CXS

CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 0 0.06 0 20 40 60 80 100 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s; up to 30mm 8 Graph V = up to 1000mm/s; up to 30mm 9 2 CXSM CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 0 0.04 0 0.04 20 40 60 80 100 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph V =

C76

8 30 14 9 58 23.8 10 12.2 M10 x 1.5 38 7 17 34.5 17 M8 x 1 34.5 38 47 24 M38 x 1.5 14 46.5 G 1/8 35 16 12 69 28.3 12 14.2 M12 x 1.75 50 8 22 42.5 19 M10 x 1 42.5 45 57 40 ZZ S XC Item 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Stroke Bore 32 68 (93) 118 139 143 164 168 189 214 97

C76

17 34.5 17 7 38 M10 x 1.5 12.2 10 23.8 58 9 14 30 G 1/8 37.5 12 M30 x 1.5 20 57 45 42.5 M10 x 1 19 42.5 22 8 50 M12 x 1.75 14.2 12 28.3 69 12 16 35 G 1/8 46.5 14 M38 x 1.5 24 40 ZZ S XC Item 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Stroke Bore 32 68 (93) 118 139 143 164 168 189

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

5 @1 !3 !0 !1 80, 100 80, 100 @2 Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CK95-32 No.

MB1

500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type. l h ZZ Note) Bore size (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Mitsubishi Electric Corporation Yaskawa Electric Corporation Axial Right Left Top Bottom None 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

C95

] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32 Load weight: m [kg] 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000

Applicable Auto Switch Model

Part No. of auto switch mounting bracket (including nut, screw and spacer) Bore size (mm) 12 BQ-1 Cylinder series 40 BQ-2 80 BQ-2 100 BQ-2 125 BQ-2 140 BQ-2 160 BQ-2 BQ-1 20 16 BQ-1 25 BQ-1 50 BQ-2 32 BQ-2 63 BQ-2 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BMU1-025 BMU1-025 BMU1-025 BMU1-025 BMU1-025 BQ-1 BQ-1 BQ-2 BQ-2 BQ-2 BQ-2 BQ-1 Mounting screw set (Stainless steel specification) Use the following

Table of Contents

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

CJ2

1 !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

. 3 10 LOZ For AC: 1 SY 5 1 Thread type Series Clean series Rated voltage Manual override 3 10-SY300 5 10-SY500 Nil Rc 1 100 VAC 3 110 VAC [115 VAC] Nil Non-locking push type D Push-turn locking slotted type G F N NPT Actuation type E Push-turn locking lever type Solenoid type Except for M5 NPTF T 1 Normally closed (N.C.) 2 Normally open (N.O.)

VFS

Rc EA, EB Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Pilot EXH port M5 x 0.8 G (PF) 1/4 Electrical entry Bottom Ported Size 5-bottom ported size (Refer to the below right.)

CG5-S

x 1.5 7 18 7 M18 x 1.5 69 1/4 176 80 to 750 130 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 210 100 to 750 131 110 10 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 26 8 M26 x 1.5 100 1/2 212 Flange brackets and plug bolts are installed before shipment from factory.

C85

1 1 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 q o !

C85

1 1 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 q o !

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

28 42 4(A), 2(B) port 2n x Rc 1/8, 1/4 VFR EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100-B04A) for the unused conduit port (G 1/2).

Aluminum High Vacuum Angle Valve

XL-25 XL-40 XL-50 XL-63 XL-80 XL-100 XL-160 Item Rated heater voltage 90 to 240 VAC 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs.

NCQ8

220 348 32.7 60.6 124 249 443 697 45.9 84.4 171 344 612 961 Inlet Outlet 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 0.76 0.67 1.42 1.33 2.50 2.47

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4