring, Seal Wiping with alcohol, etc., may cause damage. I-36S-A 10 pcs. 10 pcs. 14 x 10 x L45 I-39S-A 10 pcs. 10 pcs.

21- AF-A 10- Series Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.

Clamp Cylinder

C a u t i o n ~ When replacing seals, take care not to hurt your hand or finger on the corners of parts. 17 3-2-1. Disassembly / Reassembly C a u t i o n ~ Disassemble and assemble the cylinder on a clean cloth in a clean location. Perform on a clean cloth.

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Specifications Fluid Air Proof pressure 1.05MPa Maximum operating pressure 0.7MPa 12, 16 0.03MPa Minimum operating pressure 20 ~ 40 0.02MPa 50 ~ 100 0.01MPa -10 ~ +70 C, Built-in magnet type: -10 ~ +60 C (with no freezing) Ambient and fluid temperature Lubricant Non-lube (Do not lubricate) CM2YCG1YCA2Y +1.4 0 Stroke length tolerance (mm) CQSYCQ2Y +1.0 0 Cushion Rubber bumper (none for CA2Y

Power Valve Precision Regulator

IR-A How to Order IR VVEXB 5 01 1 IRV VEX VEX Body size Thread type Nil F N T Port size Rc G Note) SRH Pilot type Internal pilot Common external pilot Valve stations 01 8 1 1 2 NPT NPTF SRP 2 2 stations SRF 10 10 stations ITV VVEX2 5 02 1 IC Body size Thread type Rc G Note) ITVH Port size Nil F N T Pilot type 4 1 02 ITVX 1 2 NPT NPTF Internal pilot Common external pilot 2 stations Valve stations

Nozzle Type Ionizer

ms or more, Low level 0.4 V or less 1 T U O U O T2 T E S Indicator light (Green/Red) Enclosure IP40 Operating temperature range 5 6 7 8 10.4 16 Operating: 0 to 50C, Stored: 10 to 60C (with no freezing or condensation) 8 x M3 11 (4.5) 19.4 29 Operating humidity range 21.4 Operating/Stored: 35 to 85% RH (with no condensation) Environmental resistance Withstand voltage 1000 VAC for 1 minute

“

-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.

90

-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.

AWM20 to AWM40

t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

AWM20 to AWM40

t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

ITV_D-E

C24V 10% CO N SU M PTI O N CU RREN T AT CO N STAN T O U YPU T 120M a O R LESS I N PU T SI G N AL D I G I TAL 10bi t ( PARALLEL I N PU T) I N PU T I M PED AN CE 4. 7k O R LESS LI N EARI TY 1% F.

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

AIR CYLINDER

Remarks 1 * Tie-rod Stainless steel 2 2 * Tie-rod Stainless steel 2 3 * Tie-rod nut Stainless steel 8 4 Foot Rolled steel 2 Metallic painting Figure -10 Mounting bracket: Center trunnion (T) Table -19 Parts list (The item with * mark is different from the basic type 25A-C (D) S2.

Air cylinder

In this case, the rigidity of the machinery should also be examined. 10 - 7) Application of 2nd-class pressure vessel regulation due to operating liquid.

Mist Separator

Structural Drawing, Option and Replacement Parts 10 6. Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12.

MLGC

style. 3.2-10

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

D. P. Lube (Unit) Series ALD(U)600/900

ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

HRX-OM-T002

: 45 oC 12 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity

HRX-OM-Y098

.Communication setting screen 36.Contact output 46 Setting screen 10.