V

R E SY3/5/7000 SS5Y 20 T H R E A D T Y P E PT 00T NPTF M A N I F O L D S E R I E S V A LV E S TAT I O N S 3 SY3000 5 SY5000 7 SY7000 02 2 Stations to 20 20 Stations H O W T O O R D E R B O D Y P O R T E D W/ I N D I V I D U A L L E A D W I R E SY3/5/7000 SY 20 B R A C K E T S E R I E S Without Bracket F1 With Foot Bracket F2 With Side Bracket 3 SY3000 5 SY5000 7 SY7000 A, B P O R T S I Z

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

C85

TD e8 FBH13 XS AV TM NH FT TF XV LT AO UR W UR UF W TT UW TZ AB US 8 25 4 4.5 11 26 12.8 16 3.2 2.8 13 23.8 26 22 30 40 6 20 38 3.2 4.5 35 5 10 25 4 4.5 11 26 12.8 16 3.2 12.8 13 23.8 26 22 30 40 6 20 38 3.2 4.5 35 5 12 32 6 5.5 14 38 18 20 4 18 32 18 33 30 40 52 8 25 58 4 5.5 42 6 16 32 6 5.5 14 38 18 20 4 18 32 18 33 30 40 52 8 25 58 4 5.5 42 6 20 40 6 6.6 17 46 19 25 5 19 20 36 5 42 40

C85

TR JS14 TD e8 FBH13 XS AV TM NH FT TF XV LT AO UR W UR UF W TT UW TZ AB US 8 3.2 25 4 4.5 11 26 16 23.8 12.8 13 3.2 26 22 30 40 6 20 38 12.8 4.5 35 5 10 3.2 25 4 4.5 11 26 16 23.8 12.8 13 3.2 26 22 30 40 6 20 38 12.8 4.5 35 5 12 4 32 6 5.5 14 38 20 32 18 18 4 33 30 40 52 8 25 58 18 5.5 42 6 16 4 32 6 5.5 14 38 20 32 18 18 4 33 30 40 52 8 25 58 18 5.5 42 6 20 5 40 6 6.6 17 46 25 36 19 20 5

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Cooling Capacity: 090 (9.5 kW Air/ 11.0kW Water), Cooling Method: W (Water-cooled Refrigeration), Power Supply: 40 [3-phase 380 to 415VAC (50/60 Hz); 3-phase 460 to 480VAC (60 Hz)], Option: M (Applicable to DI Water Piping)

Cooling Capacity: 9.5 kW Air/ 11.0kW Water, Cooling Method: Water-cooled Refrigeration, Power Supply: 40 [3-phase 380 to 415VAC (50/60 Hz); 3-phase 460 to 480VAC (60 Hz)], Option: Applicable to DI Water Piping

EXxx-OMY0004

Caution: Connection of any output to another voltage supply will bridge the safe output switch and cause an undetected error. 20 No.EX##-OMY0004 4.

5 Port Solenoid Valve Series VQZ1000/2000/3000

0.27 0.40 0.25 0.10 20 or less 20 or less 36 or less Flow rate (l/min (ANR)) VQZ2250--C 0.74 0.19 0.17 0.63 0.19 0.16 10 or less 13 or less 13 or less 54 0.5MPa Double VQZ2251--C SJ 1.2 0.17 0.26 1.0 0.20 0.24 15 or less 20 or less 20 or less 58 VQZ2251S--C 1.2 0.13 0.27 0.40 0.25 0.10 15 or less 20 or less 20 or less 100 0.3MPa VQZ2350--C SY 0.47 0.23 0.11 0.41 0.28 0.10 25 or less 26 or

V

20,25,32mm only 10 16 20 32 25 Non-rotating piston rod accuracy 0.8 .0.5 A U T O S W I T C H E S Reed D-90 (DC Only) D-97 (w/LED, DC Only) A-90A (AC or DC) D-93A (w/LED, AC or DC) Solid State D-F9N (W/LED, 3 Wire NPN) D-F9P (W/LED, 3 Wire PNP) D-F9B (W/LED, 2 Wire) N O O F S W I T C H E S 2 Switches S 1Switch Safety Note For cap type mounting, care should be taken not to exceed 6 bar when

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly 10 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

58

P (cm) Mounting Applicable max. stroke according to buckling strength (cm) Operating pressure (MPa) Support bracket nominal symbol and schematic diagram Nominal symbol 125 140 160 Foot: L Rod flange: Head flange: 0.3 103 92 113 F G L, F 0.5 79 70 86 W W W 0.7 66 58 72 0.3 45 38 47 G 0.5 33 27 34 0.7 26 22 27 Center trunnion: 0.3 96 83 106 T Clevis: C, D C, D 0.5 71 61 76 W W 0.7 59 50 62