Type: -, Cooling Method: -, Cooling Capacity: 2,600/3,200 W (50/60 Hz), Piping thread type: G (PT-G conversion fitting set included), Optional specifications: High pump head specification

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option: High-pressure Pump Mounted

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option: High-pressure Pump Mounted

Cooling Capacity: 018 [1600/1800 W (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (with Rc-G Conversion Fitting Set], Option 1: None

Cooling Capacity: 018 [1600/1800 W (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (with Rc-G Conversion Fitting Set], Option 1: MT (M + T), Option 2: Z (No Flow Sensor, Water Leakage Sensor, Particle Filter, Bypass Valve or Retaining Clip)

Cooling Capacity: 018 [1600/1800 W (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: F [G (with Rc-G Conversion Fitting Set], Option 1: None, Option 2: -

Cooling Capacity: 018 [1600/1800 W (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: F [G (with Rc-G Conversion Fitting Set], Option 1: M + T, Option 2: No Flow Sensor, Water Leakage Sensor, Particle Filter, Bypass Valve or Retaining Clip

HRX-OM-W032

20 15 15 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40

In-line Air Filter

20 20 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 0 0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D 6, 1/4" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa

25

Comparison of potential amplitude between AC type and dual AC type (Installation height of sensor: 300 mm) 40 AC type Surface potential of workpiece (V) 20 25 V or less Dual AC type IZS42 0 20 40 Time Independent Dual AC type is implemented.

Flow Sensor Series PFMV

20 9.1 9.1 2 1 1 2 L-type bracket (Through hole) The dimensions show the PFMV5-1.

DOC1001322

If foreign matter with a size of 20 m or more are likely to enter, install the particle filter. Filter Rc1 3 20m HRS-PF005 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve(Part of thermo-chiller) Rc3/4 Y-strainer Rc1/2 #40 Install either the strainer or filter. If foreign matter with a size of 20 m or more are likely to enter, install the particle filter.

In-line Air Filter

20 0.7 MPa 0.7 MPa 10 10 0 20 40 60 80 100 0 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3

IZx-OMP0064

IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.

STOPPER CYLINDER

Model T D RS(D)Q32 36 38 RS(D)Q40 44 48 RS(D)Q50 56 57 Fig. 3 6 - 7-3. Change of the piston rod direction For roller type and lever type, feed the pallet from the direction shown in Fig.4.

Air cylinder

Table 4 20 25 32 40 Rod seal CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS The rod seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year.

Mist Separator

Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AM20) 23 to 24 2) Bowl assembly (AM20) 25 1) Element assembly (AM30/AM40) 26 to 27 2) Bowl assembly (AM30/AM40) 28 to 29 11. Exploded Drawing 30 12.

Air cylinder

Table 4 20 25 32 40 Rod seal CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS The rod seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year.

IZ-OMK0015

Indication/Setting Parts Description File T ext 001 Model Overlay Numbe Name r No. Indication Type Description (1) Power supply LED (Dark green) Illuminates when power is supplied. Flashes when the supply voltage is irregular.

Mechanically jointed rodless cylinder With cam follower guide, With single-axis linear guide With double-axis linear guide

Table 1: Stroke adjustment range (Without spacer, with short spacer, with long spacer) -10 -20 -30 -40 -50 0 0 to 10 10 to 20 20 to 30 L unit MY2*16 Without spacer Short spacer Long spacer H unit 0 to 12 12 to 24 24 to 36 L unit MY2*25 Without spacer Short spacer Long spacer H unit 0 to 16 16 to 32 32 to 48 L unit H unit Without spacer MY2*40 Short spacer Long spacer -9- Warning 1.