15

1.0 M3 x 8 0.63 M4 x 10 1.5 8 7.5 19 M4 x 0.7 7.5 46 30 3.7 11 42 NY M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 7.5 19 M3 x 0.5 5.5 45 30 5 11 38 NX M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 4.5 19 M4 x 0.7 7.5 46 30 3.7 11 42 NM1 M3 x 5 0.63 M3 x 8 0.63 M4 x 10 1.5 5 11.8 19 3.4 7.0 31 28 3.5 8.5 42 NM2 M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 6 48 19 3.4 7.0 31 28 3.5 8.5 42 25 NZ M3 x 12 1.5

Rotary Actuator/Vane Type

-4 P211070-10 15 P611090-1 P811020-3 P811020-4 P211090-10 20 P611060-1 P611060-8 P811030-3 P811030-4 P211060-10 30 P611080-1 P811040-3 P811040-4 P211080-10 40 P611010-1 P611010-8 P611010-9 P811050-3 P811050-4 P211010-10 *1.

Air Cylinder

10 (12) M5 x 0.8 18 15.5 13 14 8 12 2 35 5 26 M4 x 0.7 depth 7 5 6 M8 x 1.25 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 16.5 10 14 2 40 6 31 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 20 12 18 2 40 6 38 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30

Air Cylinder Series CA2

3.5 1.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 8 10 3.5 1.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 12.5 11.5 8.5 7.5 6 5 5.5 4 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 12 10 16 14 9.5 7.5 9 7 6 4 6.5 4.5 4.5 12.5 8 6 10 8 17.5 15.5 16.5 13.5 12.5 17.5 11 10 10.5 9 7.5 6.5 8 7 14 13 9.5 8.5 11.5 10.5 19 18 D-A9 and D-A9V types cannot be mounted on 50.

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

NCQ8

Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 RCS-08 RCS-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 RCD-08 RCD-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2")

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model D-M9W D-M9A Bore size (mm) D-A9 D-A9V D-M9 D-M9V D-M9WV D-M9AV D-P3DW No. of auto switch mounted 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 10 10 10 10 10 10 10 5 10 10 10 5 10 5 10 5 10 5 10 5 15 15 10 10 10 10 10 5 15 15 15 15 15 15 15 15 15 15 15 15 5 5 5 5 5 5 5 5 5 5 10 5 10 5 10 5 10 5 10 5 10 10 10 10

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

e-Rodless Actuator

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

st 10 st 10 st 10 st 5 st 5 st 5st 5 st 5 st M4 x 0.7 6 6 9 10 12 5 60.5 27 54.5 13.5 24 50.5 22 44.5 8.5 19 4 7 14 5 10 M4 x 0.7 14 5 53 63 23.5 28.5 47 57 8.5 13.5 20.5 25.5 4 10 15 6.5 12 M6 x 1.0 20 8 61 71 24.5 29.5 52 62 9.5 14.5 23.5 28.5 5 12 18 8 16 M6 x 1.0 24 10 67.5 77.5 27.5 32.5 57.5 67.5 10 15 27.5 32.5 5 14 20 10 20 Double clevis bracket material: Carbon steel For details

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Mini Free Mount Cylinder

Allowable kinetic energy (J) Applicable bore size (mm) Bolt Proper tightening torque (Nm) 3.8 x 10-3 6.25 x 10-3 9.35 x 10-3 12.5 x 10-3 0.030 0.053 0.077 0.54 20% (0.432 to 0.648) 4 M2.5 x 0.45 6 8 10 12 16 (Supply pressure: P = 0.5 MPa) 1.06 20% (0.848 to 1.272) M3 x 0.5 100 3.27 20% (2.61 to 3.92) M4 x 0.7 10 20 16 12 10 Load mass m1 + m2 (kg) 6.6 20% (5.28 to 7.92) 20 M5 x 0.8 Torque

2–4

5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

Bearing Style: M (Slide Bearing), Bore Size: 6mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 20mm

Bearing Style: M (Slide Bearing), Bore Size: 6mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 30mm

Bearing Style: M (Slide Bearing), Bore Size: 6mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm

Bearing Style: M (Slide Bearing), Bore Size: 6mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet, Port