Compact Cylinder Series CQS

B + Stroke L + Stroke A + 2 (Stroke) CUJ CU , Rod end male thread Width across flats B1 Width across flats B1 CQS MM MM CQ2 SMC RQ SMC H1 H1 CQM C1 C1 X X MU L1 L1 + Stroke A1 + 2 (Stroke) Rod End Male Thread Without auto switch A1 50 53 63 74 With auto switch A1 55 58 73 84 Bore size (mm) MM B1 C1 H1 L1 X 12 16 20 25 M5 x 0.8 M6 x 1.0 M8 x 1.25 8 10 13 17 9 10 12 15 4 5 5 6 10.5 12 14 17.5

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

Free Mount Cylinder Series CU

Applicable bore size (mm) d H1 B1 C1 Width across flats L MU 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 2 x P through M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 M4 x 0.7 4 x T counterbore M5 x 0.8 S + Stroke Auto switch M6 x 1.0 Z + Stroke M8 x 1.25 M10 x 1.25 (mm) Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11

Rotary Actuator

(If not specifying dimension C1, indicate instead.)

Rotary Actuator/Vane Style Series CRB2

(If not specifying dimension C1, indicate instead.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(If not specifying dimension C1, indicate instead.)

Compact Rotary Actuator Series CRQ2

E1 = X = Y Short shaft side Short shaft side L2 = L4 = X = C2 Y = C2 = C C1 = C E2 = D1 = E3 = D2 = Long shaft side Long shaft side C1 Y = Depending on the change that has been made, the flat portion of the standard product may remain. Size 20, 30, 40 Size 10, 15 L3 = (mm) L1 = X = Applicable shaft type: W Equal dimensions are indicated by the same marker.

CRBU

(If not specifying dimension C1, indicate instead.)

CRQ2

E1 = Short shaft side Short shaft side X = Y L4 = L2 = X = C2 Y = C1 = C C2 = C E2 = D1 = E3 = D2 = Long shaft side Long shaft side C1 Y= Depending on the change that has been made, the flat portion of the standard product may remain. Size 20, 30, 40 Size 10, 15 L3 = (mm) L1 = X = Applicable shaft type: W Equal dimensions are indicated by the same marker.

Possible to transfer a workpiece at low-speed.

(If not specifying dimension C1, indicate instead.) Applicable shaft types: S, W Equal dimensions are indicated by the same marker.

ZR

(VJ3133) Air operated VJA3130 0.245 0.213 0.194 0.187 0.174 0.184 0.214 K2 K3 C1 C2 C3 C4 Weight includes Bracket B. (Solenoid valve: 24 VDC, M plug connector type) Air operated VJA3130 N.C. (VJ3133) N.C. (VJ3133) Double SOL. (VJ3233-X18) How to Order Refer to page 13-3-34 for further part no. information.

Hygienic Design Cylinder Series HY

.: GR-S-010 (10 g) Stainless steel 1 16 Rod end nut (Only rod end male thread) 2 17 Magnet (Only built-in magnet) 862 Series HYQ Hygienic Design Cylinder Basic Type Dimensions Without auto switch: HYQB20, 25 F Q 2 x M5 x 0.8 H thread effective depth C 2 x 2 x OA D I 2 x N through KA R K R B + Stroke L M E A + Stroke Rod end male thread Width across flats KA MM Width across flats B1 H1 C1

1

H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1 C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of

Fieldbus system EtherNet/IP compatible SI Unit

) EX600-DX#C1 (5 byte) Byte Bit Parameter Setting value 0..3 Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID EX600-DX#C1: 0D (Hex) Unit parameter 0 Monitor short circuit (power) 0: disable, 1: enable 1 Reserved 0 2 Inrush current filter 0: disable, 1: enable 3 Reserved 0 2 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6..7 Input extension time 0: 1 ms, 1: 15 ms, 2:

EtherNet/IP TM Compatible Fieldbus System

Output data Offset Meaning MSB LSB MSB LSB (INT) 15 8 7 0 D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1 Slave 8 connection diagnosis 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 In the figure above, #A1 to #A3 are slaves for which the connection is diagnosed. In this case, #A3 slave is not connected, and a diagnostic error is generated.

Large Size Vacuum Module: Series ZR

(SYJ3133) Air operated (SYJA3130) K1 0.34 0.27 0.194 0.22 0.174 0.21 0.27 K2 K3 C1 C2 C3 C4 Air operated SYJA3130 N.C. (SYJ3133) N.C. (SYJ3133) Double SOL. (SYJ3233-X127) Weight includes Bracket B. (Solenoid valve: 24 VDC, M plug connector type) How to Order Refer to page 968 for further part no. information.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

) EX600-DX#C1 (5 byte) Byte Bit Parameter Setting value 0..3 Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID EX600-DX#C1: 0D (Hex) Unit parameter 0 Monitor short circuit (power) 0: disable, 1: enable 1 Reserved 0 2 Inrush current filter 0: disable, 1: enable 2 3 Reserved 0 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6..7 Input extension time 0: 1 ms, 1: 15 ms, 2:

Smooth Cylinder

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

EX500-GPR1A.eng

For GW unit Manifold valve Input unit manifold configuration NOTE When no Input unit is connected to the connector ( C1 ) or ( 0 ) of SI unit, mount a terminal plug on the connector.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Metric Long stroke Standard stroke Without auto switch With auto switch A Long stroke L1 24 25.5 28.5 32.5 Long stroke (mm) Standard stroke (mm) Standard C Bore (mm) Bore (mm) With/Without auto switch A C1 H1 X Inch L1 14 15.5 18.5 22.5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 32 32 41 44 F 7.5 7.5 9 11 L B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 Metric 6 8 7 12 12 16 20 25 12 16 20 25 9 10