2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

VQZ1000/2000/3000

2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

A

I L O T O P E R AT E D P R E S S U R E R E G U L AT O R ACCESSORIES P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R Mounting Bracket B24 NAR425 B25 NAR625 S Y M B O L S Bracket Dimensions Bracket No.

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) Production discontinued XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

Step Motor Controller

P Signals and terminal status can be monitored. P Parameters can be set.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

) (4.9) 1/8 (P, R port) Manual override (Pitch) P=16 21 Approx. 300 (Lead wire length) 4.5 L2 L1 (Station n) (Station 1) (Light/surge voltage suppressor) + + + + 54.1 [61.1] 38.7 25.5 (Pitch) P=16 21 One-touch fitting (A port) Applicable tubing O.D.: 4,5/32" 7.5 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 49 49 49 49 P R P R P R P R 57.2 [59.4] 52.2 67 [69.2

VZ100/300/500

of P port and exhaust air from both sides of R port. 40R-2 Applicable solenoid valve VZ314RVZ324RApplicable blanking plate assembly DXT200-8-3A How to Order VV3Z3 40R 05 2 01 X port R port Stations P/R port Thread type P port A port side 2 stations 02 P port Nil Rc G NPT NPTF M5 01 M5 x 0.8 1/8 A port F N T 20 stations 20 R port Note) For more than 9 stations, supply air to both sides

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

Electric Actuator Miniature Rod Type Miniature Slide table Type

/See 2.1 Specifications on p.9 /See 3.1 Specifications on p.12 Use within specification range. 3) Load/resistance more than /See 2.1 Specifications on p.9 specified range is being applied /See 3.1 Specifications on p.12 to the actuator.

Step Motor Controller

P Signals and terminal status can be monitored. P Parameters can be set.

100

0, P cannot be selected. !

CL

For stopping accuracy, refer to Series CLJ (P. 9-2-12), Series CLM2 (P. 9-2-20), Series CLG1 (P . 9-2-30), and Series CL1 (P . 9-3-2) respectively. 7. In order to further improve stopping accuracy, the time from the stop signal to the operation of the lock should be shortened as much as possible.

MNB

P-76 (M)

Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

350, 400, 450, 500, 600, 700, 800 1300 12-CY3R40 40 Rc1/4 NPT1/4 G1/4 12-CY3R50 12-CY3R63 50 63 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special order.

Air Slide Table/Long Stroke Type Series MXY

seal X42 Anti-corrosive guide unit X45 EPDM seal Mass (g) Stroke (mm) Stroke (mm) One side centralized piping, with switch rail One side centralized piping, without switch rail Model 250 300 350 400 250 300 350 400 50 230 410 910 100 280 480 1020 150 330 550 1130 200 380 620 1240 100 330 510 1060 150 390 600 1190 200 450 690 1320 50 270 420 930 MXY6 MXY8 MXY12 690 1350 760 1460 780 1450

C95Series

(mm) =~ J Standard Stroke Refer to page 19 on "Minimum Allowable Stroke When Mounting Auto Switches ~. 32 ' 25,50. 75,100, 125,150, 175, 200, 250,300, 350,400, 450,500 700 ~; 40 25, 50, 75, 100, 125, 150, 175. 200, 250, 300, 350, 400, 450, 500 800 SO 1200 25, 50, 75,100, 125, 150, 175, 200, 250, 300, 350, 400,450. 500, 600 63 25. 50,75,100. 125,150, 175,200, 250. 300, 350,400, 450,500, 600

MK

Full stroke Clamp stroke Made to Order Heat resistant Max. 150C Refer to to p.5.4-1 regarding detailed specifications. 4.1-1 Series MK/MK2 Precautions Precautions Be sure to read before handling. Refer to p.0-39 to 0-46 for Safety Instructions and actuator and auto switch precautions.