4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

Vacuum Pad

B A B Model 11 14 ZP3-T13B;15-B5 ZP3-T13B;20-B5 ZP3-T10B;15-B5 ZP3-T10B;20-B5 40.5 48 59 66.5 13.3 16.4 15.3 16.4 40.5 48 59 66.5 13.5 16.6 15.5 16.6 Lateral Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Stability of suction position,

A A A A A Seal washer 31 40 31 34.5 7 38 32.5 10 5 35 32 23.3 6 Width across flats 6 44 40 29.4 6 54 50 37 6 Width across flats 6 Width across flats 6 A-A A-A A-A 22 22 22 19 19 19 34.6 61.1 86.1 25 9.5 9.5 9.5 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-Y32BMl-AL14 60.4 59.9 64.0 ZP3E-Y40BMl-AL14 64.4

Hydraulic

Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection 20 32 to 100 D-A7 D-A80 Approx. U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Modular F.R.L. Units

When the above factors are present, or there is some doubt, use a metal bowl for safety. 86 AL10-A to AL60-A Series Construction AL10-A AL20-A w q t w q e OUT IN OUT IN y r u y u AL30-A/AL40-A AL50-A/AL60-A w q t w q t e e IN OUT IN OUT r y u r i y u Component Parts No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

Smooth Cylinder/Low Speed Cylinder

D-G5, K5, G5W D-K59W, D-G59F, D-G5NT 20 to 100 Hs D-C7, C8 20 to 63 8.5 Auto switch 12 Auto switch Hs 24.5 16 16 16 16 24.5 B 33 A B 26 A D-H7, H7W D-H7NF 20 to 63 D-C73C, C80C 20 to 63 Auto switch 8.5 Auto switch Hs 8.5 Hs B 36.7 A B 29 A D-B5, B6, B59W 20 to 100 D-H7C 20 to 63 12 Auto switch Hs Hs 8.5 Auto switch B 38.2 A B 33 A Auto Switch Proper Mounting Position Auto Switch Mounting

7

fitting P A B D E F I J K Model Conduit terminal Conduit Flat terminal C L T 52.5 (58) 52.5 (58) 99.5 U V T 58.5 (64.5) U T U 10, 3/8", 12 91 (97) 22.5 3 A VXD2 68.5 47.5 23 30 45 20 6 13.5 41.5 25 33 Model Mounting bracket dimensions One-touch fitting P a b d e f 10, 3/8", 12 58 65 67 52 25.5 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions. 139 VXD Series For Air/Water/Oil 3 A

REA/REB

Note 2) 15 has internal magnets in the body. 10-2-20 20 Sine Rodless Cylinder Basic Type Series REAR Construction: 20 to 40 @3 q @1 y u e t r @2 !1 !2 i o !3 @0 !8 !4 @5 RE A B REC CX CY MQQ M !5 @8 @9 !9 #0 @6 !0 @4 w @7 !7 !6 RHC MK(2) Component Parts Material No. Description No.

REA/REB

The U-shaped groove is machined into the cushion ring in such a way that this acceleration process can proceed smoothly (as a sine function).

ISO Cylinder

13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-1-F Note 3) AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-1-F Note 3) AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Size Port size A B C D E F I J K L M Grommet Grommet with PCB T U T U 50 3/4 110.6 29 36 71 18 4.5 17 51 32.5 38.5 35 51.9 28.5 57.6 38 60 1 131 33 42 95 21 4.5 20 59.5 45.5 49.5 42 60.4 31.1 66 41 Specific Product Precautions Size Port size Conduit DIN terminal DIN terminal without connector M12 connector Bracket mount dimensions T U T U V T U T U a b d e f 50 3/4 59.2 48.9 60.7 55.3 67

VFR

1Bore size , VV5FR5-01FUStation 1Bore size Light/Surge voltage suppressor 235.5 204 (72) 60 11 4 60 U side Manual override (Non-locking) 6 [2] 21 R5.5 B B B B A A A A n B B B A A A B B B B A A A A 3 L1 L2 2 11 11 71.5 (Pitch) P = 51 Pitch P = 51 71.5 1 Stations 2n-Rc 1/2, 3/4 (A, B port) 20 24 [23] 105.5 176.5 209 Plug assembly: VVZS3000-21A(Option: Refer to page 3-5-8.) 2n-Rc 1/2 58 28 70

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Battery-less

2 A A @2 @0 @3 u !9 e o !1 !4 !5 !3 A-A B B @1 !8 B-B w Component Parts No. Description Material Note No.

Air Slide Table

A) MXQ12B 50 28 20 27 18 MXQ20(A) MXQ16B 57 31 20 30 19 MXQ25(A) MXQ20B 64 32 21 31 20 -X11 is not available for the MXQ6(A, B) and MXQ8(A, C).

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A J 3 30 17 M6 x 0.75 10 8 5 4 6 37 20 14 N S U F GN GS ZP3 Y 015 02 035 U B3 K 3 34 17 M8 x 0.75 11 10 7 6 6 40.5 20 14.5 13 B Dimensions Per Vacuum Inlet: One-touch Fitting 7 Model H J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.