VFA3000

(1.8) 14.8 (0.8) 36 (2) 15.3 (0.85) 02 03 VFA5144 2 position single : 0.51 02 03 04: 0.56 34.2 (1.9) 34.2 (1.9) 33 (1.8) 36 (2) 45 (2.5) 52 (2.9) 02 03 04 1 8 3 8 1 2 1 4 , , : 0.52 02 03 04: 0.57 1 8 45 (2.5) 52 (2.9) VFA5244 2 position double 02 03 04 3 8 1 2 1 4 , , Body ported : 0.66 02 03 04: 0.71 VFA5344 -X1 3 position closed center 1 8 34 (1.9) 38 (2.1) 02 03 04 JIS Symbol 3 8 1 2

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

5 Port Air Operated Valve

A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port

VZ5000

-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is

Fieldbus System

1 2 3 U D B In the case of the 32-output SI unit SV1000 SV2000 SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Symbol 02 Stations Note 2 stations Both sides (2 to 20 stations) Double wiring Note 1) w SI unit specifications 16 02 16 stations 2 stations y SUP/EXH block assembly Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids

Soft Start-up Valve

Caution Without light SY100-61-1 SY100-61-1-C With light Rated voltage Voltage symbol Part number Part number (For AV) (For AVL) DC24V 24V SY100-61-3-05 SY100-61-3-05-C DC12V 12V SY100-61-3-06 SY100-61-3-06-C AC100V 100V SY100-61-2-01 SY100-61-2-01-C AC200V 200V SY100-61-2-02 SY100-61-2-02-C AC110V 110V SY100-61-2-03 SY100-61-2-03-C AC220V 220V SY100-61-2-04 SY100-61-2-04-C

0.01

SFD-EL101 SFD SFD Element set Element set 1 1 With O-ring With O-ring Bracket Bracket 2 2 Material: Stainless steel 304 Material: Stainless steel 304 SFD-BR101 SFD-BR101 LLB Dimensions AD SFD101-02 SFD102-02 GD 25 66 66 25 19 19 24 24 50 40 50 40 13 2 x 4.5 Bracket Bracket 13 2 x 4.5 325 SFD Series Made to Order Specifications 2 Please contact SMC for detailed specifications, delivery and

5 Port Air Operated Valve Series VFA3000 1

2 1 4 3 VFA5420-02-X1 5 Body ported VFA5120-03 2 3 8 3 VFA5420-03-X1 5 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 Base mounted (1) VFA5144-03 2 3 8 3 VFA5444-03-X1 5 VFA5144-04 2 1 2 3 VFA5444-04-X1 5 Note 1) With sub-plate Note 2) { }: Normal position 5-3-15 8 Series VFA5000 Dimensions: Body Ported 2 position single: VFA5120-02 03 2 position double: VFA5220-02 03 (Pilot port) (Mounting hole

Table of Contents

2 2 2 2 4 2 2 1 1 6 2 No. !

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 port 12, 14 port 1/8-2 port 2, 4 port 1/8 1 port 1/8-2 port 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator

Prevents Micro-Bubbles

Double acting LLA2A-03-02-C 1 set 1 set Manifold base part no. With flow rate adjustment LVA20A-02-C1 2 sets 2 sets Valve part no. (stations 1 & 2) LVA20A-02-C 1 set 1 set Valve part no. (station 3) P P N.C.

Valve Single Unit

the locking type.) 18.4 42 (Light/Surge voltage suppressor) (13.4) (52) (5.5) 48.6 (2-4.2 mounting hole) 1.2 (5.5) 48.6 12.5 (47.5) (40.5) 31.5 33.3 28 1.5 H: 600 G: 300 (Lead wire length) SX7120-02 G H 108.9 (EA, EB port) 2-Rc 1/8 (A, B port) 2-Rc 1/4 39.4 Polarity indication 18 18 0.9 18 29.4 20 2 (23.9) -+ P EA EB 41 31.5 (P port) Rc 1/4 28 For manifold gasket positioning 2-2.2 die-cast

VT317

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

Fieldbus system EtherCAT compatible SI Unit

ms 3 200 ms 0 Offset binary 1 Sign magnitude 0808 2 2's complement 0 Offset binary 1 Sign magnitude 0809 2 2's complement 3 Scaled 1 Sign magnitude 080A 2 2's complement 0 None 1 2 value average 080B 2 4 value average 3 8 value average -96No.EX-OMA1023 Enumeration data definion (continued) Index Value Text 0 -10+10 V 1 -5+5 V 2 -20+20 mA 3 010 V 080D 4 05 V 5 15 V 6 020 mA 7 420 mA 3

Secondary Batteries

Enclosure: IP65 compliant Series 2 4 90-SV2000 90-SV4000 SUP/EXH block assembly specifications SI unit Protocol type DeviceNet Symbol Q Internal pilot External pilot Nil R Valve stations P, E port location U D B Note Symbol 02 Stations U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) 2 stations (1) Double wiring specifications 08 02 8 stations 2 stations (

VFA3000

3 x , 18 14 VZA (P , A, B port) VFA VFRA 2 x 4.3 VA (Mounting hole for manifold) 2 x 4.2 (Mounting hole) 2 x 18 (Pilot port) 2 x M5 x 0.8 (Breathing port) 2 x 18 (R1, R2 port) 1765 Series VFA3000 Dimensions: Base Mounted 2 position single: VFA3140-02 03 2 position double: VFA3240-02 03 2 x 4.3 2 x 4.3 (Mounting hole) (Mounting hole) 2 x 18 (Pilot port) (Pilot port) Max. 3 Max. 3 3 (Breathing

42

T NPTF Enclosure Nil Dust-protected SYJ Sub-plate W Dust-tight/ Water-jet-proof (IP65) SZ 0 5 VQ4 0 1 Plug-in 1 02 VF 1 5 G VQ4 2 5 1 02 Plug lead VP4 CE-compliant Porting specifications VQ 1/2 Type of actuation Nil Q CE-compliant 3-position closed center 2-position single Nil Side ported B Bottom ported VQ 4/5 VQ 4/5 (A) 4 (B) 2 (A) 4 (B) 2 1 3 Note) CE-compliant: For DC only.

0.

(A) 2 1 Metal seal Rubber seal 1 (P) 3 (R) Port size [2(A) port] N.O. (A) 2 Symbol Port size VQZ200 VQZ300 p p p p p p 2 Nil Without sub-plate Rc 1/8 Rc 1/4 Rc 3/8 01 02 03 1 (P) 3 (R) N.C. (A) 2 3 Note) For optional thread type, refer to page 32. 1 (P) 3 (R) Manual override N.O.