60

Max. system pressure (MPa) Flow characteristics Orifice Flow characteristics Orifice size (mm) Model Note) Port size Note) Port size system (mm) Model AC DC AC (Built-in full-wave rectifier type) Weight (g) Av x 10-6 m2 Cv converted size pressure (MPa) Av x 10-6m2 Cv converted VXK2110-01 VXK2120-01 VXK2130-01 VXK2110-02 VXK2120-02 VXK2220-02 VXK2320-02 VXK2130-02 VXK2230-02 VXK2330-02 VXK2240

Modular F.R.L. Units

IS10M-30-A Y310-(01)-A 02-A G36-10-01 G36-4-01 G36-10-01-L G36-4-01-L Round type Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Pressure gauge Note 1) Attachment Round type (with color zone) Spacer Spacer with bracket Y400-A Y400T-A AKM4000-(02)-A 03-A IS10M-40-A Y410-(02)-A 03-A 02A VHS40-03A 04A 02-A E400-03-A 04-A 06-A 02-A IS10E-4003-A 04-A 06-A Y44-02-A 03-A Y500-A

Valve Single Unit

2 stations Double wiring specifications(1) 10 10 stations 02 2 stations (2) Manifold base (5 stations) Available up to 20 solenoids.

Table of Contents

Dd9 L d l m t 0.030 0.040 0.040 0.076 0.040 0.076 0.040 0.076 IY-J015 IY-G02 IY-G03 IY-G04 10 5 16.6 4.8 12.2 1.5 0.7 Type C 5 for axis 16 8 Type C 8 for axis 21 7.6 16.2 1.5 0.9 20 10 25.6 9.6 20.2 1.55 1.15 Type C 10 for axis 10 25, 28 41.6 9.6 36.2 1.55 1.15 Type C 10 for axis 10-5-16 16 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM 6, 10, 16, 20, 25 How to Order

SYJ300/500/700

S and Z types 24VDC: 7% to +10% 12VDC: 4% to +10% T type 24VDC: 8% to +10% 12VDC: 6% to +10% 659 10-SYJ300 3 port / Pilot operated solenoid valve Flow characteristics / Weight C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv 12(PA) 23(AR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm 2) L/M plug connector M8 connector Grommet 10-SYJ312 10-SYJ322 10

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators (mm 2) 14/2 (PA/B) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) 4/25/3 (A/BEA/EB) area M8 connector 67 (41) 89 (63) L/M plug connector Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 10-SYJ3143 10-SYJ3243 10-SYJ3343 10-SYJ3443 10-SYJ3543 10-SYJ3123 10-SYJ3223 10-SYJ3323 10-SYJ3423 10-SYJ3523 10-SYJ3133 10-SYJ3233 10-SYJ3 10-SYJ3433 10-SYJ3533 Single Double

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

KJ

F (mm) Weight (g) 65 72 81 91 97 112 Port B Min. port size L2 L3 L4 L5 L6 P Q1 Q2 M L1 KM12-04-02-6 6 17 40 89 110 99 125 108 139 1 4 6 4 10 18 29.5 19.5 29 10.6 16 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 17 7.5 6 10 19.5 31.5 21.5 31 13 17 13.5 73 55 3 8 19 9 8 11.5 22.5 35.5 24 34.5 15.5 18.5 14.7 86 Dimensions: KM13 Applicable tubing

SYJ3000/5000/7000

length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 1-5-79 for dimentions with connector cable. 1-5-11 12 Series SYJ3000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ3240-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B Courtesy of Steven Engineering

Intrinsically Safe Valve

Class I, II, III Division 1 Groups A, B, C, D, E, F, G Class I Division 1 Groups A, B, C, D Hazardous Locations Warning Note) Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009) (Refer to page 40 for details) Note) Based on dynamic performance test, JIS B 8375-1981.

AS

(9) (12.7) AS22;1F-01-08(S)A 8 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-01-10(S)A 10 15.9 25.3 32.3 (32.2) 15.6 12 (11) AS22;1F-02-23(S)A 3.2 7.2 20.9 30 (30.3) AS22;1F-02-04(S)A 4 8.2 13.3 18 (19) 17 AS22;1F-02-06(S)A 22.6 6 1/4 10.4 12.6 23.4 32.5 (32.8) 36.6 35 31.1 29.5 (17.5) AS22;1F-02-08(S)A 8 13.2 23.9 33 (33.3) 14.2 19 (20) AS22;1F-02-10(S)A 10 15.9 26.9 36 (36.3) 15.6 20 (21)

Modular Design with Uniform Body Style

Pressure relief 3-port valve t V Mounting position: AW + AL + V V V V V + d Set pressure*7 Nil 0.05 to 0.85 MPa setting V V V V V 1 0.02 to 0.2 MPa setting V V V V V + Nil Polycarbonate bowl V V V V V 2 Metal bowl V V V V V 6 Nylon bowl V V V V V e Bowl*8 8 Metal bowl with level gauge V V V V C With bowl guard V *9 *9 *9 *9 Semi-standard 6C With bowl guard (Nylon bowl) V *10 *10 *10 *10

42

Description Material Qty VVQ4000 1 VFS r VVQ4000-80A-1 Gasket HNBR 10 Type Port thread type t VVQ4000-80A-2 Gasket HNBR 10 VFR Nil Rc N NPT T NPTF F G y VVQ4000-80A-4 Clip Stainless steel 10 A For 1 station C For 2 stations Note 3) Note) Spare parts consist of sets containing 10 pcs. each. VQ7 Option Fitting Assembly Nil Standard W Note 2) IP65 enclosure 7. Fitting assembly part no.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

VEX1

(A) 2 (A) 1 (P) 3 (R) 2 (A) 2 (A) 3 (R) Model C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv VEX312-01 VEX312-02 VEX332-02 VEX332-03 VEX332-04 VEX350-04 VEX322-01 VEX322-02 VEX342-02 VEX342-03 VEX342-04 1/8 1/4 1/4 3/8 1/2 1/2 1/8 1/4 1/4 3/8 1/2 2.4 3.5 4.1 8.7 9.8 24 3.3 4.1 8.1 12 13 0.19 0.35 0.36 0.29 0.37 0.32 0.34 0.28 0.34 0.26 0.20 0.59 0.89 1.1

0.4

Flow characteristics: C Max. operating frequency 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SUP side pressure (P1) VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

Secondary Batteries

Enclosure: IP65 compliant Series 2 4 90-SV2000 90-SV4000 SUP/EXH block assembly specifications SI unit Protocol type DeviceNet Symbol Q Internal pilot External pilot Nil R Valve stations P, E port location U D B Note Symbol 02 Stations U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) 2 stations (1) Double wiring specifications 08 02 8 stations 2 stations (