IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

RHC

There may be the case it will vary substantially depending on an ambient environment. 15 + 50 ( ) CE2 n2 2 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n2) ML2B 20 + 50 ( ) n2 2 D-B59W 15 20 75 (n = 2, 4, 6, ) C J G5-S D-A3 D-A44 D-G39 D-K39 CV 10 35 100 100 + 100 (n 2) 35 + 30 (n 2) MVGQ CC Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Clamp Cylinder with Lock

Applicable cylinder series CLK2Pl40-50 CLKP40-R050 63 50 40 CLK2Pl40-75 CLKP40-R075 Dedicated to CLK2Pl40 series D-P4DWSC D-P4DWSE D-P4DWL/Z CLK2Pl40-100 CLKP40-R100 CLK2G series BK1T-040 CLK2Pl40-125 CLKP40-R125 CLK2Pl40-150 CLKP40-R150 BAP1T-040 D-P79WSE D-P74L/Z CLK2P series CLK2Gl50-50/CLK2Pl50-50 CLKG50-R050 CLK2Gl50 series CLK2Pl50 series CLK2Gl50-75/CLK2Pl50-75 CLKG50-R075 CLK2Gl50

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Same side 120 75 90 (n 2) 2 (n 4) 2 120 + 50 (n 4) 2 20 + 50 90 + 50 Different sides n = 2 ,4 ,6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 D-B59W n = 2, 3, 4 90 + 50 (n 2) 120 + 50 (n 2) 75 + 50 (n 2) Same side n = 2, 4, 6 n = 2, 4, 6, 8 120 90 1 pc. 15 75 Different sides 90 80 35 Same side 100 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) D-A3 D-G39 D-K39 Different

39

, 75 , 90 , 105 A photograph shows handle unit L.

4/5 Port Solenoid Valve

DC specifications of type D and DO is only available with 12 and 24 VDC.

VQZ1000/2000/3000

Insert D at the end of the manifold part number.

Table of Contents

C D E F Dimensions Part no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Auto Switch Proper Mounting Height [mm] Auto switch model D-B5l D-B64 D-B59W D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-Z7l D-Z80 D-Y59l D-Y7P D-Y7BA D-Y7lW D-M9l D-M9lW D-M9lA D-A9l D-A3l D-G39 D-K39 D-A44 D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-M9lV D-M9lWV D-M9lAV D-A9lV Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs Hs Hs Ht 40 30 30 34 30 31 30 30 30

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

93 80 L1 L2 : With light/surge voltage suppressor Common EXH: VV5F5-21-1 (G) (E) (T) (D, Y) Double Single 2n-Rc 1/4, 3/8 (A, B port) 6-Rc 1/2 (P, R port) (Mounting hole) Y: 217.5 (3 position: 246.5) D: 218.5 (3 position: 247.5) Y: 108.5 (3 position: 123) D: 109.5 (3 position: 124) 196 (3 position: 225) 98 (3 position: 112.5) 86.5 (3 position: 101) 60.5 (3 position: 75) 218.5 (3 position:

AC Servo Motor Driver (Pulse input type/Positioning type ）

H T E d W T D L Max.

IDU/IDF

dryer Applicable dryer Port size Rc E D D C A B Part No.

MXF

162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8-6-13 14 Series MXF Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V (mm) B E Stroke Model Stroke A 100 30 50 75 20 10 100 75 50 30 20 10 8 (5.5) 11.1 (8.6) 13.8 (11.3) 18.7 (16.2) 8 (5.5) 3 (0.5) 11.1 (8.6) MXF8 9.5 10 5 10 27.1 (24.6) 23.8 (21.3) 20.7 (18.2

Air cylinder

n=4, 8, 12, 16 65 95 2 switches (Different side) 60 75 80 85 2 switches (Same side) 90 100 105 110 D-A3 D-G39 D-K39 65+30(n2) n=2, 4, 6, 8 Other qty.

0.4

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

LJ1H

B A C D Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

5 Port Solenoid Valve

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

•

bAs B6.type B (n ~ 2.4 _ l) 0.5 50.5 :"'Hs 43.5 15 +50( 0" ) 75 +55(n2) 15 75 ~ ' B6lype I><>S'KSlype 3.5 3.5 A 2 ( n ~ 2 . 4.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2) i D-A31ype 1><>3 ' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !

CY1

Note 2) D-Z73, D-Z76, D-Z80 D-F79, D-F7P, D-J79 D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) D-F9N, D-F9P, D-F9B Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for CY1R6 to 20.