ITV

Description Applicable model ITV10 P398010-600 Flat bracket assembly (including mounting screws) ITV30 ITV20, 30 P398020-600 ITV10 P398010-601 L-bracket assembly (including mounting screws) ITV20, 30 P398020-601 [Cable connector] 243 Part No.

CV/MVGQ

C J G5-S CV MVGQ Connection port A CC RB S + Stroke LS + Stroke ZZ + Stroke ZZ + l + Stroke h + l J Stroke range DBore size (mm) A AL B B1 C D E F H1 K LT J LD LH LS LX MM LZ (mm) 40 50 63 80 100 Up to 500 501 to 800 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 16 20 20 25 30 32 40 40 52 52 10

Metal Seal/Rubber Seal Series VQ Body Ported

Socket only (3 pcs.) 300 mm 600 mm 1000 mm 2000 mm 3000 mm Double solenoid part no. Socket only (3 pcs.) 300 mm 600 mm 1000 mm 2000 mm 3000 mm Lead wire length Single/3 position part no. AXT661-12A AXT661-14A AXT661-14A-6 AXT661-14A-10 AXT661-14A-20 AXT661-14A-30 Lead wire length Single/3 position part no.

Electric Actuator / Low profile slider type

( (L Li in ne ea ar r g gu ui id de e ( (L Li in ne ea ar r g gu ui id de e s si in ng gl le e a ax xi is s t ty yp pe e) ) d do ou ub bl le e a ax xi is s t ty yp pe e) ) LECP Series This manual describes the actuators operation in combination with the LECP6 series controllers.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

Cylinder with Lock

D E D B B1 C BH1 H K A BN N1 F AL H1 MM H1 ZZ + (2 x Stroke) S + Stroke H + Stroke A K AL MB B B1 C B C F N MA With rod boot e e * For one side rod boot type, a rod boot is mounted on the lock side (left side of the drawing above).

C95

6ui e!5 !

C95Series

Bore si~e ~ Standard stroke (mm) .

Support Guide/11-LEFG Series

B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35 11-LEFG25-S-500 630 507 610 11-LEFG25-S-550 680 557 660 12 5 600 11-LEFG25-S-600 730 607 710 11-LEFG25-S-150 280 157 260 11-LEFG25-S-200 330 207 310 6 2 240 11-LEFG25-S-250 380 257 360 11-LEFG25-S-300 430 307 410 8

Environment

0 i o e r t q u !1 !2 !3 !

AC Servo Motor Driver (Network card type ）

642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 7 7.

CV/MVGQ

WD E Manual button 8 l f H1 AL A K F N N 71 LL S + Stroke H ZZ + Stroke ZZ + l + Stroke h + l Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 C D E F H1 I K KA LL MM N Q S J Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 30 35 35 40 40 84 90 98 116 126 The minimum stroke of

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

VZ3000

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

Base Mounted Metal Seal/Rubber Seal Series VQ

Note q w e Material Material No.

LJ1H

A B C D Maximum Speeds for Each Transfer Load Unit (mm/s) Transfer load (kg) 15 20 25 30 1000 1000 930 740 600 500 Note Model LJ1H202PC-500LJ1H202PC-600LJ1H202PC-700LJ1H202PC-800LJ1H202PC-900LJ1H202PC-1000700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-1B2H1Power supply: 200/220(V)AC 10% Compatible controller

HEC_001W-E

U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f 7-10 Operation 7.6.3 Setting mode, Level 3 1.Unit Number Setting range : 0 to F (Hex decimal) Indicated content : Unit number (Ex. : 0) Function : Sets unit number used. This item is applicable only when multiple units are used. U n i t N u m b e r M O D E < 0 2.

Dual Rod Cylinder Series CXSJ/CXS

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

New

G Grommet E NPT Grommet 1E 12 VDC (With surge voltage suppressor) G E G H K L Z 1F NPT 48 VAC 1G 1H 1V 1J Rc 220 VAC 240 VAC E E DIN terminal Special voltage With light Without DIN connector G (With surge voltage suppressor) E E NPT 24 VAC 12 VDC 48 VAC Rc E 1K 1L Note) When the body is resin, one-touch fittings are equipped. 220 VAC 240 VAC Conduit terminal 1M 1W (With surge voltage suppressor