Metal Seal/Rubber Seal Series VQ Body Ported

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

High Power Cylinder Series RHC

JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E 0 Effective thread length 32 250 to 1000 35 50 0.042 0 250 to 1000 11 72 75 7 11 80 16 23 58 20 60 80 35 32 63 55 0.074 0 250 to 1000 13 89 78 10 13 90 20 23 61 25 75 95 40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

N S LX X LY Y l ZZ h f e H ZZ ZZ 125 140 160 180 200 250 300 1/2 341 133 75 40 318 110 0.2 stroke 157.5 M30 x 1.5 35 98 100 45 20 364 Lube Non-lube Air-hydro 1/2 133 341 40 318 75 110 0.2 stroke 180.5 M30 x 1.5 35 98 112 45 30 364 3/4 367 40 141 75 346 120 0.2 stroke 197 M36 x 1.5 39 106 118 50 25 388 3/4 399 153 45 85 135 381 0.2 stroke 227 M40 x 1.5 39 132 111 60 30 417 3/4 1 399 153 90

High Purity Chemical Valve

Single type Suck back P P P TL/TIL A B A B Unit Single type Unit LQ3 Manifold (5 stations max.) A R P 3 port N.C. PA N.C.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 8-31-1.) Note 2) (For intermediate stops, refer to page 8-15-74.)

Prevents Micro-Bubbles

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Mechanically Jointed Rodless Cylinder Series MY1

(Refer to P. 1083.)

Vacuum System Peripherals:

Note 5) Please contact SMC regarding indication with other units of pressure. 0 25 50 75 100 Input signal (% F.S.) Hysteresis 1 Output deviation (% F.S.) 0.5 Out Out How to Order 0 Return Return ITV 209 0 0 1 2 5 S 0.5 Pressure display unit Pressure range 5 kPa 9 1.3 to 80 kPa 1 0 25 50 75 100 Cable connector type Input signal (% F.S.)

AC

(Refer to "Best Pneumatics 1" on p.1.17-21 for further information.)

CXS

CXS P 6 M 50 A90 J S Number of auto switches 2 pcs. 1 pc.

High Power Cylinder Series RHC

P S WH ZZ Bore size (mm) 50 M18 x 1.5 27 1/2 215 6.8 to 11.3 305 25 7 18 116 16 80 11 75 53 63 M18 x 1.5 215 305 24.5 27 1/2 80 11 75 7 18 60 124 16 80 M22 x 1.5 3/4 228 8.5 to 13.5 328 30.5 32 78 10 22 20 90 13 75 155 100 M26 x 1.5 341 34 41 3/4 236 26 16 80 10 90 172 20 95 1208 High Power Cylinder Series RHC Dimensions: Head Side Flange Style 20 to 40 NN GA 2 x Rc P FZ GB Width across

ITV

Rc(PT) 3/8 03 P P Connection Rc(PT) 1/2 04 P Bracket B p p Accessories 178 Bracket C p p Connection NPT1/4 N02 p p qAF3000 wAFM3000 eITV2000 Connection NPT3/8 N03 p p Connection NPT1/2 N04 p Connection G(PF) 1/4 F02 p p REGULATOR Connection G(PF) 3/8 F03 ITV3000 p p Connection G(PF) 1/2 F04 p Approx. 243 Modular Connection Part Numbers Approx. 172 ITV20ll ITV30ll Description AF3000 AF4000

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ0 L VQ4 kit VQ5 VQZ VQD P. 2-4-146 P. 2-4-150 P. 2-4-154 Terminal block box L Enclosure IP65 compliant kit Enclosure IP65 compliant Enclosure IP65 compliant W type only P. 2-4-146 P. 2-4-150 P. 2-4-154 P. 2-4-158 C kit P. 2-4-196 P. 2-4-200 P. 2-4-204 Terminal block C kit P. 2-4-196 P. 2-4-200 P. 2-4-204 Terminal block 2-4-117 2-4-118 Cylinder Speed Chart Use as a guide for selection.

CLA

p>. .-~ --_1 124 (5000) ,/ /. / --/./-.P: 2 ;;; 900 (4000) !

High Vacuum Angle Valve

Bellows seal Dust free, P.3 cleaned Single acting (N.C.) XLAV-2 New New Bellows seal Dust free, Solenoid valve P.4 cleaned (With solenoid valve) XLC-2 Double acting Bellows seal Dust free, P.7 Air operated cleaned High-speed operation XLF-2 Single acting (N.C.) O-ring seal P.10 High operating cycles Solenoid valve High-speed operation Single acting (N.C.)

ISO Standard Hydraulic Cylinder

CHQ (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 20 65 95 85 80 75 CHK (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-M9V/M9WV 20 + 30 65 + 30 75 + 30 80 + 30 85 + 30 95 + 30 "n" pcs.

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications