10

U U1 U U1 X X X1 X1 300 Q F D D 300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole E C R C R E 1.2 1.2 1.2 1.2 B1 B B1 B 2 x P Port size 2 x P Port size Y W Y W DIN terminal Conduit terminal U U1 U U1 X X X1 X1 Cable 6 to 12 F Q S 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D 34 D G1/2 Q2 F (44) 31.5 32 25 E T E C R C R G1/2 S2 B B1 2 x P Port size 2 x P Port size B B1 (mm) Mounting bracket

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.

Cylinder with Lock

F 58 psi Chart (6) m 73 psi Chart (7) F 1 Cylinder with Lock Series CNA2 Selection Chart Chart (5) Chart (2) 44 psi P < 58 psi 44 psi P < 58 psi 1000 1000 500 400 300 500 400 300 100 80 200 200 100 63 80 50 40 100 100 Load weight: m (kg) Load weight: m (kg) 63 50 50 40 30 50 40 30 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

Manifold Specifications

Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) G: 300 mm H: 600 mm Manual override (Non-locking) (PE port) (Lead wire length)

e

P Cable length is selectable from 1 m, 3 m and 5 m. P Improvement in the maximum operating temperature from 40C to 50C (Actuator unit only) P Mounting method can be selected among 3 types.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Supply the following power to L11 and L21.

CS1

Bore size (mm) 125 140 160 180 200 250 300 Refer to p.1.10-7 for How to Order Auto Switches Style.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Consult P/A.

SZ3000

(A) 4 (B) 2 Electrical entry B MN: Without lead wire MO: Without connector M: With lead wire (Length 300 mm) SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

SZ3000

(A) 4 (B) 2 Electrical entry B MN: Without lead wire MO: Without connector M: With lead wire (Length 300 mm) SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

NCQ8

(3"), 400(4") For 075, 106 For 300, 400 N-through hole P-port 2 places Q Q Z 4 places C-depth D-rod dia.

LX

Refer to page 100 for part numbers. 289 Made to Order Series LXP AC Servomotor Specification Guide Rod Type With Motor Brake/Without Motor Brake How to Order X12 LX P B A B D 100 F9N 1 S B AC servomotor specification Guide rod type P Actuator configuration Refer to the applicable motor list on the next page. Number of auto switches Ball bushing B Guide type 1 2 1 pc. 2 pcs.

0.4

Semistandard Exploded View of Manifold P. 1 P. 3 P. 5 P. 7 P. 11 P. 15 Features Variations Cylinder Speed Chart VQ1000 How to Order, Manifold Options VQ2000 How to Order, Manifold Options VQ1000/2000 Model, Standard/Manifold Specifications VQ1000/2000 F kit (D-sub connector) P. 17 VQ1000/2000 P kit (Flat ribbon cable) P. 21 VQ1000/2000 J kit (Flat ribbon cable) P. 25 VQ1000/2000 G kit (Flat

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P O A 75, 100 125, 150 200, 250 300 63 100 66 180 135 117 65 228 60 M12 234 135 12 14 180 158 250 228 25 25 M12 x 1.75 depth 23 Rc 1/4 Rc 3/8 Rc 1/2 200 80 115 76 214 160 138 75 262 70 M12 268 155 16 14 200 178 284 262 27 30 M12 x 1.75 depth 28 230 100 125 80 245 190 153 85 304 80 M14 310 175 16 16 226 200 326 300

LX

Guide rod type P Actuator configuration Refer to the applicable motor list on the next page.

Air Slide Table

= 100 V = 100 3 3 V = 200 V = 200 2 2 V = 300 V = 300 V = 500 1 1 0 0 50 100 150 200 250 300 0 0 50 100 150 200 250 300 350 400 L3: Overhang Allowable range: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

45

= 16 (Pitch) P = 16 DIN rail release button SV 2n-One-touch fittings 2-One-touch fittings 2-One-touch fittings 2n-One-touch fittings (A, B port) (P , R port) Applicable tubing O.D.: 10 (P , R port) Applicable tubing O.D.: 10 (A, B port) Applicable tubing O.D.: 4 6 8 4 6 8 Applicable tubing O.D.: SZ DIN rail holding screw DIN rail holding screw SY SYJ SX 300 (Lead wire length) (Rail mounting

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

P.1516 P.1410 P.125 P.219 P.285 P.329 P.353 P.409 P.447 P.463 P.479 P.547 P.599 P.771 P.791 P.833 P.854 P.858 Actuator page reference (: Best Pneumatics) P.39 P.21 1264 Applicable Cylinder Series 1 Auto Switch Guide CDY1S/CY1L CY1H CY1F CYP MXH MXU MXS MXQ/MXQR MXF MXW MXJ MXP MXY MTS MGJ MY1W HYDC HYDG MY1B-Z MY1HT Cylinder series MY1M MY1B MY1C MY1H CY3R MGP MY2 MY3 25 to 40, 63 to 100