Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

80 (3B) 600 Note) Tapered female thread connection conforming to JIS B 0203 is compatible.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

H 20 24 30 Battery-less Absolute G L Left side parallel A 12 16 20 Step Motor 24VDC B 6 8 10 Stroke Motor option Actuator cable type/length 50 50 Nil Without option Robotic cable [m] to to B With lock Nil None R8 8 1200 1200 Grease application (Seal band part) R1 1.5 RA 10 *For details, refer to the applicable stroke table below.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

24 30 L Left side parallel (Step motor 24 VDC) A 10 12 16 20 B 5 6 8 10 Stroke1[mm] Motor option Auto switch compatibility (In-line only) 23456 Nil Housing B bottom6 Positioning pin hole Grease application (Seal band part) 50 50 Nil Without option Nil With Nil None B With lock K Body bottom 2 locations N Without (Roller specification) C With (Includes 1 mounting bracket) 1200 1,200 *Refer

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

Modular Design with Uniform Body Style

B B B AC20-D 1/8 1/8 M5 x 0.8 Width across flats 14 Width across flats 14 N.O.: Black N.C.: Gray B AC30-D to AC60-D B B B B B B Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Barb fitting applicable tubing: T0604 1/4 1/4 1/4 Width across flats 17 Width across flats 17 Width across flats 17 Standard specifications Bracket mount P1 P2 A B C E F G J K M N Q1

0.4

B B B B B B B X P X P 49 24.5 9.5 STA 1B 1A 1 2B 2A 2 4B 4A 4 3B 3A 3 D SIDE U SIDE 16 TERMINANAL NO.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

1

to ports (A) and (B), both A and B strokes extend.

AC Servo Motor Driver (CC-Link Type ）

to [F], [b] to [f]).

Base Mounted Metal Seal/Rubber Seal Series VQ

Unused A Unused A A A B A B A B A B A B A B A VQC Double Double Double Double Single Single Single Single Single Single SI unit SI unit SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 VQ0 Single/Double mixed wiring (Option) Double wiring (Standard) VQ4 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ5 VQZ ADDRESS NO. STATION NO.

10

A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.

New

$P b 0.14 bar.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

1.1

Specify the quantity of units necessary for use with your piping system. 29 Series HRG Dimensions [Dustproof filter set] HRG-FL001 HRG-FL005 A A (10) (25) (25) B (25) (25) (10) B Surface fastener HRG-FL010 A (10) (25) (25) B (390) (390) HRG-FL015 A (10) A (10) (25) (25) (25) (25) B (Large) (Small) B (390) (390) (mm) A B C Part no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

CATALOG VC10

SOL A SOL B SOL A SOL B CYL CYL EXH IN EXH IN SOLENOID B ENERGIZED SOLENOID A ENERGIZED SOLENOID A DE-ENERGIZED SOLENOID B DE-ENERGIZED NOTE: ALL PORTS OPEN WHEN BOTH SOLENOIDS ENERGIZED ALL PORTS CLOSED WHEN BOTH SOLENOIDS DE-ENERGIZED OPTIONS AVAILABLE: 3 WAY HI-PRESSURE VALVE HOUSING OPTIONS see page 78 COIL OPTIONS see page 79 MISCELLANEOUS OPTIONS see page 76 *STRAIN RELIEF CONNECTOR

TABLE OF CONTENTS

SOL A SOL B SOL A SOL B CYL CYL EXH IN EXH IN SOLENOID B ENERGIZED SOLENOID A ENERGIZED SOLENOID A DE-ENERGIZED SOLENOID B DE-ENERGIZED NOTE: ALL PORTS OPEN WHEN BOTH SOLENOIDS ENERGIZED ALL PORTS CLOSED WHEN BOTH SOLENOIDS DE-ENERGIZED OPTIONS AVAILABLE: 3 WAY HI-PRESSURE VALVE HOUSING OPTIONS see page 78 COIL OPTIONS see page 79 MISCELLANEOUS OPTIONS see page 76 *STRAIN RELIEF CONNECTOR