4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L1 L2 L3 L4 110.5 123 135.5 148 160.5 160.5 173 185.5 198 100 112.5 125 137.5 150 150 162.5 175 187.5 77.8 87.8 97.8 107.8 117.8 127.8 137.8 147.8 157.8 19.5 20.5 22 23 24 19 20 21.5 22.5 20 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D B (S, R, RS) 1 2 P J Stations (Pitch) P = 10 [

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQZ2000) VVQZ3000-R-5-02 (for VQZ3000) P.959 P.959 P.959 P.959 Port plug VVQZ1000-CP (for VQZ1000) VVQZ2000-CP (for VQZ2000) VVQZ3000-CP (for VQZ3000) Name plate [-N] (Applicable to VQZ2000/3000) VVQZ2000-N5(for VQZ2000) VVQZ3000-N5(for VQZ3000) DIN rail AXT100-DRBlanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 Stations Stations + + + P.959 P.960 P.960 P.960 Silencer (for EXH port) Perfect

LEH_C

/LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS /P.10 2.1.1 /LEHZ /P.13 2.2.1 /LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS 3) 4) /P.50 8.3 5) () /P.53 8.3 6) /P.39 6. 7) 8) () 0 /P.28,30 9) () /P.28,30 () 10) /P.28,30 INC/ () 29 - No. 2 / 1)() () () 2)IN* 15ms( No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

+ Stroke 50 + Stroke 125 150 Rc 1/8 139 164 125 150 139 164 40 Rc 1/8 Rc 1/8 56.5 + Stroke 40.5 + Stroke 66.5 + Stroke 50.5 + Stroke 50 125.5 150.5 Rc 1/4 141.5 166.5 125.5 150.5 Rc 1/4 Rc 1/4 141.5 166.5 Note) External dimensions with rubber bumper are same as standard type as shown above.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Supply the following power to L11 and L21.

Air Cylinder Series CS1

surfaces Same surface 35 100 110 150 2 110 + 30(n2) (n = 2, 4, 6, 8 ) 150 + 100(n2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 35 + 30(n2) Different surfaces n 110 + 100(n2) (n = 2, 4, 6, 8 ) 150 + 30(n2) (n = 2, 4, 6, 8 ) Same surface 100 + 100(n2) 1 110 150 15 35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

VQC

DIN rail clamp screw 0 76.5 1 10 (12) 60 49.5 30 25 C10 1(P) port 13.5 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

Fieldbus System

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(P .1190) (P .1190) (P .1190) S0700 Note) (P .1212) (P .1214) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) VQ (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) VQ4 (P .1153) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1173) (P .1175) VQ5 (P .1190) (P .1190) (P .1190

5 Port Solenoid Valve, Series VQC

port DIN rail clamp screw 0 76.5 1 10 (12) 60 49.5 30 25 13.5 C10 1(P) port 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5

Series IDG

R Size 60 75 100 50/27 100/54 150/85 Note) In case of two or more options, indicate them in alphabetical order.

45

A: Orange B: Green 110.5 100 84 13 148 137.5 116 16 160.5 150 132 14 173 162.5 148 12.5 198 187.5 164 17 210.5 200 180 15 223 212.5 196 13.5 235.5 225 212 11.5 (Station n) (Station 1) Block separation lever (Push type) (DIN rail dimension) SS5X5-45Stations BC4 C6 C8 (Pitch) P = 16 DIN rail release button 2n-One-touch fittings 4-One-touch fittings (A, B port) Applicable tubing O.D.: (P , R

Thermo-chiller

9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17 Communication Functions. p. 18 Options. p. 19 Optional Accessories. . p. 20 VCooling Capacity Calculation Required Cooling Capacity Calculation. p.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

SMC Pneumatic Clean Series

C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

VQZ1000/2000/3000

2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Series AK1000

Refer to gauge guide (P.94,95).

Compact Manifold Regulator

Compact Manifold Regulator ARM10/11 Series ARJ Manifold Type Single Unit Type AR425 to 935 Common supply Individual supply Standard Front knob ARX AMR ARM ARM ARP P.740 P.739 IR-A Example of panel mounting P.726 P.716 IR IRV Front knob type is newly added to the single unit specifications. VEX Allows high degree of freedom in selection according to the installation conditions.