CXS

7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts No. Description No. Description Note Material Note Material Hard anodized Aluminum alloy Polyurethane !6 Housing Bumper B q Note) Hard chromium electroplated Carbon steel NBR !

CXS

7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts No. Description No.

Compact Type Dual-Rod Cylinder Series CXSJ

7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

17

5 w @7 !1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

SMC offers a variety of pressure gauges including general purpose, oil-free/external parts copper-free with limit indicator, clean series and a pressure gauge with a pressure switch.  Pressure ranges vary from 0 to 1.5MPa, depending on the selected gauge.  Panel mounting is possible.General purpose gauge w/limit indicator , Back or vertical side thread , Indication precision: ±3% F.S. (full

Fluoropolymer Piping Equipment

8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1/2" x 3/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" 3/4" x 5/8" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 3/8" x 1/4" 1/8" x 0.086" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/8" x

High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

Aluminum High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

XL

(actuation port [2]-(7) is released) Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14).

Multi-Axis Step Motor Controller

(Refer to page 12.) 7 4-Axis Step Motor Controller (Parallel I/O/ Type) JXC73/83/93 Series JXC92 JXC73/83/93 How to Order Parallel I/O (JXC73/83) JXC 7 3 2 Controller I/O type I/O cable, mounting Symbol I/O cable Mounting 1 1.5 m Screw mounting 2 1.5 m DIN rail 3 3 m Screw mounting 4 3 m DIN rail 5 5 m Screw mounting 6 5 m DIN rail 7 None Screw mounting 8 None DIN rail Symbol I/O type 7

High Vacuum Angle Valve, XL Series

(actuation port [2]-(7) is released) Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14).

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Environment

(The lock cable is included when the motor with lock option is selected.) *7 Standard cable entry is (A) Axis side. i Cable length [m]*5, *8 o Driver type*5 25A25ANil Without cable 2 2 5 5 A 10 Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to

Type: General-Purpose/Standard Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.7, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.7 MPa, Connection screw: R 1/4, Option: None, Size: 42.5, Transparent cover material: Polycarbonate, Special Configurations: None, Attachment: Without cover ring assembly, Unit Specifications: MPa

(full span), GAUGE, SRH PRESSURE, AIRLINE EQUIPMENT, AR REGULATOR, 22, AR NO SIZE RATKIT/ACCESSORY, .30553 lb, ModelPressure range (1)Indication unitConnection threadNote MPaG46-7-01/020 to 0.7MPaR 1 8, 1 4?

Precision Clean Regulator

1 ARP 4 Bonnet PPS 5 Knob PBT IR-A i o Electroless nickel plated 6 Set nut ZDC 7 Valve spring Stainless steel 316 IR 8 Main valve Ceramics !

MY1

7 !

MXW

For details, refer to page 8-30-31. 8-7-22

Title not found

2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8

Title not found

2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8