CG5-X6011

C F G L S P Stroke (mm) Bore 40 50 63 80 100 Max Stroke 800 1200 1200 1400 1500 MP1 Double Rear Clevis MP2 Double Detatchable Rear Clevis MP3 Single Rear Clevis MP4 Single Detatchable Rear Clevis MF1 Front Flange MF2 Rear Flange MS1 End Angle MS2 Side Lug MS7 End Lug Cushion N A Rubber Bumper Air Cushion Seal Material R V NBR Viton Bore (mm) mm 40 50 63 80 100 In 1.50 2.00 2.50 3.25 4.00

ChemicalThermo-con

Signal contents A DC output B DC output C DC output 1) Common to HED003-C2A, HED005-C2A, HED007-C2A RS-485 D DC output E DC output Pin No. Signal contents D C F DC output 1 RS-485 BUS + 5 4 3 DC connector (HED007-C2l) G FG 2 RS-485 BUS 2 1 3 Unused 4 Unused 3.

PFxx-OMY0005

Error output is selected: Refer to page 43 e. Output OFF is selected: Refer to page 43 Press the SET button to set. Return to function selection mode.

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Digital Flow Switch (Integrated display type)

Other If there is a restrictor fitted, vibration may cause the flow adjustment valve to rotate and change the flow rate. -10No.PF-OMW0007-E Model Indication and How to Order -11No.PF-OMW0007-E IO-Link compatible product -12No.PF-OMW0007-E Option1 IO-Link compatible product Nil W N Q with lead wire and connector with lead wire and connector without lead wire M12 conversion lead wire (2 m)

5

c, d, e) BMA3-040S (A set of b, c, d, e) BMA3-050S (A set of b, c, d, e) BMA3-063S (A set of b, c, d, e) RZQ Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band * Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

High-precision Digital Pressure Switch

Incorrect pressure setting 5 -79No.PS-OMV0009-E Problem No.

PSxx-OMV0008CN

-2No.PS-OMV0008CN-E / *3) 1 1.5 3) 1 1 () [] -3No.PS-OMV0008CN-E () () () () -4No.PS-OMV0008CN-E () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) (ISE7G-T-ZS-48-A) N G -5No.PS-OMV0008CN-E Al2O3(96)C3604+FKM () O 1 /min 16MPa () * FG (35 N () ,() *() 6 33 -6No.PS-OMV0008CN-E () () 20 m DC(-)() * () () CE -5~70-5~50(5 ) (FKM) Al2O3()C3604()( ) -7No.PS-OMV0008CN-E

Table of Contents

C D E F Dimensions Part no.

HEC_W-E

This item is applicable U n i t N u m b e r M O D E < 0 only when multiple units are used. 2. Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

HEC_001W-E

U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f 7-10 Operation 7.6.3 Setting mode, Level 3 1.Unit Number Setting range : 0 to F (Hex decimal) Indicated content : Unit number (Ex. : 0) Function : Sets unit number used. This item is applicable only when multiple units are used. U n i t N u m b e r M O D E < 0 2.

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Type of actuation E Push-turn locking lever type 1 Normally closed (N.C.) 2 Normally open (N.C.)

JXCx-OMT0023

f) d) Incremental move command (200 10STM m) b) Incremental move command (100 10STM m) Forward rotation 0r/min Servo motor speed 1100 1200 1300 1000 1500 1700 a) c) e) f) 13 44 13.

Digital Flow Switches

L/min w e L t Unit display of flow rate for air/ Red (PF2A200, 201 for air only) CH1 to 4 will illuminate when the normal condition (nor) is selected. e OUT1 CH y Unit display/Orange Illuminates the selected unit.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !