Air Slide Table Series MXS

5 V, 12 V 12 V Reed switch Solid state switch Relay, PLC Grommet Yes 24 V 5 V, 12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V Yes (NPN equivalent) 24 V Grommet Relay, PLC A93V A90V A93 A90 100 V 12 V 2-wire No 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

5 @1 !3 !0 !1 80, 100 80, 100 @2 Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CK95-32 No.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

to 100 kPa/NPN open collector 2 outputs 100 to 100 kPa/PNP open collector 2 outputs 100 to 100 kPa/NPN open collector 1 output + analog voltage 100 to 100 kPa/PNP open collector 1 output + analog voltage Specification ZQ1-ZSEA--A ZQ1-ZSEB--A ZQ1-ZSEC--A ZQ1-ZSEE--A ZQ1-ZSFA--A ZQ1-ZSFB--A ZQ1-ZSFC--A ZQ1-ZSFE--A 6 Series ZQ Dimensions Type K1 ZQ1 1U-K1 5 6 23 32 17.6 13.1 4 x 3.5 Mounting

CY1

50 300 Allowable driving force Fn (N) 200 40 30 20 100 Lo 20 30 40 50 10 Usable range 5 10 Usable range 5 Selection example 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 7 8 9 1 0 1 1 1 2 1 3 1 4 1 5 Given a load drive resisting force of Fn = 100 (N) and a distance from the cylinder shaft center to the load application point of Lo = 8cm, find the intersection

Cylinder with Lock

5 !6 @5 @8 @9 #6 r #3 #4 o q$6y#9 #1 $4 #0 B A w !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 @7 #5 @2 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts No.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

3(R2) 1 (P) (R2)3 5(R1) G, H, L, M, W 24, 12, 6, 5, 3 D, Y 24, 12 DC AC 50/60 Hz 2 position double solenoid 2 position double Coil rated voltage (V) 100, 110, 200, 220 10% of rated voltage 0.35 {With light: 0.4 (DIN terminal with light: 0.45)} 2(B) (A)4 4(A) (B)2 Allowable voltage fluctuation Standard With power saving circuit (R1)5 1 (P) 3(R2) 5(R1) (R2)3 1 (P) 0.1 (With light only) [

Programless controller Step motor (servo 24 VDC)

LEHS10 LEHS20 LEHS32 LEHS40 speed acceleration speed acceleration speed acceleration speed acceleration [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] 0 5 100 5 100 5 100 5 100 1 7 150 10 150 10 150 10 150 2 10 200 15 200 15 200 15 200 3 12 300 20 300 20 300 20 300 4 15 400 25 400 25 400 25 400 5 20 500 30 500 30 500 30 500 6 25 600 35 600 35 600 35 600 7 30 700 40 700 40 700

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

P)(EB) 5 1 3 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz VQC 3 position closed center 110 to 120 VAC, 50/60 Hz (B) (A) 4 2 4 220 VAC, 50/60 Hz VQZ 5 6 24 VDC 12 VDC 3 SQ (EA)(P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center VFS Option (B) (A) 4 2 4 VFR (EA)(P)(EB) 5 1 3 VQ7 3 position pressure center (B) (A) 4 2 5 (EA)(P)(EB) 5 1 3 How to Order Pilot Valve Assembly SF4

5 Port Solenoid Valve Series VQZ1000/2000/3000

SY3000-44-3A P.941 P.941 Base Mounted Blanking plate assembly VVQZ1000-10A-5 (for VQZ1000) VVQZ2000-10A-5 (for VQZ2000) VVQZ3000-10A-5 (for VQZ3000) Restrictor spacer (Applicable to VQZ2000) VVQZ2000-20A-5 Individual SUP spacer VVQZ1000-P-5-M5 (for VQZ1000) VVQZ2000-P-5-01 (for VQZ2000) VVQZ3000-P-5-02 (for VQZ3000) Individual EXH spacer VVQZ1000-R-5-M5 (for VQZ1000) VVQZ2000-R-5-01 (for

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-7-7 8 Cylinder with Lock Double Acting, Single Rod Series CNA 40, 50, 63, 80, 100 How to

Vacuum Unit

V V F V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 r Connector (Supply valve/Release valve/Pressure switch for vacuum) For supply valve/release valve: 300 mm (Connector assembly)4 For pressure switch for vacuum: 2 m (Lead wire with connector) Pressure

Compact

10 15 20 0 0 5 10 15 20 0 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Horizontal/Bottom mounting LES 500 500 500 500 LEPY LEPS 400 400 400 400 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 300 300 300 300 LER m Y 200 200 200 200 LEH 100 100 100 100 0 0 5 10 15 20 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 2 4 6 8 10 LEY -X5 Work load [kg] Work load [kg] Work load [kg

MLGP

or more Vertical Upward Mounting Ball Bushing MLGPL20, 25 5 30mm stroke or less V = 200mm/s 6 Over 30mm stroke V = 200mm/s 20 20 25 10 10 20 5 5 25 Load weight m (kg) Load weight m (kg) 20 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 7 50mm stroke or less V = 200mm/s 8 Over 50mm stroke V = 200mm/s 300 300 100 100 80 100 100 80 63 63 50

MLGP

or more Vertical Upward Mounting Ball Bushing MLGPL20, 25 5 30mm stroke or less V = 200mm/s 6 Over 30mm stroke V = 200mm/s 20 20 25 10 10 20 5 5 25 Load weight m (kg) Load weight m (kg) 20 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 7 50mm stroke or less V = 200mm/s 8 Over 50mm stroke V = 200mm/s 300 300 100 100 80 100 100 80 63 63 50

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

Electric Actuators

150 0 300 0 50 100 150 200 250 200 250 Speed [mm/s] Speed [mm/s] LEPY10(L) (Basic/Compact) Horizontal Vertical 5.5 5.5 Lead 5 (LEPY10K) 4.4 4.4 Lead 5 (LEPY10K) Work load [lb] Work load [lb] 3.3 3.3 Lead 10 (LEPY10J) 2.2 2.2 Lead 10 (LEPY10J) 1.1 1.1 0 350 300 0 50 100 150 0 350 300 0 50 100 150 200 250 200 250 Speed [mm/s] Speed [mm/s] 3 Model Selection Series LEPY Force Conversion Graph

Compact Cylinder with Lock Series CLQ

Applicable bore size (mm) 32 to 100 BQ-2 702 g BQ2-012 32 to 100 5 BQP1-050 40 to 100 16 For the auto switch mass, refer to page 1719.