ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 134 CP96 Series Dimensions Basic: CP96S (D) B C (JJ) W Bore size Stroke With rod boot at both ends PL 2 x EE port PL Cushion valve Width across flats SW Width across flats SW WB WA WB WA KK D D e e d d KK 2

VFS

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

Valve Single Unit

connector type) Manifold (c) DIN rail release button U side Position for increasing stations (a) Bolt (b) Block separation (c) DIN rail release button lever Lid D side Replacement Parts Description SX3000 Part no.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Motor 24 VDC) Table Accuracy (Reference Value) A side B side Traveling parallelism [mm] (Every 300 mm) q Model q C side traveling parallelism to A side w D side traveling parallelism to B side C side w LEKFS25 0.04 0.02 LEKFS32 0.04 0.02 LEKFS40 0.04 0.02 D side * Traveling parallelism does not include the mounting surface accuracy.

JXCx-OMT0023

Program end 1000[r/min] 200[ms] 300[ms] 500[10STMm] 250[10STMm] 400[10STMm] 100[ms] 500[10STMm] 300[10STMm] a) b) c) d) e) f) g) a) 250 10STM m c) 400 10STM m e) 300 10STM m Forward rotation 0r/min Servo motor speed 100ms ON Program output 1 (OUT1) OFF b) d) f) g) 13 37 13. POSITIONING MODE 4) Program example 4 POINT "MOV" cannot be used with "TRIPI".

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

e

500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 LC3F2 LC3F2 Speed (mm/s) Speed (mm/s) Speed (mm/s) Xm Xm Load Mass: E-MY2H (Single Axis) D-m D-m E-MY E-MY E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 E-MY2H16 4 4 E-MY2H16 4 E-MY2H16 3 3 3 2 2 2 1 1 100 200

Hygienic Design Cylinder Series HY

C D C D C Mounting bolt part no.

IZx-OMT0049

Connect the controller and high voltage power supply module Connect the D-sub connector in location C and fix the controller and high voltage module together using M4x30 screws (2 pcs. included as an accessory). Tightening Torque: 0.22 to 0.24 Nm M4x30 (Included) C : D-sub connector d.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

0.4

F kit U side 1 to 12 stations (Double wiring) D side 24 D side D-sub Connector kit P kit 1 to 12 stations (Double wiring) 24 D side (1) 26P 20P 1 to 9 stations (Double wiring) 18 Flat ribbon cable connector kit J kit 1 to 8 stations (Double wiring) Flat ribbon cable (20P) PC wiring system compatible JD0 D side 16 Flat ribbon cable (20P) (PC wiring system compatible) C kit C Connector kit

Cylinder with Lock Series CLS

Hs 33 Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht Hs A 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5

Electric Rotary Table

D-G

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

4/5 Port Solenoid Valve

DC specifications of type D and DO is only available with 12 and 24 VDC.

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT TF3040C-TX TF3060C-TX [Unit: mm] 3-M6 8-M M4 M4 3-M6 M6 Approx.17 22 22 G 2 F 1 E 2 IN D 1 D 1 D 1 L C 2 K 2 B 5 J A 5 H 5 Model Dimensions [mm] A B C D E F G H J K L M R3.25 length 8 TF3040C-TX 438 412 390 100 175 160 145 200 Approx.190 180 Approx.91.5 (M6) TF3060C-TX 12 35 12.

Guide Cylinder/Compact Type Series MGC

D-B7/B8 D-G7/K7 Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) (mm) D-G59F D-G5W D-K59W D-G5BAL D-G5 D-K59 D-G5NTL D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7C D-G5NTL D-G5/K59 D-G5W D-K59W D-B5/B64 D-B59W D-G5BAL D-G59F Auto switch model Auto switch model D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7W D-H7BAL D-H7 D-H7C D-H7NF D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-C7

5 Port Solenoid Valve

B [Pressure center] D side U side Function C 4-position dual 3-port (N.C. + N.O.)

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.