CG1

7 !8 !

Valve Single Unit

How to Order Valves 5 L N SX 5 1 20 01 Thread type Series A, B port size Nil Applicable series Rc Symbol Port size M5 x 0.8 3 SX3000 5 SX5000 G F M5 One-touch fitting for 4 C4 N 7 SX7000 NPT SX3000 One-touch fitting for 6 C6 NPTF T Type of actuation 1 8 01 1 2 position single One-touch fitting for 4 C4 Rated voltage SX5000 2 2 position double One-touch fitting for 6 C6 5 24 VDC 6 12 VDC 3

VEX1

K N O S D A, P port Rc(PT) , ,1 R port Rc(PT) , ,1 Rc(PT) 1,1 Rc(PT) 1 VEX5500 VEX5501 1 2 3 4 133.5 50 25 10 7 25 80 60 81.5 83.5 2-M6 X 1 X Depth 9 1 2 3 4 60 143.5 62.5 156.5 36.5 16.5 20 Center 116.5 70 25 VEX5700 VEX5701 1 4 1 4 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 13 88.5 86.5 18 4-M6 X 1 X Depth 6 136.5 60 17 82 c Bracket mounting dimensions g Grommet h Grommet terminal i

Series AP500

C-22 VS Hastelloy C-22 H 3) Not available with SHP, SH, H materials.

Fieldbus System

B C Base mounted plug-in Note) Refer to the S0700 series catalog (CAT.NAS11-88) for symbol.

One-touch Fittings

[mm] Connection Weight [g] With a rib X Y Nylon Urethane M L1 Rib 3.2 M3 x 0.5 KQ2W23-M3G1 7 7.1 6.7 9.5 7 15.3 22.5 23.4 13.3 0.8 0.8 1.2 4.8 V M5 x 0.8 KQ2W23-M5m1 7 7.1 6.7 9.5 7 15.3 25.2 25.7 13.3 2.8 2.4 2.5 5.8 V D1 4 M3 x 0.5 KQ2W04-M3G1 7 8.2 7.7 10 7 15.4 23 24.5 13.3 0.8 0.8 1.2 4.9 V M5 x 0.8 KQ2W04-M5m1 7 8.2 7.7 10 7 15.4 25.7 26.8 13.3 3 3 2.5 5.8 V 6 M5 x 0.8 KQ2W06-M5m1 7

VDW

VVDW 2 0 4A VVDW 0 2 C 1 01 2 Series Series VX2 1 2 1 2 10 20 10 20 Thread type Rc G NPT Nil F N VXD Material C S Brass (C37) Stainless steel VXZ Series 30 OUT port size VVCW20-4A Stations VXE Symbol M5 01 Port size M5 1/8 (6A) 1 2 For 2 stations For 3 stations VXP Series 10 is available with M5 only.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Applicable cable O.D. 3.5 to 7 Station n L1 L2 3 80 68 Station 20 403 391 6 137 125 8 175 163 10 213 201 Station 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 43 Series SYJ700 Type 40 Manifold: Bottom Ported/SS3YJ7-40Stations -01 [ ] for AC Grommet (G) 53.5 5 L2 L1 10.5 1.5 19.5 3.4 48.4 (

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

-23ST AS121F-U10/32-07T 13.5 12 18.3 23.1 1/4" 3.2 8.4 20 12.7 20 AS221F-01-04ST AS221F-N01-01ST 1/8" 8.4 20.4 27.5 4 9.3 12.7 5/32" 9.3 20.4 27.5 13.4 21 AS221F-01-06ST AS221F-N01-03ST 34.7 R1/8 12 14.2 7 1.5 31.6 13.5 6 11.6 21 13.4 34.7 AS221F-01-08ST AS221F-N01-05ST 16.5 NPT1/8 12.7 14.2 7 1.5 31.6 3/16" 13.2 24 31.1 18.5 25.3 32.4 8 15.2 23 23 AS221F-01-10ST AS221F-N01-07ST 15.3 17 1

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5

VR4151/4152

VR1210-01 Model VR1220-02 1.0 MPa 0.05 MPa Max. operating pressure Min. operating pressure Min. pressure differential 0.05 MPa 5 to 60C (No freezing) SA Ambient and fluid temperature Effective area Port size Weight 7 mm2 15 mm2 VA 1 8 1 4 24 g 45 g SA How to Order VA 01 0 VR12 1 VM 01 Port size VR 1 8 1 4 02 JIS Symbol VH Nil Thread type VHS Rc NPT N G F standard 1 Body size 1 8 Construction

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

override 34 41 3.5 (Lead wire) 38.5 300 Cover diameter 1.6 Cross section 0.34mm2 SMC 35.5 A port PE 16 12 14.5 7 7.5 7.5 7.5 3-Rc(PT)1/8 P/A/R port M5 X 0.8 PE port L plug connector (L): VQZ115(R)-lLl-01 M plug connector (M): VQZ115(R)-lMl-01 60.5(65.5) 300 (Lead wire) Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5

Manifold Specifications

Internal wiring 1 3 5 6 01 C6 C8 VZ523MOZ-VZ3Applicable solenoid valve 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Rated voltage Note) Withstand voltage specification of wiring unit part is equivalent to JIS C 0704 class 1.

5 Port Solenoid Valve SY Series

Caution 3 5 7 SX 000-16-1A (with mounting screw) 3 5 7 SY9000 has no bracket.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0): SYJ54-W0-01 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6

AC Servo Motor Driver (CC-Link Type ）

station 3 communication ready 4 C 5 D 6 E 7 F 8 15 18 15.

Table of Contents

Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .