Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.
The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) L (7.5) VZ3000-123-1A 8 Label for EXH block disk Label for SUP/EXH block disk Label for SUP block disk (35) (25) P R P R P R P R P R 5.5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors [Rail mounting pitch
(17.5) 1/2 40 37 128 41 60 30 50 3 14 14 100 71 16 110 M12 x 1.75 10 With Rod Boot (mm) (mm) With Air Cushion (mm) Bore size Rc, NPT port WA WB W WH GA GB P 20 12 10 (12) M5 x 0.8 16 15 (16) 25 1.5 25 12.5 10 (12.5) M5 x 0.8 16 14.5 (16) 25 1.5 32 12 10 (12) 1/8 16 14 (16) 25 1.5 40 13 10 (13) 1/8 17 15 (17) 20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20
pulse multiplying factor denominator) PB09 VG2 Speed loop gain P, S PB10 VIC Speed integral compensation P, S PA08 ATU Auto tuning mode P, S PB11 VDC Speed differential compensation P, S PA09 RSP Auto tuning response P, S PB12 OVA Overshoot amount compensation P PA10 INP In-position range P PB13 NH1 Machine resonance suppression filter 1 P, S PB14 NHQ1 Notch shape selection 1 P, S PA11 TLP
Holding voltage is 25% of the starting voltage (the application method is shown on the back of the solenoid coil). Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.)
Holding voltage is 25% of the starting voltage (the application method is shown on the back of the solenoid coil). Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.)
of P port and R port. 1/8 4-4-12 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Type 20 Manifold: Top Ported/SS3YJ3-20Stations -00 (-F) [ ] for AC Grommet (G) 3.5 L2 (6) (2.5) (17.3) 10 (21.5) V100 M3 x 0.5 (Bracket mounting screw) 2-3.5 (For mounting) SY SYJ (Pitch) P=10.5 12.5 41.5 M3 x 0.5 (A port) 5 5 VK 2 (2.5) 1.9 10 5 10 5 VZ 12.7 R P P 26.4 21 25 48.6 [50.8] VT R
Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080
A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture
25 25 1 l/min (ANR) {In the case of Inlet air pressure 0.7 MPa} Bracket Assembly (Accessory) Part No.
52 14 21 13 M12 x 1.75 10 22 48 M22 x 1.5 80 +0.084 0 0.1 0.3 25 35.5 100 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 58 M26 x 1.5 Bore size (mm) N P RR S U H Z ZZ 27 1/4 10 84 16 51 165 175 40 50 30 3/8 12 90 19 58 183 195 63 31 3/8 16 98 23 58 196 212 80 37 1/2 20 116 28 71 235 255 100 40 1/2 25 126 36 72 256 281 Double Clevis Style: CA2YD 2 x P (Rc, NPT, G) 4 x J Rod dia.: CDd9 Hole
IA8X 1 y ZPR400 40 43 29 42.5 G H G I H 15 79.5 10 ,p mm Applicable tube ZPR25D 25 28 20 35 48~ 636 25 89.5 .6 AppHcabfe'l\Jbe O.D Q R ~S Appllcabfe tube (mm) I 24.3 16.8 6 12.8 A:PPlicab~ )iJ~ 0.0 ;P Q R _ .SI 8 . 2$.,2,; 18.7 . 15.2 . 8 ;' 4 23.3 15.8 1 0.4 .6 6 24.3 '16.8 12.8 I ~8 8 26.2 18.7 15.2 18 Vacuum Entry HorizC?"
Q Note) CE-compliant Note) DIN terminal D only for 100 VDC XLS 25 5 G Without control power supply XLS 25 P 1 G With control power supply High vacuum angle valve (Bellows pressure balance, 2-stage voltage switching type) Valve size Electrical entry G Grommet 16 25 KF16 KF25 Voltage 1 2 5 100 VAC 200 VAC 24 VDC Control power supply P With control power supply Note) There are no CE-compliant
) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections Model Applicable pad form Connection/Thread dia.
VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.
3/8 3/8 1/2 1/2 15 18 25 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 84 90 98 116 126 94 100 108 126 136 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 Double Clevis Style: CA2DQ 2-P (Rc, NPT, G) 4-J Shaft diameter: CDd9 Hole diameter: CDH10 MM Width across flats KA G G D E Width across flats B1
28.5 32.5 25 27.5 31 35 60 62.5 66 70 69.5 72 75.5 79.5 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C