EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

Prevents Micro-Bubbles

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

LPush-locking slotted style [D] While pressing, turn in the direction of the arrow. If you do not turn, the mechanism does not lock in position.

Speed Controller with Uni One-touch Fitting AS Series

AS-D Bore size AS-T U01 Uni Uni Uni Uni 1 8 1 4 3 8 1 2 U02 U03 U04 ASP ASN Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

ZR

ZR1D1 D2 D3 10.2 SMC PRESURRE SWITCH RESET SET Attachment D Digital pressure switch Suction filter 71.3 (73.3 for D2, D3 types) 81 SMC 61 PV PD Filter block D 78.8 3 Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer A Bracket A part no. : P3270153 (Standard accessory) Spacer A part no. : P3270156 13-3-19 19 Series ZR Suction Filter: ZR1-FX Specifications ZR1-FX

Electric Actuator Triple Axis P&P Unit

Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

Tie-rod Type Hydraulic Cylinder

For details, refer to page 443. 413 CHA Series How to Mount and Move the Auto Switch Solid state D-F59, D-F5P D-J59, D-F5BA D-F59W, D-F5PW, D-J59W D-F59F, D-F5NT Reed D-A53, D-A54, D-A56, D-A64, D-A67 D-A59W Solid state D-M9N(V), D-M9P(V), D-M9B(V) D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Auto switch mounting screw

Round Type Hydraulic Cylinder

Mounting correctly Mounting incorrectly Solid state D-G59, D-G5P, D-K59, D-G5BA D-G59W, D-G5PW, D-K59W D-G59F, D-G5NT, D-G5NB Solid state D-H7A1, D-H7A2, D-H7B, D-H7BA D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW Reed D-C73, D-C76, D-C80, D-C73C, D-C80C Reed D-B53, D-B54, D-B64, D-B59W Auto switch Auto switch Auto switch mounting screw M3 x 0.5

MLGC

Electrical entry (Fetching direction) Grommet Connector Grommet Connector Applicable bore size (mm) Type Model Features D-B80 D-B80C D-C80 D-C80C D-B53 D-B64 D-G59 D-G5P D-K59 D-G59W D-G5PW D-K59W D-G5BAL D-G59F D-G5NTL Without indicator light Reed switch Grommet Without indicator light 20 to 40 Diagnostic indication (2-color indication) Grommet Solid state switch Water resistant (2-color

MLGC

Electrical entry (Fetching direction) Grommet Connector Grommet Connector Applicable bore size (mm) Type Model Features D-B80 D-B80C D-C80 D-C80C D-B53 D-B64 D-G59 D-G5P D-K59 D-G59W D-G5PW D-K59W D-G5BAL D-G59F D-G5NTL Without indicator light Reed switch Grommet Without indicator light 20 to 40 Diagnostic indication (2-color indication) Grommet Solid state switch Water resistant (2-color

MGC

-X 20Applicable bore size (mm) Type Model Features Electrical entry Grommet Connector Grommet Connector D-B80 D-B80C D-C80 D-C80C D-B53 D-B64 D-G59 D-G5P D-K59 D-G59W D-G5PW D-K59W D-G5BAL D-G59F D-G5NTL Data Without indicator light Reed switch Grommet Without indicator light 20 to 50 Diagnostic output (2-color indication) Grommet Solid state switch Water resistant (2-color indication)

energy saving effect

60 61 Waterproof specification IPX4 Accessories Alarm code list stickers 2 pcs.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to page 17-6-3 for Safety Instructions and 17-5-59 to 17-5-61 for High Purity Chemical Valve Precautions.

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

CRB2/CRBU2/CRB1

, D-R80, D-T79.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, D-R80, D-T79.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, D-R80, D-T79.

CXS

Auto Switch Mounting Dimensions D-Z7, D-Z8 (Reed switch) D-Y5, D-Y6, D-Y7 (Solid state switch) Dimension A Bore size Switch types 6 10 15 20 25 32 A D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B D-Y7NWV, D-Y7PWV, D-Y7BWV D-Y7NW, D-Y7PW, D-Y7BW D-Y7BAL D-Z7, D-Z8 0.2 0.7 6.0 0.7 6.5 1.2 Auto Switch Mounting Caution When mounting and securing auto switches, they should be inserted into the cylinder's